压电式快速控制反射镜的迟滞特性及线性化

袁刚; 张小波; 王代华; 陈敏

doi:10.3788/OPE.20152306.1650

您当前的位置：

首页 >

文章列表页 >

压电式快速控制反射镜的迟滞特性及线性化

微纳技术与精密机械 | 更新时间：2020-08-13

- 压电式快速控制反射镜的迟滞特性及线性化
- Hysteresis and linearization of piezoelectric fast steering mirror
- 光学精密工程 2015年23卷第6期页码：1650-1656
- 作者机构：
  
  1. 重庆大学光电技术及系统教育部重点实验室重庆,400044
  2. 重庆大学光电工程学院精密与智能实验室重庆,400044
- 作者简介：
- 基金信息：
  
  中央高校基本科研业务费资助项目(No.CDJZR12120005)()
- DOI：10.3788/OPE.20152306.1650
  中图分类号： TN384;TH703
- 收稿日期：2015-01-23，
  
  修回日期：2015-02-23，
  
  纸质出版日期：2015-06-25
- 稿件说明：
移动端阅览
袁刚, 张小波, 王代华等. 压电式快速控制反射镜的迟滞特性及线性化[J]. 光学精密工程, 2015,23(6): 1650-1656

YUAN Gang, ZHANG Xiao-bo, WANG Dai-hua etc. Hysteresis and linearization of piezoelectric fast steering mirror[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1650-1656
袁刚, 张小波, 王代华等. 压电式快速控制反射镜的迟滞特性及线性化[J]. 光学精密工程, 2015,23(6): 1650-1656 DOI： 10.3788/OPE.20152306.1650.

YUAN Gang, ZHANG Xiao-bo, WANG Dai-hua etc. Hysteresis and linearization of piezoelectric fast steering mirror[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1650-1656 DOI： 10.3788/OPE.20152306.1650.

摘要

针对压电式快速控制反射镜(Fast Steering Mirror

FSM)的迟滞问题

分析了压电式FSM的工作原理和迟滞特性

建立了基于Bouc-Wen算子的压电式FSM的数学模型及其参数辨识方法.通过Bouc-Wen算子模拟压电式FSM输出镜面偏转角度中的迟滞分量

并根据在两个相位相同的输入驱动电压信号下压电式FSM的输出镜面偏转角度曲线辨识Bouc-Wen算子的全部参数.在此基础上

提出了压电式FSM的前馈线性化方法.为了验证提出的数学模型和线性化方法的原理

建立了压电式FSM及其线性化控制器的快速原型系统和Bouc-Wen算子参数辨识实验装置.实验结果表明:本文提出的参数辨识方法能够准确辨识压电式FSM的Bouc-Wen算子参数

提出的前馈线性化方法能够将压电式FSM的输出镜面偏转角度与输入控制电压的线性度提高到2.3%

迟滞误差减小到±0.5%

满足实际应用对精确控制压电式FSM的要求.

Abstract

For the hysteresis of a piezoelectric Fast Steering Mirror (FSM)

the working principle and hysteresis properties of the piezoelectric FSM were analyzed. The Bouc-Wen hysteresis operator based mathematical model of the piezoelectric FSM and the corresponding parameter identification method were proposed. The hysteresis component of excursion angle of the piezoelectric FSM was estimated by the Bouc-Wen hysteresis operator

and parameters of Bouc-Wen hysteresis operator were identified according to the excursion angles of the piezoelectric FSM at two driven voltage waves with the same phase position. On this basis

a feedback forward linearization method for the piezoelectric FSM was proposed. In order to validate the proposed mathematical model and linearization method

the rapid prototyping system for the piezoelectric FSM and a linearization controller and an experimental set for the parameter identification of the Bouc-Wen hysteresis operator were established. The experimental results show that the proposed identification method estimates the parameters of the Bouc-Wen hysteresis operator of the piezoelectric FSM accurately and the feedback forward linearization method increases the linearity of mirror deflection angle and input control voltage of the piezoelectric FSM by 2.3% and decreases the delaying error by ±0.5% respectively. It satisfies the requirements of precision control of the piezoelectric FSM.

关键词

Keywords

references

王恒坤, 张国玉, 郭立红,等. 高精度动载体激光发射系统光束控制反射镜[J]. 光学精密工程, 2012, 20(12): 336-341. WANG H K, ZHANG G Y, GUO L H, et al.. High performance fast-steering mirror for beam control of vehicular high energy laser system [J].Opt. Precision Eng., 2012, 20(12): 336-341. (in Chinese)

洪华杰, 王学武, 翁干飞. 光电侦察装备中的反射镜稳定技术[J]. 应用光学, 2011, 32(4): 591-597. HONG H J, WANG X W, WENG G F. Mirror stabilization in electro-optical reconnaissance system [J]. Journal of Applied Optics. 2011, 32(4): 591-597. (in Chinese)

向思桦, 陈四海, 吴鑫,等. 基于新型压电驱动器的快速扫描反射镜[J]. 中国激光, 2009, 36(6): 208-212. XIANG S H, CHEN S H, WU X,et al.. Research on novel piezoelectric fast steering mirror [J]. Chinese Journal of Lasers, 2009, 36(6): 208-212. (in Chinese)

PARKJ H, LEE H S, LEE J H, et al.. Design of a piezoelectric-driven tilt mirror for a fast laser scanner [J]. Japanese Journal of Applied Physics, 2012, 51(9): 1-5.

亓波, 陈洪斌, 任戈,等. 100 km量子纠缠分发实验捕获跟踪技术[J]. 光学精密工程, 2013, 21(6): 1628-1634 QI B, CHEN H B, REN G, et al.. ATP technology for 100-kilometer quantum entanglement distribution experiment [J]. Opt. Precision Eng., 2013, 21(6): 1628-1634. (in Chinese)

TANG T. Acceleration feedback of a CCD-based tracking loop for fast steering mirror [J]. Optical Engineering, 2009, 48(1): 1-6

刘泊, 郭建英, 孙永全. 压电陶瓷微位移驱动器建模与控制[J]. 光学精密工程, 2013, 21(6): 1503-1509 LIU B, GUO J Y, SUN Y Q. Modeling and control for PZT micro-displacement actuator [J]. Opt. Precision Eng., 2013, 21(6): 1503-1509. (in Chinese)

LIU W J, LIAO W J; JIA K M, et al.. Hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral shift-free piezoelectric unimorph actuator [J]. Integrated Ferroelectrics, 2014, 150(1): 14-22.

KIM B S, GIBSON S, TSAO T C. Adaptive control of a tilt mirror for laser beam steering [C]. American Control Conference, 2004, (4): 3417-3421.

陈远晟, 裘进浩, 季宏丽,等. 基于双曲函数的Preisach类迟滞非线性建模与逆控制[J]. 光学精密工程, 2013, 21(5): 1205-1212 CHEN Y SH, QIU J H, JI H L, et al.. Modeling and inverse control of Preisach type hysteresis nonlinearity using hyperbola functions [J]. Opt. Precision Eng., 2013, 21(5): 1205-1212. (in Chinese)

王钰锋, 郭咏新, 毛剑琴. 压电作动器的率相关迟滞建模与跟踪控制[J]. 光学精密工程, 2014, 22(3): 616-625 WANG Y F, GUO Y X, MAO J Q. Rate-dependent modeling and tracking control of piezoelectric actuators [J]. Opt. Precision Eng., 2014, 22(3): 616-625. (in Chinese)

魏强, 张承进, 张栋,等. 压电陶瓷驱动器的滑模神经网络控制[J]. 光学精密工程, 2012, 20(5): 1055-1063 WEI Q, ZHANG CH J, ZHANG D, et al.. Neural network control for piezo-actuator using sliding-mode technique [J]. Opt. Precision Eng., 2012, 20(5): 1055-1063. (in Chinese)

王代华, 朱炜. WTYD型压电陶瓷微位移器的迟滞特性建模与实验验证[J]. 光学精密工程, 2010, 18(1): 205-211. WANG D H, ZHU W. Hysteretic modeling and experimental verification for WTYD type piezoceramic micro-actuators [J]. Opt. Precision Eng., 2010, 18(1): 205-211. (in Chinese)

WANG D H, ZHU W, YANG Q. Linearization of stack piezoelectric ceramic actuators based on bouc-wen model [J].Journal of Intelligent Material Systems and Structures, 2011, 22(5): 401-413.

浏览量

355

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

大角度压电式快速控制反射镜

压电驱动器迟滞非线性的分数阶建模及实验验证

压电陶瓷驱动器的迟滞特性

压电驱动器的开闭环迭代学习控制

应变式微型精密压电驱动器的一体化设计及其PID控制