波长轮换与相移扫描相结合的表面形貌测量系统

杨练根; 何浪; 王选择; 刘文超; 何涛

doi:10.3788/OPE.20152309.2466

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波长轮换与相移扫描相结合的表面形貌测量系统

现代应用光学 | 更新时间：2020-08-12

- 波长轮换与相移扫描相结合的表面形貌测量系统
- Surface topography measuring system based on wavelength switching and phase shift scanning
- 光学精密工程 2015年23卷第9期页码：2466-2472
- 作者机构：
  
  1. 湖北工业大学机械工程学院,湖北武汉,430068
  2. 湖北省现代制造质量工程重点实验室,湖北武汉,430068
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No. 51275157,No. 51175154,No. 51275158)()
- DOI：10.3788/OPE.20152309.2466
  中图分类号： TB92;TH741.3
- 收稿日期：2015-04-07，
  
  修回日期：2015-05-15，
  
  纸质出版日期：2015-09-25
- 稿件说明：
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杨练根, 何浪, 王选择等. 波长轮换与相移扫描相结合的表面形貌测量系统[J]. 光学精密工程, 2015,23(9): 2466-2472

YANG Lian-gen, HE Lang, WANG Xuan-ze etc. Surface topography measuring system based on wavelength switching and phase shift scanning[J]. Editorial Office of Optics and Precision Engineering, 2015,23(9): 2466-2472
杨练根, 何浪, 王选择等. 波长轮换与相移扫描相结合的表面形貌测量系统[J]. 光学精密工程, 2015,23(9): 2466-2472 DOI： 10.3788/OPE.20152309.2466.

YANG Lian-gen, HE Lang, WANG Xuan-ze etc. Surface topography measuring system based on wavelength switching and phase shift scanning[J]. Editorial Office of Optics and Precision Engineering, 2015,23(9): 2466-2472 DOI： 10.3788/OPE.20152309.2466.

摘要

用光学显微干涉法进行表面形貌测量时其深度测量范围的扩大和形貌测量精度的提高是一对矛盾。为此

本文设计出了一种基于波长轮换与相移扫描相结合的三波长表面形貌测量系统

并提出了一种基于椭圆拟合与相位差大小尺度相结合的相位提取与识别算法。将这种算法运用于多波长干涉图像的数据处理

有效地提高了形貌的整体测量精度

并拓展了深度测量范围。实验结果表明:在深度测量范围扩大近15倍的条件下

采用粗糙度国家基准校准的方波多刻线样板得到的表面粗糙度数据与校准数据的相对误差仅为4.12%

表明该系统在一定的深度范围内能够实现表面形貌的高精度测量。另外

针对该系统设计的多波长相位识别算法对环境噪声要求不高

可以支持系统的高噪声或在线测量。

Abstract

When optical microscopic interferometry is used to measure the surface topography

there is a contradiction between the enlargement of measuring interval and the improvement of measuring precision. Therefore

a three-wavelength interference measurement system for surface topography was designed based on wavelength switching and phase shift scanning. A data processing method for three wavelength interference images was proposed by using the phase extraction and recognition algorithm based on elliptic fitting and combined size scales of phase difference. The method was used to process multi-wavelength interformetric images

and it effectively improves the overall precision of surface topographic measurement and expands the measuring interval. Experimental results show that when the measurement interval is expanded to nearly 15 times

the relative measurement error of surface roughness of square wave specimen with multiple grooves is only 4.12% as compared to that of the data calibrated by China Metrology Institute. It concludes that the three wavelength interferometry realizes a high precision measurement for surface topography in a certain range. Moreover

the data processing method for multi-wavelength phase recognition has not higher demands for environment noise and can support system measurement in a higher noise environment in real time.

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references

AXINTE D A, GINBY N, FOX K, et al.. Process monitoring to assist the workpiece surface quality in machining [J].Int. J. of Mach. Tools & Manu., 2004, 44:1091-1108.

王海珊,史铁林. 基于干涉显微原理的面形貌测量系统[J]. 光电工程,2008, 35(7):85-88. WANG H SH, SHI T L. Profilometer based on interferometry and micro vision system [J].Opto-Electronic Engineering, 2008, 35(7):85-88.(in Chinese)

张雷, 焦小雪, 周立秋,等. 集成成像同名像点三维形貌获取方法[J]. 中国光学, 2015,8(1):45-50. ZHANG L, JIAO X X, ZHOU L Q, et al..Three-dimensional shape acquisition method by integral imaging based on corresponding points[J]. Chinese Optics, 2015, 8(1):45-50.(in Chinese)

LEHMANN P. Vertical scanning white-light interference microscopy on curved microstructures [J]. Optics Letters, 2010, 35 (11 ) :1768-1770.

WANG SH ZH, XIE T B, CHANG S P. Vertical scanning white light interfering profilometer based on Linnik interference microscope [J]. The International Society for Optical Engineering, 2010, 7656:765631.

刘淑杰, 张元良, 张洪潮. 透明软质薄膜的表面形貌测量[J]. 中国光学, 2014,7(2):326-331. LIU SH J, ZHANG Y L, ZHANG H CH.Profile measurement of thin transparent soft film surface [J]. Chinese Optics, 2014, 7(2):326-331.(in Chinese)

杨天博,郭宏,李达成. 白光扫描干涉测量算法综述[J]. 光学技术, 2006,32(1):115-118. YANG T B, GUO H, LI D CH. The summary of algorithms for the white light scanning interferometry [J]. Optical Technique,2006,32(1):115-118.(in Chinese)

JIANG X, WANG K W, GAO F, et al.. Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise[J]. Applied Optics, 2010, 49 (15):2903-2909.

KUO C C, TAKAMASU K, YAMAMOTO A, et al.. Calibration of wavelength scanning in wavelength scanning interferometer [J]. Journal of the Japan Society of Precision Engineering, 2002, 68(3):392-396.

HOUAIRI K. Two-wavelength interferometry:extended range and accurate optical path difference analytical estimator [J]. Optical Society of America, 2009, 26(12):2503-2511.

WARNASOORIYA N. Kim LED-based multi-wavelength phase imaging interference microscopy [J].Optical Society of America, 2007,15:9239-9247.

HATA S J, JUNICHIRO H, ICHIRO1 I, et al.. Nano-level 3-D measurement system using three wavelength laser light interference [C]. International Conference on Industrial Informatics (INDIN), 2008: 721-725.

周明宝. 干涉法表面形貌测量使用的拓展深度测量范围的方法[J]. 光学精密工程,1999,7(4):1-8. ZHOU M B.Interference in measuring the surface topography of method to expand the depth measuring range [J]. Opt. Precision Eng., 1999,7(4):1-8.(in Chinese)

沈邦兴,汪威,张海波. 纳米级微间距的多波长干涉测量方法[J]. 光学精密工程, 2005, 13 (supp.):103-108. SHEN B X, WANG W, ZHANG H B. Multi-wavelength interferometry for nanometer scale spacing [J]. Opt. Precision Eng., 2005, 13 (supp.):103-108.(in Chinese)

DOBOSZ M. Influence of laser diode wavelength tunability on the range, resolution and repeatability of interferometric distance measurement [J]. Optics & Laser Technology, 2008, 40:352-359.

朱日宏, 陈磊,王青,等. 移相干涉测量术及其应用[J]. 应用光学, 2006, 27(2):85-88. ZHU R H, CHEN L,WANG Q, et al.. Phase-shift interferometry and its application [J]. Journal of Applied Optics, 2006, 27(2):85-88.(in Chinese)

HAO Q, ZHU Q D, HU Y.Random phase-shifting interferometry without accurately controlling or calibrating the phase shifts [J]. Optics Letters, 2009, 34(8):1288-1290.

王永伟, 艾华, 卓仁善,等. 干涉测量波面重构DCT算法研究[J]. 中国光学, 2014,7(6):1012-1018. WANG Y W, AI H, ZHOU R SH, et al.. Wavefront reconstruction of interferometry by DCT algorithm [J]. Chinese Optics, 2014, 7(6):1012-1018.(in Chinese)

GUAN X, WANG X Z, ZHAI ZH SH, et al.. A driving step auto-access method for single wavelength microscopic interference [J].SPIE, 2014,9276:92760U1-92760U6.

周浩, 王选择,翟中生,等. 基于圆形四象限光电探测器的条纹形状识别方法研究[J]. 中国激光,2012,39(7):181-187. ZHOU H, WANG X Z, ZHAI ZH SH, et al.. Research on fringe shape recognition methods based on circular four-quadrant photoelectric detector [J].Chinese Journal of Lasers, 2012, 39(7):181-187.(in Chinese)

王选择,郭军,谢铁邦. 精密衍射光栅信号的椭圆拟合与细化校正算法[J]. 工具技术,2003,37(12):47-49. WANG X Z, GUO J, XIE T B.Ellipse fit algorithm and subdivision revision method of precision diffraction grating [J]. Tool Engineering, 2003, 37(12):47-49.(in Chinese)

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