光纤石英玻璃基板微V槽阵列的精密磨削

谢晋; 冯彦科; 程剑; 吴可可

doi:10.3788/OPE.20152308.2243

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光纤石英玻璃基板微V槽阵列的精密磨削

微纳技术与精密机械 | 更新时间：2020-08-12

- 光纤石英玻璃基板微V槽阵列的精密磨削
- Precision grinding of micro V-groove array on optical fiber quartz glass substrate
- 光学精密工程 2015年23卷第8期页码：2243-2249
- 作者机构：
  
  华南理工大学机械与汽车工程学院,广东广州,510640
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61475046)()
- DOI：10.3788/OPE.20152308.2243
  中图分类号： TQ171.731;TN305.2
- 收稿日期：2015-01-03，
  
  修回日期：2015-02-12，
  
  纸质出版日期：2015-08-25
- 稿件说明：
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谢晋, 冯彦科, 程剑等. 光纤石英玻璃基板微V槽阵列的精密磨削[J]. 光学精密工程, 2015,23(8): 2243-2249

XIE Jin, FENG Yan-ke, CHENG Jian etc. Precision grinding of micro V-groove array on optical fiber quartz glass substrate[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2243-2249
谢晋, 冯彦科, 程剑等. 光纤石英玻璃基板微V槽阵列的精密磨削[J]. 光学精密工程, 2015,23(8): 2243-2249 DOI： 10.3788/OPE.20152308.2243.

XIE Jin, FENG Yan-ke, CHENG Jian etc. Precision grinding of micro V-groove array on optical fiber quartz glass substrate[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2243-2249 DOI： 10.3788/OPE.20152308.2243.

摘要

针对脆性石英玻璃的微加工

利用自主研发的金刚石砂轮微尖端修整工艺

研发了光纤阵列石英玻璃微V槽磨削技术。分析了60°的微V槽形状偏差对光纤耦合损耗的影响

然后

研究了砂轮微尖端的误差补偿修整工艺。最后

实验分析了微V槽的磨削精度。理论分析显示:微V槽角度、间距和宽度的偏差分别控制在± 0.42°、± 1.04 μm和± 1.2 μm以内时

耦合损耗小于0.5 dB。实验结果表明:开发的数控磨削工艺可加工高精度的60°微V槽阵列;采用数控轨迹和角度补偿修整后

砂轮微尖端半径可平均达到10.46 μm

角度精度为(60± 0.22)°;对石英玻璃进行微磨削后

微V槽的角度偏差达到0.4°

尖端半径为10.5μm

宽度偏差为0.3μm

间距偏差为0.5μm

可保证光纤阵列的精密对接。

Abstract

As quartz glass is hard to be micro-machined

a self-researched truing technique of diamond wheel micro-tip was utilized to develop the grinding technique of micro V-groove arrays on the quartz glass. The influences of profile errors of 60° micro V-grooves on the coupling losses of optical fibers were analyzed. Then

the error compensation truing for grinding wheel micro-tip was researched. Finally

the grinding accuracy for micro V-grooves on quartz glass was experimentally investigated. The theoretical analysis indicates that when the angle

interval and the width of micro V-groove range ± 0.42°

± 1.04 μm and ± 1.2 μm

respectively

the coupling loss is less than 0.5 dB. The experimental results show that the Numerical Control(NC) precise grinding technique proposed can machine higher precise arrays

and the the V-tip angle and the radius of trued diamond wheel may reach 10.46 μm and (60± 0.22)° by NC path and angle compensation truing

respectively. After micro-grinding of quartz glass

the micro V-groove shows an angle error of 0.4°

a tip radius of 10.5 μm

a width error of 0.3μm and an interval error of 0.5μm

which assures the precision connection of optical fiber arrays.

关键词

Keywords

references

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