多层UV-LIGA电铸镍材料的抗冲击性能

周织建; 聂伟荣; 席占稳; 王晓锋

doi:10.3788/OPE.20152304.1044

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多层UV-LIGA电铸镍材料的抗冲击性能

微纳技术与精密机械 | 更新时间：2020-08-13

- 多层UV-LIGA电铸镍材料的抗冲击性能
- Anti-impact material properties of UV-LIGA multi-layered electroformed nickel
- 光学精密工程 2015年23卷第4期页码：1044-1052
- 作者机构：
  
  南京理工大学机械工程学院,江苏南京,中国,210094
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51475245)()
- DOI：10.3788/OPE.20152304.1044
  中图分类号： TH140.1;TQ153.4
- 收稿日期：2014-06-20，
  
  修回日期：2014-07-27，
  
  纸质出版日期：2015-04-25
- 稿件说明：
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周织建, 聂伟荣, 席占稳等. 多层UV-LIGA电铸镍材料的抗冲击性能[J]. 光学精密工程, 2015,23(4): 1044-1052

ZHOU Zhi-jian, NIE Wei-rong, XI Zhan-wen etc. Anti-impact material properties of UV-LIGA multi-layered electroformed nickel[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 1044-1052
周织建, 聂伟荣, 席占稳等. 多层UV-LIGA电铸镍材料的抗冲击性能[J]. 光学精密工程, 2015,23(4): 1044-1052 DOI： 10.3788/OPE.20152304.1044.

ZHOU Zhi-jian, NIE Wei-rong, XI Zhan-wen etc. Anti-impact material properties of UV-LIGA multi-layered electroformed nickel[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 1044-1052 DOI： 10.3788/OPE.20152304.1044.

摘要

为研究采用UV-LIGA(Ultraviolet Lithography

Galvanoformung

Abformung)技术制作的多层电铸镍的机械可靠性

对其进行了抗冲击性能分析。利用冲击试验台及信号采集系统测试了UV-LIGA多层电铸镍的抗冲击性能。实验分析得到其累积失效概率-加速度峰值曲线近似拟合于韦布尔统计分布

韦布尔系数γ=7.6

参考加速度为21 300

。当加速度为12 000~18 000

时

可靠性相对较高;当加速度为12 000~18 000

时

累计失效概率增加较快;当加速度大于24 000

时

可靠性下降迅速。利用扫描电子显微镜(SEM)观察了试样

得到其主要的失效形式有分层、断裂、塑性变形以及黏连等。初步分析了失效原因

并提出了相应的优化设计方法

为UV-LIGA多层结构的设计提供实验依据。

Abstract

To explore the mechanical reliability of multi-layered electroformed nickel prepared by UV-LIGA (Ultraviolet Lithography

Galvanoformung

Abformung) multi-layered manufacturing technology

the anti-impact material properties of the multi-layered electroformed nickel were analyzed. High-speed impact tests for the multi-layered electroformed nickel were completed by adopting an impact testing device and a signal acquisition system. The experimental results show that the cumulative failure probability - peak acceleration curve approximately fits the Weibull statistical distribution

the Weibull coefficient is 7.6 and the reference acceleration is 21 300

. When the acceleration is 12 000-18 000

it shows a higher reliability; when that is 12000-18 000

the cumulative failure probability increases greatly; however the reliability is declines rapidly at acceleration more than 24000

. A Scanning Electron Microscopy(SEM) was used to observe the samples and the results show that the delamination

fracture

plastic deformation and adhesion are the main failure modes. Finally

the failure causes were analyzed and corresponding optimization methods were proposed to improve the process of UV-LIGA multi-layered electroformed nickel

which verifies that the experiments provide bases for design of a multi layer structure of UV-LIGA.

关键词

Keywords

references

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