用于子孔径拼接干涉系统的机械误差补偿算法

张敏; 隋永新; 杨怀江

doi:10.3788/OPE.20152304.0934

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用于子孔径拼接干涉系统的机械误差补偿算法

现代应用光学 | 更新时间：2020-08-13

- 用于子孔径拼接干涉系统的机械误差补偿算法
- Mechanical error compensation algorithm for subaperture stitching interferometry
- 光学精密工程 2015年23卷第4期页码：934-940
- 作者机构：
  
  1. 中国科学院大学北京,中国,100049
  2. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家科技重大专项资助项目(No.2009ZX02205)()
- DOI：10.3788/OPE.20152304.0934
  中图分类号： TG84:TH744.3
- 收稿日期：2013-11-04，
  
  修回日期：2014-01-03，
  
  纸质出版日期：2015-04-25
- 稿件说明：
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张敏, 隋永新, 杨怀江. 用于子孔径拼接干涉系统的机械误差补偿算法[J]. 光学精密工程, 2015,23(4): 934-940

ZHANG Min, SUI Yong-xin, YANG Huai-jiang. Mechanical error compensation algorithm for subaperture stitching interferometry[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 934-940
张敏, 隋永新, 杨怀江. 用于子孔径拼接干涉系统的机械误差补偿算法[J]. 光学精密工程, 2015,23(4): 934-940 DOI： 10.3788/OPE.20152304.0934.

ZHANG Min, SUI Yong-xin, YANG Huai-jiang. Mechanical error compensation algorithm for subaperture stitching interferometry[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 934-940 DOI： 10.3788/OPE.20152304.0934.

摘要

针对拼接干涉检测系统机械定位精度引起的各子孔径间的相对定位误差

提出了含定位误差补偿项的全局最优化拼接算法。介绍了该算法原理

从理论上分析了该算法拟合出的平移和旋转定位系数的精度。结合MetroPro和Matlab软件仿真模拟实验

分析了机械定位误差对拼接检测精度的影响。实验表明:拟合出的平移定位系数精度高于旋转定位系数精度

与理论分析一致;相对于一般算法

该算法对机械误差有较强的免疫力。在搭建的拼接检测装置上检测了口径为150 mm的平面镜

结果显示:拼接结果与干涉仪直接检测的全口径相位残差的分布峰谷值(PV)为0.015 30λ

均方根值(RMS)为 0.001 570λ

得到的结果十分接近

验证了该算法稳定可靠

能够合理有效地补偿机械精度引起的子孔径定位误差。

Abstract

An error compensation algorithm was proposed by introducing a position correction compensator into general stitching algorithm to reduce the relative location errors between subapertures due to poor positioning accuracy in a subaperture stitching interferometry. The working principle of the algorithm was introduced and the accuracy of the fitted translation and rotation coefficients was analyzed in theory. Then a simulation experiment by using MetroPro software and Matlab software was implemented

and the influence of positioning accuracy on the stitching results was analyzed. The simulation result shows that the accuracy of rotation coefficient is less than that of the translation coefficient and is consistent with the theoretical analysis. Moreover

the algorithm is more robust than the general stitching algorithms. For the purpose of experimental verifying mechanical error compensation algorithm

150 mm flat mirror was tested by a subaperture stitching interferometer and a full aperture interferometer. The test results indicate that the peak-to-valley(PV) and root-mean-square(RMS) of the phase distribution residue are 0.015 30λ and 0.001 570λ

respectively as compared with the stitching results from the directly measured full aperture

which means that the optimal algorithm is stable and reliable and effectively compensates positioning system errors.

关键词

Keywords

references

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