线切割与真空热扩散焊组合工艺制备微模具

钟金明; 伍晓宇; 徐斌; 罗烽; 李积彬; 阮双琛

doi:10.3788/OPE.20152304.0988

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线切割与真空热扩散焊组合工艺制备微模具

微纳技术与精密机械 | 更新时间：2020-08-13

- 线切割与真空热扩散焊组合工艺制备微模具
- Laminated fabrication of micro-mold based on WEDM and thermal diffusion welding
- 光学精密工程 2015年23卷第4期页码：988-995
- 作者机构：
  
  1. 深圳大学机电与控制工程学院深圳市模具先进制造技术重点实验室,广东深圳,518060
  2. 深圳大学广东省高校先进光学精密制造技术重点实验室,广东深圳,518060
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51175348,No.51375315,No.51405306)();中国博士后科学基金资助项目(No.2014M552233)();
- DOI：10.3788/OPE.20152304.0988
  中图分类号： TG76
- 收稿日期：2014-07-10，
  
  修回日期：2014-10-07，
  
  纸质出版日期：2015-04-25
- 稿件说明：
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钟金明, 伍晓宇, 徐斌等. 线切割与真空热扩散焊组合工艺制备微模具[J]. 光学精密工程, 2015,23(4): 988-995

ZHONG Jin-ming, WU Xiao-yu, XU Bin etc. Laminated fabrication of micro-mold based on WEDM and thermal diffusion welding[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 988-995
钟金明, 伍晓宇, 徐斌等. 线切割与真空热扩散焊组合工艺制备微模具[J]. 光学精密工程, 2015,23(4): 988-995 DOI： 10.3788/OPE.20152304.0988.

ZHONG Jin-ming, WU Xiao-yu, XU Bin etc. Laminated fabrication of micro-mold based on WEDM and thermal diffusion welding[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 988-995 DOI： 10.3788/OPE.20152304.0988.

摘要

采用线切割和真空压力热扩散焊组合工艺制备了高深宽比的三维微结构。分别研究了线切割与热扩散焊工艺并获得了较好的工艺参数用于制备微模具。首先

在脉冲宽度为10 μs

脉冲间隔为40 μs

线切割电流为0.28 A

电压为60 V的条件下

对100 μm厚的铜箔进行线切割

获得了多层二维微结构。然后

在热扩散温度为850 ℃

热扩散时间为10 h

压力为1.0 μPa的工艺参数作用下

对多层铜箔二维微结构进行真空压力热扩散焊接

通过多层二维微结构的叠加形成微模具

并制备了六棱台微型腔模具及微型级联齿轮模具。实验结果表明:三维微模具表面形貌较好

制作结果较理想

与设计模型基本相符。最后

通过超声模压成型分别获得了二阶和三阶的塑料级联齿轮。这些微塑件质量良好

验证了该工艺方法的可行性。

Abstract

A 3D micro-structure with a high aspect ratio was fabricated by combining Wire Electrical Discharge Machining(WEDM) and vacuum pressure thermal diffusion welding. The WEDM and thermal diffusion welding were researched

and the better technological parameters were obtained to fabricate a micro-mold. Firstly

a copper foil with a thickness of 100 μm was cut to obtain a multi-layer 2D micro-structure under the conditions of a pulse width of 10 μs

a pulse interval of 40 μs

a wire cutting current of 0.28 A and a voltage of 60 V. Then

the 2D micro-structure of a multilayer copper foil was fabricated by vacuum pressure thermal diffusion welding under the technological parameters in a thermal diffusion temperature of 850°C

a thermal diffusion time of 10 h and a pressure of 1.0 μPa. The multilayer copper 2D microstructure was connected together by vacuum pressure thermal diffusion welding to fit into a six frustum pyramid mold and gear molds with two-stage steps and three-stage steps

respectively. Experimental results indicate that the 3D micro-mold with good surface quality is an ideal fabrication and fits to design models. Finally

based on ultrasonic powder molding

two-stage and three-stage plastic gears are respectively obtained. These micro plastic parts show good quality

which verifies the feasibility and usability of laminated micro molds.

关键词

Keywords

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