胶层厚度对三点支撑反射镜面形的影响

贾树强; 黄玮; 庞武斌

doi:10.3788/OPE.20152307.2005

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胶层厚度对三点支撑反射镜面形的影响

微纳技术与精密机械 | 更新时间：2020-08-12

- 胶层厚度对三点支撑反射镜面形的影响
- Influence of adhesive thickness on surface deformation of mirror supported by three-point mount
- 光学精密工程 2015年23卷第7期页码：2005-2012
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
- 作者简介：
  
  [ "贾树强(1987-),男,河北石家庄人,硕士,研究实习员,2010年、2013年于吉林大学分别获得学士、硕士学位,主要从事光机结构设计与检测方面的研究。E-mail:shuqiangjia@163.com" ]
  [ "黄玮(1965-),男,吉林长春人,研究员,博士生导师,主要从事光学系统设计方面的研究。E-mail:huangw@ciomp.ac.cn" ]
  [ "庞武斌(1987-),男,陕西渭南人,硕士,工程师,2013年于浙江大学获得硕士学位,主要从事光学系统设计方面的研究。E-mail:pangwubin110@126.com" ]
- 基金信息：
  
  国家科技重大专项资助项目(No.2012ZX02701001-007)()
- DOI：10.3788/OPE.20152307.2005
  中图分类号： TH74
- 收稿日期：2014-12-04，
  
  修回日期：2015-02-01，
  
  纸质出版日期：2015-07-25
- 稿件说明：
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贾树强, 黄玮, 庞武斌. 胶层厚度对三点支撑反射镜面形的影响[J]. 光学精密工程, 2015,23(7): 2005-2012

JIA Shu-qiang, HUANG Wei, PANG Wu-bin. Influence of adhesive thickness on surface deformation of mirror supported by three-point mount[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 2005-2012
贾树强, 黄玮, 庞武斌. 胶层厚度对三点支撑反射镜面形的影响[J]. 光学精密工程, 2015,23(7): 2005-2012 DOI： 10.3788/OPE.20152307.2005.

JIA Shu-qiang, HUANG Wei, PANG Wu-bin. Influence of adhesive thickness on surface deformation of mirror supported by three-point mount[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 2005-2012 DOI： 10.3788/OPE.20152307.2005.

摘要

以45 nm浸没式光刻物镜中采用的三点支撑反射镜为研究对象

建立了胶层连接的三点边缘支撑结构模型

用以确定胶层厚度对三点支撑反射镜面形变化的影响。分析了重力作用下三点支撑反射镜的面形变化情况

通过解析表达式描述了胶层厚度对反射镜受力变形的影响。建立了"支撑块-胶层-反射镜"的有限元计算模型

针对不同胶层厚度对反射镜的面形变化进行了仿真分析。仿真结果表明:随着胶层厚度的增大

反射镜的面形变化(均方根值RMS)呈现先减小后增大的趋势;当胶层厚度为280

m时

反射镜面形变化的RMS值最小

约为1.25 nm。最后

通过实验测量了柔性双脚架三点边缘支撑导致的反射镜面形变化。结果显示:当胶层厚度为200

280

400

m时

反射镜面形的变化结果均与仿真结果一致

验证了本文仿真结果的正确性。

Abstract

By taking the mirror supported by a three-point mount used in a 45 nm immersed lithographic objective lens for a research object

a support structure model with the three-point mount by adhesive connection was established to determine the influence of adhesive thickness on surface deformation of the mirror supported by the three-point mount. The mirror surface deformation distribution due to gravity was analyzed

and the effect of different adhesive thicknesses on surface deformation was discussed through analytical expressions. Then

a finite element model of "block-layer-mirror" was established. The deformation of mirror surface was simulated for different adhesive thicknesses. The simulation results show that the Root Mean Square(RMS) values of mirror surface deformation first decrease and then increase with the increasing adhesive thickness

and it reaches a minimum of 1.25 nm when the adhesive thickness is about 280

m. Finally

surface deformation changes of the mirror caused by the three-point support were tested through an experiment while adhesive thicknesses were 200

280

m and 400

m. Experiment results show that surface deformation of the mirror is in agreement with simulation result

which verifies the validity of simulation results.

关键词

Keywords

references

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