光栅点衍射干涉法检测Φ400mm瞬态波前

李金鹏; 陈磊; 万骏; 朱文华; 郑东晖

doi:10.3788/OPE.20152306.1538

您当前的位置：

首页 >

文章列表页 >

光栅点衍射干涉法检测Φ400mm瞬态波前

现代应用光学 | 更新时间：2020-08-13

- 光栅点衍射干涉法检测Φ400mm瞬态波前
- Evaluation of Φ400 mm instantaneous wavefront using grating point diffraction interferometry
- 光学精密工程 2015年23卷第6期页码：1538-1546
- 作者机构：
  
  南京理工大学电子工程与光电技术学院,江苏南京,210094
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61108041,No.U1231111)()
- DOI：10.3788/OPE.20152306.1538
  中图分类号： O436.1
- 收稿日期：2015-01-05，
  
  修回日期：2015-02-27，
  
  纸质出版日期：2015-06-25
- 稿件说明：
移动端阅览
李金鹏, 陈磊, 万骏等. 光栅点衍射干涉法检测Φ400mm瞬态波前[J]. 光学精密工程, 2015,23(6): 1538-1546

LI Jin-peng, CHEN Lei, WAN Jun etc. Evaluation of Φ400 mm instantaneous wavefront using grating point diffraction interferometry[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1538-1546
李金鹏, 陈磊, 万骏等. 光栅点衍射干涉法检测Φ400mm瞬态波前[J]. 光学精密工程, 2015,23(6): 1538-1546 DOI： 10.3788/OPE.20152306.1538.

LI Jin-peng, CHEN Lei, WAN Jun etc. Evaluation of Φ400 mm instantaneous wavefront using grating point diffraction interferometry[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1538-1546 DOI： 10.3788/OPE.20152306.1538.

摘要

提出了一种基于光栅点衍射干涉原理的

400 mm瞬态波前检测方法.该方法使用位相光栅在参考光与测试光中引入横向错位

即在干涉图中引入线性载频

然后利用傅里叶变换相位解调法提取待测波前.基于标量衍射理论以及傅里叶光学理论建立了瞬态波前检测方案的理论模型

推导了线性载频公式

研究了影响载频大小的因素;基于基尔霍夫公式分析了针孔衍射导致的孔径角变化与能量衰减效应

给出了位相光栅的刻蚀深度公式.实验搭建了

400 mm瞬态波前检测装置

采集了对比度良好的高线性载频干涉图.采用傅里叶变换相位解调法恢复波面

所得波面RMS值为0.105λ.与采用SID-4波前探测器测得的波面RMS值(0.101λ)基本一致

满足了

400 mm瞬态波前测量的要求.

Abstract

A method to measure

400 mm instantaneous wavefront based on grating point diffraction interferometry was proposed. The method introduced the lateral displacement into the test wavefront and reference wavefront by applying a phase grating

which means that a linear carrier was introduced in an interferogram. Then

the test wavefront was retrieved by Fourier Transform(FT). On the basis of scalar diffraction theory and Fourier optics theory

a theoretical model of instantaneous wavefront was established and the formula of linear carrier was derived. Furthermore

the effects of energy reducing and aperture angle changing due to pinhole diffraction were studied by using Kirchhoff formula

then the formula of grating etched depth was derived. An experimental installation of

400 mm instantaneous wavefront testing was set up and the interferogram with high modulation and a linear carrier was acquired. The FT method was applied to the restoration of the interferogram. The results indicate that the root mean square value of tested wavefront is 0.105λ

which is in accord with that of 0.101λ acquired by a SID-4 wavefront sensor. It concludes that the measurement of

400 mm instantaneous wavefront has been realized by this method.

关键词

Keywords

references

DANIEL M. Optical Shop Testing [M]. 3rd Edition.New Jersey: Wiley-Interscience Press, 2007.

汤兆鑫, 黄玮, 许伟才,等. 差分五棱镜扫描法在波前检测中的应用[J]. 中国光学, 2014,7(6): 1003-1011 TANG ZH X,HUANG W,XU W C, et al.. Application of differential pentaprism scanning in wavefront detection[J].Chinese Optics, 2014,7(6): 1003-1011. (in Chinese)

李宏壮,林旭东,刘欣悦,等. 400 mm薄镜面主动光学实验系统[J]. 光学精密工程,2009,17(9):2076-2083. LI H ZH,LIN X D,LIU X Y,et al.. Experiment system of 400 mm thin-mirror active optics[J]. Opt. Precision Eng.,2009, 17(9): 2076-2083. (in Chinese)

卫沛锋, 刘欣悦, 林旭东,等. 自适应光学系统校正后实际分辨率评价指标[J]. 中国光学, 2014,7(4): 672-678. WEI P F,LIU X Y,LIN X D, et al..Evaluation index of the actual resolution after correction of adaptive optical system [J]. Chinese Optics, 2014,7(4): 672-678. (in Chinese)

许乔,顾元元,柴林,等. 大口径光学元件波前功率谱密度检测[J]. 光学学报,2001,21(3):344-347. XU Q,GU Y Y,CHAI L, et al.. Measurement of wavefront power spectral density of large optical components [J]. Acta Optica Sinica, 2001, 21(3): 344-347. (in Chinese)

李鸿儒,冯国英,杜永兆,等. 基于窗口傅里叶变换剪切干涉法波前检测[J]. 强激光与粒子束,2013,25(8):1897-1903. LI H R, FENG G Y, DU Y ZH, et al.. Wavefront measurement based on windowed Fourier transform by use of radial shearing interferometer[J]. High Power Laser and Particle Beams,2013,25(8):1897-1903. (in Chinese)

刘蕾,曾爱军,朱玲琳,等. 可用于小口径光束波前检测的横向剪切干涉仪[J]. 中国激光,2014,41(1):0108003. LIU L, ZENG A J, ZHU L L, et al.. Lateral shearing interferometer for the wavefront test of small beam[J]. Chinese Journal of Lasers,2014,41(1):0108003. (in Chinese)

JEROME P, NICOLAS G. Extended Hartmann test based on the pseudo guiding property of a Hartmann mask completed by a phase chessboard[J]. Appl. Opt.,2000,39(31):5715-5720.

FUZHONG B, XIAOQIANG W, KAIZHENG H. Analysis of spatial resolution and pinhole size for single-shot point-diffraction interferometer using in closed-loop adaptive optics [J]. Opt. Commun., 2013, 297: 27-31.

YONGZHAO D, GUOYING F, HONGRU L. Circular common-path point diffraction interferometer [J]. Opt. Lett., 2012, 37(19):3927-3929.

MITSUO T, HIDEKI I, SEIJI K. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry[J]. J. Opt. Soc. Am.,1982,72(1):156-160.

吴亚琴,白福忠,刘珍,等. 环形共光路点衍射干涉仪[J]. 光学技术,2014,40(5):421-424. WU Y Q, BAI F ZH, LIU ZH, et al.. Circular common-path point-diffraction interferometer[J]. Optical Technique, 2014,40(5):421-424. (in Chinese)

MEDECKI H, TEJNIL E, GOLDBERGE K A. Phase-shifting point diffraction interferometer[J].Opt. Lett.,1996,21(19):1526-1528.

刘景峰,李艳秋,刘克. 移相式点衍射干涉仪的几个关键技术[J]. 仪器仪表学报,2007,28(4):179-182. LIU J F, LI Y Q, LIU K. Technical problems in phase-shifting point diffraction interferometer[J].Chinese Journal of Scientific Instrument, 2007,28(4):179-182.(in Chinese)

高芬,蒋庄德,李兵. 不同对准误差下的小孔衍射波面误差分析[J]. 光学学报,2014,34(8):0812004. GAO F, JIANG ZH D, LI B. Analysis of diffraction wavefront error caused by alignment error of pinhole[J]. Acta Optica Sinica, 2014,34(8):0812004.(in Chinese)

绍卫红,杨甬英,陈晓钰,等. 点衍射干涉系统光学结构参数优化研究[J]. 强激光与离子束,2014,26(5): 051001. SHAO W H,YANG Y Y. CHEN X Y, et al..Optimization research on optical structural parameters of point diffraction interference system[J]. High Power Laser and Particle Beams,2014,26(5): 051001.(in Chinese)

张敏,唐锋,王向朝,等. 二维快速傅里叶变换干涉图相位提取误差分析[J]. 中国激光,2013.40(3): 0308002. ZHANG M, TANG F, WANG X CH, et al.. Phase retrieval errors analysis of interferogram using two dimensional fast fourier transform method[J]. Chinese Laser, 2013,40(3):0308002.(in Chinese)

李俊峰,宋淑梅. 离轴抛物镜检测中调整误差对波前畸变的影响[J]. 光学精密工程,2011,19(8): 1763-1770. LI J F,SONG SH M. Influence of adjustment error on wavefront aberration in off-axis paraboloid test [J]. Opt. Precision Eng.,2011,19(8):1763-1770.(in Chinese)

WILLIAM W M JR. Two-dimentional fringe-pattern analysis [J].App. Opt.,1983,22(23):3898-3901.

马克思·波恩. 光学原理[M]. 第七版.北京:电子工业出版社,2005. MAX B. Principle of Optics [M].7th Edition.Beijing:Publishing House of Electronics Industry,2005.(in Chinese)

巴音贺希格,齐向东,唐玉国. 矩形光栅衍射效率的一般表达式及其缺级现象[J]. 光电子·激光,2003,14(10):1021-1024. BAYANHEXIG,QI X D,TANG Y G. The general formula to the diffraction efficiency of rectangular grating and its phenomenon of missing orders [J]. Journal of Optoelectronics·Laser,2003,14(10):1021-1024.(in Chinese)

浏览量

642

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

共光路径向剪切干涉仪的设计

斜入射干涉检测大口径碳化硅平面反射镜