应用高精度旋转法的干涉仪检测误差校正

韩冬松; 何昕; 魏仲慧; 李一芒

doi:10.3788/OPE.20152305.1297

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应用高精度旋转法的干涉仪检测误差校正

现代应用光学 | 更新时间：2020-08-13

- 应用高精度旋转法的干涉仪检测误差校正
- Error correction of interferometer detection with high-accuracy rotation method
- 光学精密工程 2015年23卷第5期页码：1297-1303
- 作者机构：
  
  1. 中国科学院大学北京,中国,100049
  2. 中国科学院长春光学精密机械及物理研究所,吉林长春,130033
  3. 中国人民解放军防化研究院北京,102205
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60902067)();吉林省重大科技攻关项目(No.112DGG001)()
- DOI：10.3788/OPE.20152305.1297
  中图分类号： TB92;TH744.3
- 收稿日期：2014-07-20，
  
  修回日期：2014-09-03，
  
  纸质出版日期：2015-05-25
- 稿件说明：
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韩冬松, 何昕, 魏仲慧等. 应用高精度旋转法的干涉仪检测误差校正[J]. 光学精密工程, 2015,23(5): 1297-1303

HAN Dong-song, HE Xin, WEI Zhong-hui etc. Error correction of interferometer detection with high-accuracy rotation method[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1297-1303
韩冬松, 何昕, 魏仲慧等. 应用高精度旋转法的干涉仪检测误差校正[J]. 光学精密工程, 2015,23(5): 1297-1303 DOI： 10.3788/OPE.20152305.1297.

HAN Dong-song, HE Xin, WEI Zhong-hui etc. Error correction of interferometer detection with high-accuracy rotation method[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1297-1303 DOI： 10.3788/OPE.20152305.1297.

摘要

针对利用高精度菲索型干涉仪和旋转平均法对光学元件进行面形绝对检测时对旋转精度的要求

提出了一种旋转误差校正模型来修正面形绝对检测中的旋转非对称项误差。首先基于经典

步旋转平均法理论

通过泽尼克多项式给出面形误差的数学表达形式;然后根据旋转角度所引起的误差修正泽尼克系数进而修正旋转非对称项误差;最后用数值仿真及实验的方法验证了校正模型的正确性。在旋转角度误差为0.1条件下的仿真结果显示:

步旋转平均法所得面形误差RMS值为真实面形的10.13%

校正后面形误差RMS值为真实面形的6.79%;实验结果显示:

步旋转平均法所得面形误差RMS值为真实面形的10.28%

校正后面形误差RMS值为真实面形的5.77%。这些结果证明所提出的校正模型准确可靠

提高了旋转平均法的检测精度。

Abstract

According to the requirements of absolute flatness detection of optical elements for rotation accuracy by using high-accuracy rotation method based on a Fizeau interferometer

a rotary error correction model was proposed to correct the rotationally asymmetric deviation in the detection. Firstly

on the theoretical basis of the classical

-step rotation average method

a mathematical expression of surface deviation was given by Zernike polynomials. Then

the Zernike coefficient was corrected according to the error caused by the rotation angle and the rotationally asymmetric deviation was corrected. Finally

the correctness of the calibration model was verified by numerical simulation method and an actual experimental test. In the conditions in rotation error of 0.1

the simulation shows that the absolute detection error(Root Mean Square

RMS) is 10.13% by using the

-step rotation average method

and it can be promoted to 6.79% after being corrected. Moreover

the experiment shows that the detection error(RMS) is 10.28% by using the same method

and it is promoted to 5.77% after being corrected. These results demonstrate that the proposed calibration model is accurate and reliable

which improves the detection accuracy of the rotational averaging method and reduces the rotationally asymmetric deviation to the proportion of 27.2%.

关键词

Keywords

references

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