堆叠型压电执行器的动态蠕变补偿

张承进; 赵学良; 刘红波

doi:10.3788/OPE.20152308.2273

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堆叠型压电执行器的动态蠕变补偿

微纳技术与精密机械 | 更新时间：2020-08-12

- 堆叠型压电执行器的动态蠕变补偿
- Compensation for dynamic creep of stack piezoelectric actuator
- 光学精密工程 2015年23卷第8期页码：2273-2279
- 作者机构：
  
  1. 山东大学控制科学与工程学院,山东济南,250061
  2. 山东大学威海校区机电与信息工程学院,山东威海,264209
  3. 泰山医学院信息工程学院,山东泰安,271016
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61174044)();山东省科技发展计划政策引导类资助项目(No.2013YD01049)()
- DOI：10.3788/OPE.20152308.2273
  中图分类号： TN384;TP271
- 收稿日期：2014-10-08，
  
  修回日期：2015-02-06，
  
  纸质出版日期：2015-08-25
- 稿件说明：
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张承进, 赵学良, 刘红波. 堆叠型压电执行器的动态蠕变补偿[J]. 光学精密工程, 2015,23(8): 2273-2279

ZHANG Cheng-jin, ZHAO Xue-liang, LIU Hong-bo. Compensation for dynamic creep of stack piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2273-2279
张承进, 赵学良, 刘红波. 堆叠型压电执行器的动态蠕变补偿[J]. 光学精密工程, 2015,23(8): 2273-2279 DOI： 10.3788/OPE.20152308.2273.

ZHANG Cheng-jin, ZHAO Xue-liang, LIU Hong-bo. Compensation for dynamic creep of stack piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2273-2279 DOI： 10.3788/OPE.20152308.2273.

摘要

在实验的基础上证实了压电执行器动态蠕变现象的存在。考虑到压电执行器的高频响特点和PID在高实时性要求场合的应用

构建了复合控制器来抑制动态蠕变。该复合控制器由具有Prandtl Ishlinskii类型的迟滞直接逆作为前馈控制器

由根据在线测试结果和实时性要求选择的增量式PI作为反馈控制器

其中增量式PI的参数由模糊逻辑控制器在线调节。通过实验验证了复合控制器抑制动态蠕变的有效性。结果表明

当同幅值的0.1 Hz正弦信号在一个周期内被离散化为20台阶

40台阶

80台阶时

相等电压台阶对应的蠕变过程和范围都是不同的。本文构建的复合控制器能够对不同台阶的动态和静态蠕变进行有效抑制

补偿后蠕变的均方根误差(RMSE)分别降低为补偿前的28.6%

31.0%和35.4%。

Abstract

The dynamic creep phenomenon of a piezoelectric actuator was confirmed by experiments. Based on the high frequency response of the piezoelectric actuator and the higher real time ability of the PID

a composite controller was proposed to compensate the dynamic creep. The composite controller used a direction inverse controller with Prandtl Ishlinskii operators as the feed-forward controller

and an increment PI as the feed-backward controller based on the online test results and demanded real time abilities

in which the parameters of PI were tuned by a fuzzy logic controller. The validity of compensating dynamic creep phenomenon of the piezoelectric actuator by the composite controller was verified. The results show that when a 0.1 Hz sine-wave is discretized into 20

80 stairs respectively

the dynamic creep corresponding the equal voltages has different creep processing and different creep ranges. It verifies that the dynamic creep is complex nonlinearity. It concludes that the proposed controller compensates both static creep and dynamic creep in different discretization stairs and the root-mean square errors(RMSE) of compensated creep have decreased by 71.4%

69.0% and 64.6% respectively.

关键词

Keywords

references

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