利用相位差异法检测镜面面形

马鑫雪; 王建立

doi:10.3788/OPE.20152304.0975

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利用相位差异法检测镜面面形

现代应用光学 | 更新时间：2020-08-13

- 利用相位差异法检测镜面面形
- Surface testing with phase diversity method
- 光学精密工程 2015年23卷第4期页码：975-981
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2011AA8082035)()
- DOI：10.3788/OPE.20152304.0975
  中图分类号： TH743;TQ171.6+5
- 收稿日期：2013-05-28，
  
  修回日期：2013-07-15，
  
  纸质出版日期：2015-04-25
- 稿件说明：
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马鑫雪, 王建立,. 利用相位差异法检测镜面面形[J]. 光学精密工程, 2015,23(4): 975-981

MA Xin-xue, WANG Jian-li,. Surface testing with phase diversity method[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 975-981
马鑫雪, 王建立,. 利用相位差异法检测镜面面形[J]. 光学精密工程, 2015,23(4): 975-981 DOI： 10.3788/OPE.20152304.0975.

MA Xin-xue, WANG Jian-li,. Surface testing with phase diversity method[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 975-981 DOI： 10.3788/OPE.20152304.0975.

摘要

为了验证相位差异波前检测器演示系统利用自带光源独立完成波前检测任务的能力

搭建了基于相位差异法检测镜面面形的实验平台。测试时在焦面和离焦面上同时采集短曝光图像

在已知离焦量的前提下解算出波前相位分布并恢复出目标

从而实现对大镜面像差的估计。为了进一步验证相位差异测量方法的准确性

对相位差异法与高精度的ZYGO干涉仪得到的测量结果进行了比较分析。实验结果表明:两种方法获得的面形误差分布及误差的峰谷值(PV)和均方根值(RMS)一致性很好

而波前RMS的测量精度达到了2.83/1 000

。得到的结果表明提出的相位差异法能有效地检测出镜面的像差

且准确性很好。

Abstract

To verify the demonstration system of a phase difference wavefront detector by using its own light source to complete the wavefront detection independently

an experiment platform to detect the mirror surface shape with the phase diversity method is set up. The phase diversity method collects shorter exposure images in the focal plane and away from the focal plane at the same time

then it calculates the distribution of wavefront solutions and recovers the target based on known defocus

so as to realize the estimation of large mirror aberration. In order to further validate the phase diversity method

the measurement results from phase diversity method are compared with that from a high accuracy ZYGO interferometer. Experimental results demonstrate that the error distribution

PV values and RMS values of the two methods are well in agreement

and their wavefront RMS accuracy is 2.83/1 000

. These results mean that the phase diversity method effectively detects the mirror aberration and has good feasibility and accuracy.

关键词

Keywords

references

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