成像光学系统的相对波像差梯度偏离值评价法

宣斌

doi:10.3788/OPE.20152312.3329

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成像光学系统的相对波像差梯度偏离值评价法

现代应用光学 | 更新时间：2020-08-13

- 成像光学系统的相对波像差梯度偏离值评价法
- Relative wavefront gradient deviation evaluation methods for imaging systems
- 光学精密工程 2015年23卷第12期页码：3329-3334
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春 130033
- 作者简介：
  
  [ "宣斌(1983-),男,江苏南通人,博士,副研究员,2010年于中国科学院长春光学精密机械与物理研究所获得博士学位,主要从事高精度光学检测和光学加工方面的研究。E-mail:xbjsnt@sina.com" ]
- 基金信息：
  
  中国科学院探索与验证条件建设专项资助项目()
- DOI：10.3788/OPE.20152312.3329
  中图分类号： O439;TH703
- 修回日期：2015-09-26，
  
  纸质出版日期：2015-12-25
- 稿件说明：
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宣斌,. 成像光学系统的相对波像差梯度偏离值评价法[J]. 光学精密工程, 2015,23(12): 3329-3334

XUAN Bin,. Relative wavefront gradient deviation evaluation methods for imaging systems[J]. Editorial Office of Optics and Precision Engineering, 2015,23(12): 3329-3334
宣斌,. 成像光学系统的相对波像差梯度偏离值评价法[J]. 光学精密工程, 2015,23(12): 3329-3334 DOI： 10.3788/OPE.20152312.3329.

XUAN Bin,. Relative wavefront gradient deviation evaluation methods for imaging systems[J]. Editorial Office of Optics and Precision Engineering, 2015,23(12): 3329-3334 DOI： 10.3788/OPE.20152312.3329.

摘要

针对成像光学系统的波像差检测

提出了相对波像差梯度偏离值评价方法

用于直接表征波前的成像性能。给出了波像差梯度偏离值的定义

即为波前成像点与成像能量中心的偏离值。在此基础上定义相对波像差梯度偏离值为波像差梯度偏离值与艾里斑大小的比值

并提出了相对波像差梯度偏离值评价方法。相对波像差梯度偏离值与波前口径、形状、焦距均无关

故文中提出用成像尺寸、成像集中度以及成像能量分布等多种方法进行相对波像差梯度偏离值评价。其中成像集中度和成像能量分布在不同的检测分辨率条件下的稳定性较好

分辨率每相差一倍产生的差异通常小于10%。根据出瞳位置的相对波像差梯度偏离值分布和像面位置的波像差梯度分布情况

可以方便地指导光学加工和系统装调。进行了相应的实验分析

结果显示:相对波像差梯度偏离值评价方法可以用于制定波像差指标

进行波前质量控制。

Abstract

The relative wavefront gradient deviation evaluation methods were proposed to evaluate wavefront errors of imaging systems for characterizing directly the imaging performance of the wavefront. The wavefront gradient deviation was defined as the deviation between each image point and image energy center and the relative wavefront gradient deviation was defined as the ratio of gradient deviation to Airy disk radius. Then

the relative wavefront gradient deviation evaluation methods were given. As the relative wavefront gradient deviation is independent on wavefront dimension

wavefront shape and focal length

the relative wavefront gradient deviation was evaluated by image size

image concentration and image energy distribution in this paper. The evaluations of image concentration and image energy distribution are usually stable enough for different test resolutions. The differences for every double or half resolution differences are usually less than 10%. According to the relative wavefront gradient deviation distribution on an exit pupil and wavefront gradient distribution on an image plane

it can be convenient to operate for optical manufacture and system assembling. The experiments show that the relative wavefront gradient deviation evaluations can be used as the wavefront specifications for quality control.

关键词

Keywords

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