基于带通Σ-Δ调制器的硅微机械陀螺力反馈闭环检测

吴志强; 杨亮; 夏国明; 苏岩

doi:10.3788/OPE.20152309.2540

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基于带通Σ-Δ调制器的硅微机械陀螺力反馈闭环检测

微纳技术与精密机械 | 更新时间：2020-08-12

- 基于带通Σ-Δ调制器的硅微机械陀螺力反馈闭环检测
- Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator
- 光学精密工程 2015年23卷第9期页码：2540-2545
- 作者机构：
  
  1. 南京理工大学机械工程学院,江苏南京,中国,210094
  2. 中国电子科技集团公司第十三研究所,河北石家庄,050051
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61301214)()
- DOI：10.3788/OPE.20152309.2540
  中图分类号： TP212.12;U666.1
- 收稿日期：2015-03-20，
  
  修回日期：2015-04-17，
  
  纸质出版日期：2015-09-25
- 稿件说明：
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吴志强, 杨亮, 夏国明等. 基于带通Σ-Δ调制器的硅微机械陀螺力反馈闭环检测[J]. 光学精密工程, 2015,23(9): 2540-2545

Wu Zhi-qiang, YANG Liang, XIA Guo-ming etc. Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(9): 2540-2545
吴志强, 杨亮, 夏国明等. 基于带通Σ-Δ调制器的硅微机械陀螺力反馈闭环检测[J]. 光学精密工程, 2015,23(9): 2540-2545 DOI： 10.3788/OPE.20152309.2540.

Wu Zhi-qiang, YANG Liang, XIA Guo-ming etc. Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(9): 2540-2545 DOI： 10.3788/OPE.20152309.2540.

摘要

为了提高硅微机械陀螺(SMG)的性能

研究了一种基于四阶机电结合带通

-Δ调制器(SDM)的硅微机械陀螺力反馈闭环检测方法。基于谐振器级联谐振前馈(CRFF)结构设计了该方法的仿真模型

并利用商用软件SD TOOLS计算了环路参数。采用MATLAB/SIMULINK对设计结果进行了行为级仿真

结果表明

1 Hz条件下环路的信噪比达到了109.2 dB

符合设计预期。在此基础上

以现场可编程门阵列(FPGA)为数字处理核心搭建了硅微机械陀螺数字化测控电路并进行了性能测试。结果表明

采用带通SDM闭环检测技术和数字化闭环驱动技术后

硅微机械陀螺的Allan方差零偏不稳定性约为1.15(°)/h

角度随机游走约为7.74×10

-2

(°)/√h

且信噪比参数满足了设计目标。得到的结果证明了设计方法的正确性;显示提出的带通SDM力反馈闭环检测方法有助于提高SMG的性能

拓展其应用领域。

Abstract

To enhance the performance of a silicon micromachined gyroscope

a force feedback close-loop detection method based on a fourth-order electromechanical bandpass Sigma Delta modulator(SDM) was researched. A simulation model was established based on Cascade Resonant Feed Forward(CRFF) structure of a resonator. Meanwhile

the loop parameters were calculated with the commercial software SD TOOLS. Then behavioral simulations were carried out with MATLAB/SIMULINK to test the results. The results suggest that the Signal to Noise Ratio(SNR) of the loop achieves 109.2 dB at the bandpass of 1 Hz

which meets the previous expectation. A force feedback close-loop detection system for the silicon micromachined gyroscope was designed by using a Field Programming Gate Array(FPGA) as the processing core

and the properties of gyroscope were tested. Experiments indicate that based on this detecting method and digital close-loop driving technology

the zero bias instability of the gyroscope achieves 1.15(°)/h

and the Angle Random Walk (ARW) is around 7.74×10

-2

(°)/√h. Meanwhile

the Signal and Noise Ratio(SNR) meets the designed specifications. These results verify the validity of the detecting technique. The method is conductive to improving the performance of the SMGs and extending their application fields.

关键词

Keywords

references

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