X-Y精密定位平台的敏感函数逆前馈补偿控制

崔晶; 王迪凡

doi:10.3788/OPE.20152304.1081

您当前的位置：

首页 >

文章列表页 >

X-Y精密定位平台的敏感函数逆前馈补偿控制

微纳技术与精密机械 | 更新时间：2020-08-13

- X-Y精密定位平台的敏感函数逆前馈补偿控制
- Feedforward compensation control of X-Y precise positioning table using inversed-sensitive function
- 光学精密工程 2015年23卷第4期页码：1081-1087
- 作者机构：
  
  北京工业大学机械工程与应用电子技术学院北京,100124
- 作者简介：
  
  [ "崔晶(1976-),女,黑龙江齐齐哈尔人,博士,副教授,硕士生导师,2004年于哈尔滨工业大学获博士学位,主要从事精密运动控制、嵌入式系统等方面的研究。E-mail:cuijing@bjut.edu.cn" ]
  [ "王迪凡(1990-),男,北京人,硕士研究生,2012年于北京工业大学获学士学位,主要从事精密运动控制等方面的研究。E-mail:twdidi9005@sina.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(No.61005066)();国家科技重大专项资助项目(No.2013ZX04008021)()
- DOI：10.3788/OPE.20152304.1081
  中图分类号： TH703;TP273
- 收稿日期：2014-08-09，
  
  修回日期：2014-09-20，
  
  纸质出版日期：2015-04-25
- 稿件说明：
移动端阅览
崔晶, 王迪凡,. X-Y精密定位平台的敏感函数逆前馈补偿控制[J]. 光学精密工程, 2015,23(4): 1081-1087

CUI Jing, WANG Di-Fan,. Feedforward compensation control of X-Y precise positioning table using inversed-sensitive function[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 1081-1087
崔晶, 王迪凡,. X-Y精密定位平台的敏感函数逆前馈补偿控制[J]. 光学精密工程, 2015,23(4): 1081-1087 DOI： 10.3788/OPE.20152304.1081.

CUI Jing, WANG Di-Fan,. Feedforward compensation control of X-Y precise positioning table using inversed-sensitive function[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 1081-1087 DOI： 10.3788/OPE.20152304.1081.

摘要

针对音圈电机驱动的

X-Y

定位平台中稳态误差导致的系统定位精度较低的问题

提出了基于敏感函数逆的前馈补偿控制方法。首先

采用频域辨识方法建立了系统模型

基于终值定理推导出系统扰动和稳态误差的关系

并由此设计了敏感函数的逆模型来补偿扰动对稳态误差的影响

从而提高系统精密定位性能。最后

在搭建的音圈电机驱动

X-Y

定位平台上进行了不同运动行程的实验研究。实验结果表明:在行程为10 μm

最大加速度为6 mm/s

的微定位运动条件下

补偿后的定位误差可由2 μm降低到0.2 μm;在行程为10 mm

最大加速度为6 m/s

的宏定位运动条件下

定位误差可由2 μm降低到0.4 μm。实验结果验证了本方法的有效性

为后续高精密伺服系统的研制提供了重要参考和设计依据。

Abstract

As the stable state error of an

X-Y

precise positioning table driven by a Voice Coil Motor(VCM) will lead to a poor position precision

a feedforward compensation method based on inversed-sensitive function was proposed. Firstly

the system model was set up based on frequency domain identification

and the relationship between system disturbances and steady state error was established using final-value theorem. Then

an inversed-sensitive function was designed to compensate the effect of the disturbances on the stable error and to improve the positioning accuracy of the system. Finally

the experiments of different strokes were implemented on the

X-Y

table driven directly by the VCM to validate the efficacy of the proposed method. The experimental results show that the static errors of the system decrease from 2 μm to 0.2 μm with a micro positioning of 10 μm and a maximum acceleration of 6 mm/s

and those decrease from 2 μm to 0.4 μm with a macro positioning of 10 mm and a maximum acceleration of 6 m/s

. Obtained achievements verify the validity of the proposed method and provide a references for the subsequent study in high accuracy positioning servo system design.

关键词

Keywords

references

张刚, 刘品宽, 张波, 等. 直线电机精密运动平台轨迹跟踪控制器设计[J]. 光学精密工程, 2013, 21(2): 138-146. ZHANG G, LIU P K, ZHANG B, et al.. Design of trajectory tracking controller for precision positioning table driven by linear motor[J]. Opt. Precision Eng., 2013, 21(2): 138-146. (in Chinese)

胡俊峰, 张宪民. 3自由度精密定位平台的运动特性和优化设计[J]. 光学精密工程, 2012, 20(12):2686-2695. HU J F, ZHANG X M. Kinematiacl properties and optimal design of 3-DOF precision positioning stage[J]. Opt. Precision Eng., 2012, 20(12):2686-2695. (in Chinese)

ANANTHANARAYANAN K S.Third-order theory and bang-bang control of voice coil actuators[J]. IEEE Transaction on Magnetics, 1982, 18(3): 888-892.

ZHANG H B, Huang X H, Peng G, et al.. Dual-stage HDD head positioning using H∞almost disturbance decoupling controller and a tracking differentiator [J]. Mechatronics 2009, 19(5): 788-796.

XU L M, ZENG S, GUO N.Design and analysis of a passive damping device in a head actuator assembly[J]. Proceedings of IMechE, Part C: Journal of Mechanical Engineering Science, 2002, 216(3): 353-366.

JIE D G, SUN L N, LIU Y J, et al.. Design and simulation of a macro-micro dual-drive high acceleration precision XY-stage for IC bonding technology[C]. Proceedings of 2005 6th International Conference on Electronic Packaging Technology, Shenzhen, 2005:1-5.

王福军. 芯片键合高速精密定位系统设计与控制[D]. 天津:天津大学, 2010. WANG F J. Design and Control of Precision Positioning System with High Speed for IC Bonding [D]. Tianjin:Tianjin University, 2010. (in Chinese)

向红标, 谭文斌, 李醒飞, 等. 基于LuGre模型的自适应摩擦补偿[J]. 机械工程学报, 2012, 17:70-74. XIANG H B, TAN W B, LI X F, et al.. Adaptive friction compensation based on LuGre model[J]. Journal Of Mechanical Engineering, 2012, 17:70-74. (in Chinese)

王丽梅, 李兵. 基于摩擦观测器的直接驱动XY平台轮廓控制器设计[J]. 电机与控制学报, 2013, (1):31-36. WANG L M, LI B. Contour controller design for direct drive XY table based on friction observer [J]. Electric Machines And Control, 2013, (1):31-36. (in Chinese)

于伟, 马佳光, 李锦英, 等. 基于LuGre模型实现精密伺服转台摩擦参数辨识及补偿[J]. 光学精密工程, 2011, 19(11):2736-2743. YU W, MA J G, LI J Y, et al.. Friction Parameter Identification and Friction Compensation for Precision Servo Turning Table[J]. Opt. Precision Eng., 2011, 19(11):2736-2743. (in Chinese)

倪风雷, 刘宏, 介党阳. 基于速度观测器的GMS摩擦模型辨识与补偿[J]. 电机与控制学报, 2012(11):70-75. NI F L, LIU H, JIE D Y. GMS friction model identification and compensation based on velocity observer[J]. Electric Machines And Control, 2012(11):70-75. (in Chinese)

黄显林, 鲍文亮, 卢鸿谦, 等. 一种具有时变观测器增益的摩擦补偿方法[J]. 电机与控制学报, 2011(11):46-49, 54.

HUANG X L, BAO W L, LU H Q, et al.. Friction compensation using observers with time-varying gain[J]. Electric Machines And Control, 2011(11):46-49, 54. (in Chinese)

徐智浩, 李胜, 张瑞雷, 等. 基于LuGre摩擦模型的机械臂模糊神经网络控制[J]. 控制与决策2014(6):1097-1102.

XU ZH H, LI SH, ZHANG R L, et al.. Fuzzy-neural-network control for robot manipulators with LuGre friction model[J]. Control and Decision, 2014(6):1097-1102.

TOMIZUKA M. Zero phase error tracking algorithm for digital control[J]. Syst.Meas. and Control, 1987(109): 65-68.

浏览量

727

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

基于Zigzag柔性簧片的大行程XY精密运动平台

全簧片式空间大行程并联柔性微定位平台及其轨迹控制

电磁驱动柔顺微定位平台闭环频域逆迭代学习控制

大行程快速反射镜的结构设计及带宽特性

采用柔性铰链的快速反射镜设计