大角度压电式快速控制反射镜

袁刚; 王代华; 李世栋

doi:10.3788/OPE.20152308.2258

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大角度压电式快速控制反射镜

微纳技术与精密机械 | 更新时间：2020-08-12

- 大角度压电式快速控制反射镜
- Piezoelectric fast steering mirror with large excursion angle
- 光学精密工程 2015年23卷第8期页码：2258-2264
- 作者机构：
  
  1. 重庆大学光电技术及系统教育部重点实验室重庆,400030
  2. 重庆大学光电工程学院, 精密与智能实验室重庆,400044
- 作者简介：
- 基金信息：
  
  中央高校基本科研业务费资助项目(No.CDJZR12120005)()
- DOI：10.3788/OPE.20152308.2258
  中图分类号： TN384;TH703
- 收稿日期：2015-01-17，
  
  修回日期：2015-02-20，
  
  纸质出版日期：2015-08-25
- 稿件说明：
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袁刚, 王代华, 李世栋. 大角度压电式快速控制反射镜[J]. 光学精密工程, 2015,23(8): 2258-2264

YUAN Gang, WANG Dai-hua, LI Shi-dong. Piezoelectric fast steering mirror with large excursion angle[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2258-2264
袁刚, 王代华, 李世栋. 大角度压电式快速控制反射镜[J]. 光学精密工程, 2015,23(8): 2258-2264 DOI： 10.3788/OPE.20152308.2258.

YUAN Gang, WANG Dai-hua, LI Shi-dong. Piezoelectric fast steering mirror with large excursion angle[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2258-2264 DOI： 10.3788/OPE.20152308.2258.

摘要

针对现有的基于压电陶瓷叠堆执行器的快速控制反射镜偏转角度较小的问题

提出了一种大角度定轴偏转压电式快速控制反射镜。采用基于柔性铰链的桥式位移放大机构将压电陶瓷叠堆执行器的输出位移放大

并将其作用到反射镜面上实现大角度定轴偏转。在此基础上

建立了压电式快速控制反射镜的结构和偏转角度输出方程

并通过理论推导和仿真对其工作时的最大偏转角度、最大应力和自然频率特性进行了分析。最后

通过实验测试对建立的压电式快速控制反射镜的工作原理和特性分析结果进行了验证。结果表明

建立的偏转角度输出方程能够根据压电陶瓷叠堆执行器的输出位移准确估计压电式快速控制反射镜的机械偏转角度

从而大大提高设计的效率;建立的压电式快速控制反射镜可以实现大于3°的镜面机械偏转

其固有频率为180 Hz

能够满足高速稳像系统的偏转角度大、响应速度快的要求。

Abstract

To extend the excursion angle of the Piezoelectric Ceramic Stack Actuator (PCSA) based fast steering mirror (FSM)

a piezoelectric FSM with a large excursion angle and a fixed rotation axis was proposed and explored. The output displacement of the PCSA was amplified by a bridge-type flexure hinge and applied to a mirror to generate a fixed axis deflection with the large excursion angle. On this basis

the configuration and the corresponding output equation of the piezoelectric FSM were established

and the characteristics of the FSM

including the maximum excursion angle

the maximum stress

and the natural frequency

were analyzed through theoretical derivation and finite element simulation. Finally

the principle and characteristics of the proposed piezoelectric FSM were validated through experiments and tests. The results show that the output equation of the piezoelectric FSM estimates exactly the mechanical defection angles of the piezoelectric FSM based on the output displacement of the PCSA and improves the design efficiency. Moreover

the developed piezoelectric FSM provides a mechanical excursion angle larger than 3°with natural frequency of 180 Hz

which satisfies the requirements of the high-speed image stabilization system for the large excursion angle and rapid response.

关键词

Keywords

references

HEDDING L R, LEWIS R A. Fast Steering Minor design and performance for stabilization and single axis scanning [C]. Proceedings of the SPIE in Acquisition, Tracking, and Pointing IV, 1990: 14-24.

邓耀初, 贾建援, 陈贵敏,等. 振动环境下的快速反射镜精跟踪系统[J]. 激光与红外, 2008, 38(1): 11-13. DENG Y CH, JIA J Y, CHEN G M, et al.. Precision tracking system with a Fast Steering Mirror in vibration environment [J]. Laser & Infrared, 2008, 38(1):11-13. (in Chinese)

黑沫, 鲁亚飞, 张智永,等. 基于动力学模型的快速反射镜设计[J]. 光学精密工程, 2013, 21(1): 53-61. HEI M, LU Y F, ZHANG ZH Y, et al.. Design of Fast Steering Mirror based on dynamic model [J]. Opt. Precision Eng., 2013, 21(1): 53-61. (in Chinese)

王恒坤, 张国玉, 郭立红,等. 高精度动载体激光发射系统光束控制反射镜[J]. 光学精密工程, 2012, 20(12): 336-341. WANG H K, ZHANG G Y, GUO L H, et al.. High performance Fast-Steering Mirror for beam control of vehicular high energy laser system [J]. Opt. Precision Eng., 2012, 20(12): 336-341. (in Chinese)

洪华杰, 王学武, 翁干飞. 光电侦察装备中的反射镜稳定技术[J]. 应用光学, 2011, 32(4): 591-597. HONG H J, WANG X W, WENG Y F. Mirror stabilization in electro-optical reconnaissance system [J]. Journal of Applied Optics, 2011, 32(4):591-597. (in Chinese)

CHEN N, POTSAID B, WEN J T, et al.. Modeling and control of a Fast Steering Mirror in imaging applications [C]. Proceedings of the 6th Annual IEEE Conference on Automation Science and Engineering, Ontario,2010: 27-32

向思桦, 陈四海, 吴鑫,等. 基于新型压电驱动器的快速扫描反射镜[J]. 中国激光, 2009, 36(6): 208-212. XIANG S H, CHEN S H, WU X, et al.. Research on novel piezoelectric Fast Steering Mirror [J]. Chinese Journal of Lasers, 2009, 36(6): 208-212. (in Chinese)

邵兵, 孙立宁, 曲东升,等. 自由空间光通信ATP系统关键技术研究[J]. 压电与声光, 2005, 27(4): 431-433. SHAO B, SUN L N, QU D SH, et al.. Research on the key technology of ATP system for free space optical communication [J]. Piezoelectrics & Acoustooptic, 2005,27(4): 431-433. (in Chinese)

丁科, 黄永梅, 马佳光,等. 抑制光束抖动的快速反射镜复合控制[J]. 光学精密工程, 2011, 19(9): 1991-1998. DING K, HUANG Y M, MA J G, et al.. Composite control of Fast-sterring-mirror for beam jitter [J]. Opt. Precision Eng., 2011, 19(9): 1991-1998. (in Chinese)

亓波, 陈洪斌, 任戈,等. 100km量子纠缠分发实验捕获跟踪技术[J]. 光学精密工程, 2013, 21(6): 1628-1634. QI B, CHEN H B, REN G, et al.. ATP Technology for 100-kilometer quantum entanglement distribution experiment [J]. Opt. Precision Eng., 2013, 21(6): 1628-1634. (in Chinese)

TANG T. Acceleration feedback of a CCD-based tracking loop for Fast Steering Mirror [J]. Optical Engineering. 2009, 48(1): 1-6.

周子云, 高云国, 邵帅,等. 采用柔性铰链的快速反射镜设计[J]. 光学精密工程, 2014, 22(6): 1547-1554. ZHOU Z Y, GAO Y G, SHAO SH, et al.. Design of Fast Steering Mirror using flexible hinge [J]. Opt. Precision Eng., 2014, 22(6): 1547-1554. (in Chinese)

徐新行, 高云国, 杨洪波,等. 车载大口径刚性支撑式快速反射镜[J]. 光学精密工程, 2014, 22(1): 117-124. XU X X, GAO Y G, YANG H B, et al.. Large-diameter Fast Steering Mirror on rigid support technology for dynamic platform [J]. Opt. Precision Eng., 2014, 22(1): 117-124. (in Chinese)

MARTH H, DONAT M, POHLHAMMER C F. Latest experience in design of piezoelectric-driven fine-steering mirrors [C]. Proceedings of SPIE Active and Adaptive Optical Components, San Diego,1991: 248-261.

KLUK D J, BOULET M T, TRUMPER D L, A High-bandwidth, High-precision, Two-axis steering mirror with moving iron actuator [J]. Mechatronics, 2012, 22(3): 257-270.

MA H W, YAO S M, WANG L Q, et al.. Analysis of the displacement amplification ratio of bridge-type flexure hinge [J]. Sensors and Actuators A: Physical, 2006, 132: 730-736.

YEOMA T, SIMONA T W, MARK T, et al.. High frequency, Large displacement, and Low power consumption piezoelectric translational actuator based on an oval loop shell [J]. Sensors and Actuators A: Physical, 2012, 176: 99-109.

刘荣, 侯力, 毛建,等. 负载刚度对压电元件输出特性影响的研究[J]. 压电与声光, 2008, 30(3): 279-281. LIU R, HOU L, MAO J, et al.. Research on the influence of stiffness on piezoelectric actuator [J]. Piezoelectrics & Acoustooptics. 2008, 30(3): 279-281.

YONG Y K, LU T F, HANDLEY D C. Review of circular flexure hinge design equations and derivation of empirical formulations [J]. Precision Engineering, 2008, 32: 63-70.

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