微细电解加工用中空电极的制备

孔全存; 刘国栋; 李勇; 周凯

doi:10.3788/OPE.20152310.2810

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微细电解加工用中空电极的制备

微纳技术与精密机械 | 更新时间：2020-08-13

- 微细电解加工用中空电极的制备
- Preparation of hollow electrode used for micro ECM
- 光学精密工程 2015年23卷第10期页码：2810-2818
- 作者机构：
  
  1. 清华大学机械工程系, 精密/超精密制造装备及控制北京市重点实验室北京,100084
  2. 北京信息科技大学仪器科学与光电工程学院北京,100192
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51275255)();江苏省数字化电化学加工重点建设实验室(常州工学院)开放基金资助项目(No.KFJJ2004005)()
- DOI：10.3788/OPE.20152310.2810
  中图分类号： TG662
- 收稿日期：2015-03-22，
  
  修回日期：2015-06-01，
  
  纸质出版日期：2015-10-25
- 稿件说明：
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孔全存, 刘国栋, 李勇等. 微细电解加工用中空电极的制备[J]. 光学精密工程, 2015,23(10): 2810-2818

KONG Quan-cun, LIU Guo-dong, LI Yong etc. Preparation of hollow electrode used for micro ECM[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10): 2810-2818
孔全存, 刘国栋, 李勇等. 微细电解加工用中空电极的制备[J]. 光学精密工程, 2015,23(10): 2810-2818 DOI： 10.3788/OPE.20152310.2810.

KONG Quan-cun, LIU Guo-dong, LI Yong etc. Preparation of hollow electrode used for micro ECM[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10): 2810-2818 DOI： 10.3788/OPE.20152310.2810.

摘要

为了改进加工间隙内电解产物的排出条件和加速电解液的更新

提出了一种嵌套式微细中空电极的精确可控焊接制备工艺。仿真分析了电极的过流特性

优化了电极长度

并进行了性能测试及加工实验。通过穿丝、黏结、嵌套尺寸及位置调整和焊接工序

制备出加工段内径为65 μm、外径为130 μm、长3.25 mm左右

后段便于装夹和连通的嵌套式中空电极。在供液压力为1.15 MPa时

其出口流速可达10 m/s左右。利用制备的中空电极

开展微细孔电解加工实验

在0.5 mm厚不锈钢片上加工出最小入口孔径约为157 μm

出口孔径约为133 μm的微细孔

并将其延伸应用于微结构加工中

铣削出了长554 μm、宽160 μm、深224 μm的微细T型槽。实验结果表明:制备的微细中空电极有效提高了加工间隙内电解液的流动特性

且连/导通可靠、装夹方便

适用于高深宽比微结构的电解加工。

Abstract

To release electrolysis products and refresh electrolyte greatly within a machining gap

a welding preparation process of Micro Nested Hollow Electrode (MNHE) for micro electrochemical machining (ECM) was researched. The flow characteristics of the MNHE were simulated and analyzed to optimize its length

then

the performance test and machining experiments for the MNHE were performed. The MNHE was prepared through threading

bonding

nested size & position adjusting and welding process. The front section of the MNHE was machined into a inner diameter of 65 μm

an outer diameter of 130 μm and a length about 3.25 mm

while its rear section was convenient for clamping and connectivity. The flow rate for outlet of the MNHE could reach up to 10 m/s under fluid supplying pressure of 1.15 MPa. Finally

experiments on micro ECM holes were carried out by utilizing the prepared hollow electrode. Micro holes with the minimum inlet diameter of 157 μm and outlet diameter of 133 μm were achieved on 0.5 mm thick stainless steel. A micro T-shaped groove with 554 μm length

160 μm width

and 224 μm depth was also milled. Experimental results indicate that the MNHE effectively improves the flow characteristics of the electrolyte within the machining gap

and it is suitable for electrochemical machining of micro structures with high aspect ratio for its easy clamp and reliable connectivity/conductivity

关键词

Keywords

references

FANG X L, QU N S, ZHANG Y D, et al.. Effects of pulsating electrolyte flow in electrochemical machining [J]. Journal of Materials Processing Technology, 2014, 214(1): 36-43.

ROLF S, VIOLA K, PHILIPPE A, et al.. Electrochemical micromachining [J]. Science, 2000, 289: 98-101.

孔全存,李勇,刘国栋,等. 三电极微细电解加工脉冲电源 [J]. 清华大学学报(自然科学版),2015,55(3):266-272. KONG Q C, LI Y, LIU G D, et al.. Three-electrode pulse power supply for micro ECM [J]. Journal of Tsinghua University(Scicence and Technology), 2015,55(3):266-272. (in Chinese)

CHOI S H, KIM B H, SHIN H S, et al.. Analysis of the electrochemical behaviors of WC-CO alloy for micro ECM [J]. Journal of Materials Processing Technology, 2013, 213(4):621-630.

MATTHIAS K, VIOLA K, ROLF S. Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision [J]. Electrochimica Acta, 2003, 48:3213-3219.

张朝阳,李中洋,王耀民,等. 激光冲击效应下的力学电化学微细刻蚀加工[J]. 光学精密工程,2012,20(6): 1310-1315. ZHANG CH Y, LI ZH Y, WANG Y M, et al.. Mechanical-electrochemical micro-etching under laser shock effect [J]. Opt. Precision Eng., 2012, 20(6): 1310-1315 . (in chinese)

李小海,王振龙,赵万生. 高频窄脉冲电流微细电解加工研究[J]. 机械工程学报, 2006, 42( 1): 162-167. LI X H, WANG ZH L, ZHAO W SH. Electrolytic micromachining with high frequency short pulse current [J]. Chinese Journal of Mechanical Engineering, 2006, 42(1):162-167. (in chinese)

王明环,朱荻,王磊,等. 微细电解加工中工具电极的制备及应用[J]. 微细加工技术, 2007,5: 52-60 . WANG M H, ZHU D, WANG L, et al.. Preparation and application of electrodes used for the tool of micro-electrochemical machining [J]. Microfabrication Technology, 2007,5: 52-60. (in chinese)

王明环,朱荻,徐惠宇. 微螺旋槽电极在改善微细电解加工中性能的应用[J]. 机械科学与技术,2006,3(25): 348-351. WANG M H, ZHU D, XU H Y. Use of micro-helix electrodes in improving performance of micro-ECM [J]. Mechanical Science and Technology, 2006,3(25): 348-351. (in Chinese)

JO C H, KIM B H, CHU C N. Micro electrochemical machining for complex internal micro features [J]. CIRP Annals-Manufacturing Technology, 2009, 58(1): 181-184.

马晓宇. 阵列孔微细电解加工基础技术研究[D]. 北京:清华大学, 2010. MA X Y. Research on fundamental techniques of Micro ECM for array hole fabrication [D]. Beijing: TsingHua University. 2010 . (in chinese)

RAJURKAR K P, ZHU D. Improvement of electrochemical machining accuracy by using orbital electrode movement [J]. CIRP Annals-Manufacturing Technology, 1999,48(1): 139-142.

WANG W, ZHU D, QU N S, et al.. Electrochemical drilling with vacuum extraction of electrolyte [J]. Journal of Materials ProessingTechnology. 2010,210(2):238-244.

许晓威,陈立国,贺文元,等. 数字微流控芯片半月形驱动电极的设计[J]. 光学精密工程,2014,22(3): 633-640. XU X W, CHEN L G, HE W Y, et al.. Design of crescent driving electrode for digital electowetting-on-dielectric devices [J]. Opt. Precision Eng., 2014, 22(3): 633-640 . (in chinese)

孔全存,李勇,朱效谷,等. 基于双电层电容的微细电解加工间隙的在线检测 [J]. 纳米技术与精密工程,2013,11(6): 527-535. KONG Q C, LI Y, ZHU X G, et al.. Online detection method for inter-electrode gap in micro ECM based on capacitance of electric double layers [J]. Nanotechnology and Precision Engineering, 2013,11(6): 527-535. (in Chinese)

杨国清,廖彦剑,杨军,等. 一种多通道微流控芯片压力检测方法研究[J]. 仪器仪表学报,2012,33(11): 2546-2551. YANG G Q, LIAO Y J, YANG J, et al.. Study on a multi-channel micro fluid chip pressure measurement method based on laminar flow distribution [J].Chinese Journal of Scientific Instrument, 2012,33(11): 2546-2551. (in chinese)

SHARP K V, ADRIAN R J. Transition from laminar to turbulent flow in liquid filled microtubes [J]. Experiments in Fluids, 2004,36(5): 741-747.

ZHU X G, HUANG W F, LI Y. Role of step-shape structures and critical failure bubble volume in micro bubble constraint [J]. Chinese Science Bulletin, 2012,57(22):2941-2946.

李勇,江小宁,周兆英,等. 微管道流体的流动特性 [J]. 中国机械工程,1994,5(3): 24-26. LI Y, JIANG X N, ZHOU ZH Y, et al.. Flow characteristics of fluid in micro-pipeline [J]. China Mechanical Engineering, 1994,5(3): 24-26. (in Chinese)

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