飞秒激光进给速度对TiC陶瓷微孔加工的影响

张军战; 王禹茜; 张颖; 刘永胜

doi:10.3788/OPE.20152306.1565

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飞秒激光进给速度对TiC陶瓷微孔加工的影响

现代应用光学 | 更新时间：2020-08-13

- 飞秒激光进给速度对TiC陶瓷微孔加工的影响
- Effect of feeding speed on micro-hole drilling in TiC ceramic by femtosecond laser
- 光学精密工程 2015年23卷第6期页码：1565-1571
- 作者机构：
  
  1. 西安建筑科技大学材料与矿资学院功能材料研究所,陕西西安,710055
  2. 西北工业大学超高温结构复合材料重点实验室,陕西西安,710072
- 作者简介：
- 基金信息：
  
  科技部国家重大科学仪器设备开发专项资助项目(No.2011YQ12007504)();国家自然科学基金资助项目(No.51472201)()
- DOI：10.3788/OPE.20152306.1565
  中图分类号： TN249
- 收稿日期：2015-01-13，
  
  修回日期：2015-03-18，
  
  纸质出版日期：2015-06-25
- 稿件说明：
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张军战, 王禹茜, 张颖等. 飞秒激光进给速度对TiC陶瓷微孔加工的影响[J]. 光学精密工程, 2015,23(6): 1565-1571

ZHANG Jun-zhan, WANG Yu-qian, ZHANG Ying etc. Effect of feeding speed on micro-hole drilling in TiC ceramic by femtosecond laser[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1565-1571
张军战, 王禹茜, 张颖等. 飞秒激光进给速度对TiC陶瓷微孔加工的影响[J]. 光学精密工程, 2015,23(6): 1565-1571 DOI： 10.3788/OPE.20152306.1565.

ZHANG Jun-zhan, WANG Yu-qian, ZHANG Ying etc. Effect of feeding speed on micro-hole drilling in TiC ceramic by femtosecond laser[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1565-1571 DOI： 10.3788/OPE.20152306.1565.

摘要

采用螺旋打孔技术

在不同的激光进给速度下在TiC陶瓷上加工了微孔.用扫描电子显微镜分析了微孔形貌

利用能量色散谱仪研究了激光加工前后材料化学成分的变化

并结合X射线光电子能谱术(XPS)讨论了材料化学键的变化

探讨了利用飞秒激光加工TiC陶瓷过程中材料的去除机理.结果表明:所得到的微孔具有较好的形貌特征

孔边缘没有出现明显的微裂纹.微孔入口圆度达98%以上

入口直径略小于出口直径.激光进给速度对入口处孔边缘的微观形貌影响较大.进给速度较低时

激光切蚀区域出现平行的条纹状周期结构

随着进给速度的增加

表面以混沌的颗粒状结构为主.在较低或较高的进给速度下

重铸层都会出现更为剧烈的氧化现象

实验显示最佳的进给速率应在6.4 μm/s 左右.XPS分析显示材料的去除主要是通过多光子吸收

在加工过程中发生Ti-C键的断裂产生的Ti离子被氧化后会生成TiO

和Ti

Abstract

By spiral drilling hole technology

micro-holes were drilled at different feeding speeds in TiC ceramic. The morphologic features of micro-holes were examined by scanning electron microscope

the elemental compositions for untreated specimens and laser-treated areas were identified by using an energy dispersive spectroscopy and the chemical bonds for untreated specimens and laser-treated debris were analyzed by an X-ray photoelectron spectroscopy. Then

the mechanism of interaction between femtosecond laser and TiC was further discussed. The results indicate that the drilled micro-holes show a good morphology without visible microcracks in ablated areas. The roundness of entrance is above 98%

better than that of the exit. The diameter at entrance is slightly smaller than that of the diameter at exit. The feeding speed has an obvious effect on micro morphology of entrance. When the feeding speed is lower

the regular ripples are observed in ablated areas. With increasing feeding speed

the surface is characterized by sporadic particles. High oxygen content is detected in a deposited layer at low and high feeding speeds

respectively

and the optimum feeding speed is 6.4 μm/s in this research. Moreover

the machining mechanism could be explained by the multiphoton absorption theory. When the C-Ti bond is broken during machining

the titanium ion will combine with oxygen and the TiO

in debris will be generated.

关键词

Keywords

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