精密光学胶结件的快速脱胶

闫勇; 姚劲松; 张雷; 王栋

doi:10.3788/OPE.20152306.1657

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精密光学胶结件的快速脱胶

微纳技术与精密机械 | 更新时间：2020-08-13

- 精密光学胶结件的快速脱胶
- Fast degumming of high-precision optical cemented elements
- 光学精密工程 2015年23卷第6期页码：1657-1663
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所小卫星技术国家地方联合工程研究中心,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2007AA12Z113)()
- DOI：10.3788/OPE.20152306.1657
  中图分类号： TH706;V261.3+5
- 收稿日期：2014-08-10，
  
  修回日期：2014-10-20，
  
  纸质出版日期：2015-06-25
- 稿件说明：
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闫勇, 姚劲松, 张雷等. 精密光学胶结件的快速脱胶[J]. 光学精密工程, 2015,23(6): 1657-1663

YAN Yong, YAO Jin-song, ZHANG Lei etc. Fast degumming of high-precision optical cemented elements[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1657-1663
闫勇, 姚劲松, 张雷等. 精密光学胶结件的快速脱胶[J]. 光学精密工程, 2015,23(6): 1657-1663 DOI： 10.3788/OPE.20152306.1657.

YAN Yong, YAO Jin-song, ZHANG Lei etc. Fast degumming of high-precision optical cemented elements[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1657-1663 DOI： 10.3788/OPE.20152306.1657.

摘要

研究了采用GHJ-01光学环氧胶胶结光学件的脱胶工艺

提出了适合精密光学胶结件快速脱胶的方法.归纳总结了光机胶结时

黏接胶层的厚度计算公式

以便确定适宜的光机胶结间隙;梳理了胶结固化的操作流程及固化原则

指出实施该方法的技术难点在于依据不同的胶结剂和胶结结构选择合理的热剥离温度及升温速度.利用某高精度胶结镜进行了脱胶试验研究.通过选择合适的热剥离加热工艺实现了该光学件的快速、微应力脱胶.相关试验表明

经过胶结后的熔石英镜面产生了严重变形

变化量约为原始面形值的6倍(原始面形值0.02λ

变形后面形值0.14λ)

经脱胶修研后其面形精度达到0.018λ

满足设计要求

脱胶时间为105 h.该方法可满足光学件脱胶时对完整性和微应力的要求

避免了成本的浪费和光学件的弃用

其脱胶处理方式也适用于其它同类型光学元器件的研制.

Abstract

A degumming process for optical cemented elements by using a GHJ 01 optical epoxy adhesive bond was researched

and a rapid degumming method suitable for precision optical cementing was proposed. Combined with the actual engineering application requirements

the formula of the adhesive layer thickness for the adhesive cementation was summarized to determine a proper optical-mechanic cementing clearance. The operation processes and cementation curing principle were discussed and the technical problems during the curing were concerned carefully. It points out that the technical points of degumming experiments for a high-precision optical cemented element is to choose a reasonable hot strip temperature and a heating speed according to the different cementing agents and cementation structures. A degumming experiment was performed by using a high precision cemented lens and the quick and microstress degumming of the optical parts was implemented by choosing an appropriate hot strip heating process. The experiment shows that the fused silica mirror has been deformed seriously after the cementation

and it is about 6 times that of the original surface value (The original surface value is 0.02λ and that is 0.14λ after deformation). However the surface value of the fused silica mirror has achieved 0.018λ after the degumming experiments and reworked process finally. The surface value meets the design requirement very well

and the degummed time is 105 h. The new degumming method meets the integrity and micro-stress requirements of the optical elements and avoids the cost of waste and discarding optical elements. It could also been applied to the other same type optical components.

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references

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