光学自由曲面快速刀具伺服车削误差的补偿

吴庆玲

doi:10.3788/OPE.20152309.2620

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光学自由曲面快速刀具伺服车削误差的补偿

微纳技术与精密机械 | 更新时间：2020-08-12

- 光学自由曲面快速刀具伺服车削误差的补偿
- Error compensation of optical freeform surfaces in fast tool servo diamond turning
- 光学精密工程 2015年23卷第9期页码：2620-2626
- 作者机构：
  
  吉林交通职业技术学校,吉林长春,130012
- 作者简介：
  
  [ "吴庆玲(1984-),女,山东曹县人,博士研究生,2007年、2009年于吉林大学分别获得学士、硕士学位,主要从事材料微观力学性能原位测试技术与仪器等方面的研究。E-mail:wuqlsmile@163.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(No.51175221)();吉林省科技攻关项目(No. 20130522155JH)()
- DOI：10.3788/OPE.20152309.2620
  中图分类号： TH161.1
- 收稿日期：2015-05-18，
  
  修回日期：2015-07-16，
  
  纸质出版日期：2015-09-25
- 稿件说明：
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吴庆玲,. 光学自由曲面快速刀具伺服车削误差的补偿[J]. 光学精密工程, 2015,23(9): 2620-2626

WU Qing-ling,. Error compensation of optical freeform surfaces in fast tool servo diamond turning[J]. Editorial Office of Optics and Precision Engineering, 2015,23(9): 2620-2626
吴庆玲,. 光学自由曲面快速刀具伺服车削误差的补偿[J]. 光学精密工程, 2015,23(9): 2620-2626 DOI： 10.3788/OPE.20152309.2620.

WU Qing-ling,. Error compensation of optical freeform surfaces in fast tool servo diamond turning[J]. Editorial Office of Optics and Precision Engineering, 2015,23(9): 2620-2626 DOI： 10.3788/OPE.20152309.2620.

摘要

受各种误差因素以及周期性变化的切削力的影响

快速刀具伺服金刚石车削技术往往难以用一次车削获得满足光学性能要求的自由曲面。本文提出了一种利用线性差动传感器(LVDT)实现高精度接触式自由曲面在位测量的方法。该方法结合两自由度快速刀具伺服系统

实现了基于快速刀具伺服(FTS)的自由曲面车削加工的误差补偿。试验结果表明

该技术将自由曲面的加工精度提高了20%

表面粗糙度降低18.1%

解决了FTS系统与机床运动的同步问题

可补偿机床

xyz

三向运动误差

可用于自由曲面加工误差的修正。该方法还可用于不对称幅度较大的曲面或硬脆性材料的加工等

故促进了高精度光学自由曲面的推广应用。

Abstract

Fast Tool Servo(FTS) diamond turning technology usually can not obtain satisfactory optical freeform surfaces by one-step turning because many error factors will drop the fabrication accuracy of freeform surfaces. Therefore

a higher precise contact in-side measuring method for freeform surfaces was proposed by using a Linear Variable Differential Transformer(LVDT). By combination with a two DOF fast tool servo system

the error compensation technology for optical freeform surfaces machined by fast tool servo diamond turning was implemented to enhance the fabrication accuracy. The experiment results show that the form accuracy has improved by 20% and surface roughness decreased by 18.1% with the proposed error compensation technology. This technology solves the synchronization between FTS system and tool movement

compensates movement errors in

xyz

directions of the machine tool and can used in correction of the machining errors of freeform surfaces. Moreover

it can be used to cut the large asymmetry surfaces and brittle materials

so that promotes the applications of high precision freeform surfaces.

关键词

Keywords

references

李灿,宋淑梅,刘英,等. 折反式眼底相机光学系统设计 [J]. 光学精密工程,2012,20(8): 1710-1717. LI C, SONG SH M, LIU Y,et al.. Design of optical system for catadioptric fundus camera [J]. Opt. Precision Eng., 2012, 20(8): 1710-1717. (in Chinese)

王建,刘英,郭帮辉,等. 离轴回转对称棱镜式头戴显示器目镜的研制 [J]. 光学精密工程,2012,20(7): 1421-1426. WANG J, LIU Y, GUO B H,et al.. Development of HMD eyepiece with prism of decentered rotationally symmetrical surfaces [J]. Opt. Precision Eng., 2012, 20(7): 1421-1426. (in Chinese)

XIONG W, ZHOU Y S, HE X N, et al.. Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation [J]. Light: Science & Applications, 2012, doi: 10.1038/lsa.2012.6 (2012).

BRINKSMEIER E. Review on diamond-machining processes for the generation of functional surface structures [J]. CIRP J Manuf Sci and Technol, 2012, 5: 1-7.

YIN Z Q, DAI Y F, LI S Y, et al. Fabrication of off-axis aspheric surfaces using a slow tool servo [J].International Journal of Machine Tools & Manufacture, 2011, 51(5): 404-410.

YU D P, WONG Y S, GEOk S H.Optimal selection of machining parameters for fast tool servo diamond turning [J]. Int J Adv Manuf Technol, 2011, 57: 85-99.

LU H, LEE D, KIM J, et al.. Modeling and machining evaluation of microstructure fabrication by fast tool servo-based diamond machining [J].Precision Engineering-Journal of The International Societies for Precision Engineering and Nanotechnology, 2014, 38(1): 212-216.

MA H Q, TIAN J, HU D J. Development of a fast tool servo in noncircular turning and its control [J].Mechanical Systems and Signal Processing, 2013, 41(1-2): 705-713.

KIM H S, LEE K I, LEE K M, et al.. Fabrication of free-form surfaces using a long stroke fast tool servo and corrective figuring with on-machine measurement [J].International Journal of Machine Tools & Manufacture, 2009, 49(12-13): 991-997.

关朝亮,王建敏,戴一帆,等. 基于Zernike多项式拟合的自由曲面车削误差补偿技术[J]. 国防科技大学学报,2010, 32(2): 135-140. GUAN CH L, WANG J M, DAI Y F, et al.. Figure error compensation of freeform surface turning based on Zernike polynomial fitting [J].Journal of National University of Defense Technology, 2010, 32(2): 135-140. (in Chinese)

杨佳文,黄巧林,韩友民. Zernike多项式在拟合光学表面面形中的应用及仿真[J]. 航天返回与遥感,2010,31(5): 49-55. YANG J W, HUANG Q L, HAN Y M. Application and simulation in fitting optical surface with Zernike polynomial [J]. Spacecraft Recovery & Remote Sensing, 2010, 31(5): 49-55. (in Chinese)

张伟,刘剑锋,龙夫年,等. 基于Zernike多项式进行波面拟合研究[J]. 光学技术,2005,31(5): 675-678. ZHANG W, LIU J F, LONG F N, et al.. Study on wavefront fitting using Zernike polynomials [J]. Optical Technique, 2005, 31(5): 675-678. (in Chinese)

刘强. 利用快速刀具伺服车削光学自由曲面的研究[D]. 长春:吉林大学,2012. LIU Q. Study on freeform optical surfaces diamond turning assisted by fast tool servo [D]. Changchun: Jilin University, 2012. (in Chinese)

仇谷峰,余景池,黄启泰,等. 接触式三坐标测量自由曲面轮廓的数据处理模型[J]. 光学精密工程,2013, 21(11): 2813-2820. QIU G F, YU J CH, HUANG Q T, et al.. Mathematical model of contacting freeform surface contour measurement [J].Opt. Precision Eng., 2013, 21(11): 2813-2820. (in Chinese)

ZDANOWICZ E M. Design of a fast long range actuator-FLORA Ⅱ [D]. North Carolina State University, 2009.

KONG L B, CHEUNG C F. Design, fabrication and measurment of ultra-precision micro-structured freeform surfaces [J]. Computers & Industrial Engineering, 2011,61(1): 216-225.

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