三维队列微电极在微细电火花加工的应用

徐斌; 王振龙; 伍晓宇; 雷建国; 阮双琛

doi:10.3788/OPE.20152305.1304

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三维队列微电极在微细电火花加工的应用

微纳技术与精密机械 | 更新时间：2020-08-13

- 三维队列微电极在微细电火花加工的应用
- Application of 3D queue micro-electrode to micro-EDM
- 光学精密工程 2015年23卷第5期页码：1304-1313
- 作者机构：
  
  1. 深圳大学机电与控制工程学院深圳市模具先进制造技术重点实验室,广东深圳,518060
  2. 哈尔滨工业大学机电工程学院微系统与微结构制造教育部重点实验室,黑龙江哈尔滨,150001
  3. 深圳大学电子科学与技术学院深圳市激光工程重点实验室,广东深圳,518060
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51405306,No.51175348,No.51205258)();中国博士后科学基金资助项目(No.2014M552233)();
- DOI：10.3788/OPE.20152305.1304
  中图分类号： TG661
- 收稿日期：2015-11-12，
  
  修回日期：2015-12-20，
  
  纸质出版日期：2015-05-25
- 稿件说明：
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徐斌, 王振龙, 伍晓宇等. 三维队列微电极在微细电火花加工的应用[J]. 光学精密工程, 2015,23(5): 1304-1313

XU Bin, WANG Zhen-long, WU Xiao-yu etc. Application of 3D queue micro-electrode to micro-EDM[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1304-1313
徐斌, 王振龙, 伍晓宇等. 三维队列微电极在微细电火花加工的应用[J]. 光学精密工程, 2015,23(5): 1304-1313 DOI： 10.3788/OPE.20152305.1304.

XU Bin, WANG Zhen-long, WU Xiao-yu etc. Application of 3D queue micro-electrode to micro-EDM[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1304-1313 DOI： 10.3788/OPE.20152305.1304.

摘要

研究了三维微型腔模具的制备方法。该方法基于微型双工位分层实体制造工艺(DLOM)

通过多层铜箔二维微结构叠加拟合出三维队列微电极

将制备的微电极用于微细电火花加工来制得三维微型腔模具。首先

利用线切割对100 m 厚的多层铜箔进行逐层切割

获得多层二维微结构。然后

通过真空压力热扩散焊对多层铜箔二维微结构进行连接

叠加拟合出三维队列微电极。最后

在电压80 V

脉冲频率0.2 MHZ

脉冲宽度800 ns

休止脉宽4 200 ns的作用下

将上述工艺制备的三维队列微电极用于微细电火花加工

获得表面质量良好、形状与尺寸精度较高的三维微型腔模具。为了有效减少电极损耗对加工精度的不利影响

使用队列电极中的微电极依序对三维微型腔进行了加工。基于上述研究结果

制备了两种形状的三维队列微电极并通过微细电火花加工获得了表面粗糙度

为0.48 m的三维微型腔模具。与目前主流的微细电极逐层扫描放电加工三维微结构的工作方式相比

提出的三维微电极只需进行上下往返式加工便可获得三维微型腔模具

工作效率高且损耗低。

Abstract

This paper focuses on the fabrication of 3D micro-cavity molds. Based on micro Double-staged Laminated Object Manufacturing (DLOM) process

3D micro-electrodes were fabricated by superimposing multilayer 2D micro-structures and they were applied to the micro Electrical Discharge Machining (EDM) to obtain a 3D micro-cavity mold. Firstly

100 m-thick Cu foils were cut by micro-EDM to obtain multilayer 2D micro-structures and then the 2D micro-structures were connected together to fit out 3D micro-electrodes through a vacuum pressure thermal diffusion welding. Under the conditions of a voltage of 80 V

a pulse frequency of 0.2 MHz

pulse width of 800 ns and a pulse interval 4 200 ns

the 3D micro-electrodes were applied to the micro-EDM and the 3D micro-cavity mold with high surface quality and a precise shape was obtained. In order to reduce the adverse impact of electrode wear on machining precision of the 3D micro-cavity mold

the 3D queue micro-electrodes were used to process the same 3D micro-cavity mold

by which the first electrode was for rough machining and the others for fine machining. On the basis of these studies

two kinds of 3D queue micro-electrodes were fabricated and the 3D micro-cavity molds with surface roughness of 0.48 m were obtained through the Micro-EDM. As compared with the current scanning 3D micro-EDM process

the 3D micro-cavity molds fabricated could be obtained through up and down reciprocating method of the 3D queue micro-electrodes

showing a sample machining process and higher efficiency.

关键词

Keywords

references

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