基于数字微镜器件实现共焦测量的结构光参数

余卿; 叶瑞芳; 范伟

doi:10.3788/OPE.20152305.1272

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基于数字微镜器件实现共焦测量的结构光参数

现代应用光学 | 更新时间：2020-08-13

- 基于数字微镜器件实现共焦测量的结构光参数
- Parameters of structured lights of DMD used in confocal measurement
- 光学精密工程 2015年23卷第5期页码：1272-1278
- 作者机构：
  
  1. 华侨大学机电及自动化学院,福建厦门,361021
  2. 上海理工大学光学工程博士后流动站上海,200093
- 作者简介：
- 基金信息：
  
  福建省自然科学基金青年创新基金资助项目(No.2013J05078)();华侨大学高层次人才科研启动基金资助项目(No.12BS109)()
- DOI：10.3788/OPE.20152305.1272
  中图分类号： TH703
- 收稿日期：2015-02-02，
  
  修回日期：2015-03-17，
  
  纸质出版日期：2015-05-25
- 稿件说明：
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余卿, 叶瑞芳, 范伟. 基于数字微镜器件实现共焦测量的结构光参数[J]. 光学精密工程, 2015,23(5): 1272-1278

YU Qing, YE Rui-fang, FAN Wei. Parameters of structured lights of DMD used in confocal measurement[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1272-1278
余卿, 叶瑞芳, 范伟. 基于数字微镜器件实现共焦测量的结构光参数[J]. 光学精密工程, 2015,23(5): 1272-1278 DOI： 10.3788/OPE.20152305.1272.

YU Qing, YE Rui-fang, FAN Wei. Parameters of structured lights of DMD used in confocal measurement[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1272-1278 DOI： 10.3788/OPE.20152305.1272.

摘要

虽然采用并行共焦测量提升了共焦测量速度

但系统中的传统光分束器件参数固化后难以适应不同的被测对象。本文利用数字微镜器件(Digital Micromirror Device

DMD)可产生柔性化结构光的特点

将其作为光分束器件引入共焦测量装置以提升系统对被测对象的适应性。理论分析了DMD的空间调制方法

搭建了DMD的共焦测量装置

研究了DMD结构光参数对共焦测量轴向分辨率、横向分辨率以及图像对比度等指标的影响。实验表明

在光学系统参数匹配的条件下

结构光光点参数越小

测量分辨率越高。同时

利用DMD进行柔性化照明

改善了因光点参数小造成的图像对比度下降的问题。得到的结果为研究基于DMD的跨尺度测量方法提供了研究基础。

Abstract

Parallel confocal measurement improves confocal measuring efficiency. However

the parameters of traditional optical divided devices (ODD) are fixed

which are not be suitable for different specimens. As the Digital Micromirror Device (DMD) is a flexible ODD and could produce different types of structured lights

this paper induces the DMDS into the confocal measurement system to improve the suitability of parallel confocal measurement devices. A modulation model of structured light produced by the DMD was analyzed

a confocal measurement device was constructed

and the effects of parameters of structured light from the DMD on the axial resolution

transverse resolution and the image contrast of measuring device were researched. The experiment results indicate that when the optical parameters are matched

the smaller the size of structured light is

the higher the measuring resolution is. Moreover

the DMD also could be applied as a flexible illuminator to improve the image contrast caused by a smaller structured light size. All of these researches provide a strong support for multi-scale measurement based on DMDs.

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references

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