基于正交与插值算法的精密抛光平台综合误差建模与补偿

张恩忠; 赵继; 冀世军; 李刚

doi:10.3788/OPE.20152312.3422

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基于正交与插值算法的精密抛光平台综合误差建模与补偿

微纳技术与精密机械 | 更新时间：2020-08-13

- 基于正交与插值算法的精密抛光平台综合误差建模与补偿
- Comprehensive error modeling and compensation for precision polishing platform based on orthogonal experiment and interpolation algorithm
- 光学精密工程 2015年23卷第12期页码：3422-3429
- 作者机构：
  
  1. 吉林大学机械科学与工程学院,吉林长春,130025
  2. 长春工业大学机电学院,吉林长春,130012
- 作者简介：
- 基金信息：
  
  国家973重点基础研究发展计划资助项目(No.2011CB706702)()
- DOI：10.3788/OPE.20152312.3422
  中图分类号： TH703;TN305.7
- 修回日期：2015-08-16，
  
  纸质出版日期：2015-12-25
- 稿件说明：
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张恩忠, 赵继, 冀世军等. 基于正交与插值算法的精密抛光平台综合误差建模与补偿[J]. 光学精密工程, 2015,23(12): 3422-3429

ZHANG En-zhong, ZHAO Ji, JI Shi-jun etc. Comprehensive error modeling and compensation for precision polishing platform based on orthogonal experiment and interpolation algorithm[J]. Editorial Office of Optics and Precision Engineering, 2015,23(12): 3422-3429
张恩忠, 赵继, 冀世军等. 基于正交与插值算法的精密抛光平台综合误差建模与补偿[J]. 光学精密工程, 2015,23(12): 3422-3429 DOI： 10.3788/OPE.20152312.3422.

ZHANG En-zhong, ZHAO Ji, JI Shi-jun etc. Comprehensive error modeling and compensation for precision polishing platform based on orthogonal experiment and interpolation algorithm[J]. Editorial Office of Optics and Precision Engineering, 2015,23(12): 3422-3429 DOI： 10.3788/OPE.20152312.3422.

摘要

为了提高四轴抛光平台的加工精度

本文针对以气浮平台和旋转台为主要运动方式的四轴抛光平台进行了几何与热综合误差建模与补偿研究。采用激光干涉仪、温度传感器等测量仪器分别对平台

X、Z

轴在不同温度下的定位误差进行重复测量与分析

证实了不同进给速度对定位误差没有显著影响。得到了四轴抛光平台

X、Z

轴的定位误差与温度之间的变化规律。基于正交多项式和插值算法分别建立了X、Z轴的几何与热综合误差模型。根据综合误差模型计算出预测数据曲线

并分别对

X、Z

轴的7组实验数据进行了数据拟合

拟合残差绝对值均不超过0.2 μm。依据预测数据进行了补偿实验。结果显示

补偿后四轴抛光平台在常温下、温升(60 min)下和稳态下的

轴定位误差分别降低了93.05%、92.45%、85.71%

轴定位误差分别降低了89.28%、93.59%、93.33%。实验结果证明本文所提出的综合模型及补偿方法精度高

鲁棒性好。

Abstract

To improve the machining precision of four-axis polishing platforms

a geometric and thermal comprehensive error model and an error compensation method were researched for a four-axis polishing platform with a float platform and a rotation platform. Several kinds of instruments such as laser interferometer

temperature sensor were used to repeatedly measure and analyze respectively the positioning errors of

axes at different temperatures and to verify that different feeding speeds were no significant influence on the positioning error. The change rules of between position error and temperature change for the polishing platform in

axes were obtained. Based on orthogonal polynomial and interpolation algorithm

the geometric and thermal comprehensive error model of

axes was established. According to the comprehensive error model

the prediction data curves were calculated

and seven groups of experimental data of

axes were fitted and the fitting residual error absolute value was verified to be less than 0.2 μm. A compensation experiment was carried out according to the forecasting data. The results show that the

axis positioning errors of polishing platform under the normal temperature

the temperature rise of 60 min and steady state are respectively decreased by 89.33%

92.45% and 85.7% after compensation

and the

-axis positioning errors are respectively reduced by 89.23%

93.59% and 93.33% after compensation. The experimental results demonstrate that the presented comprehensive model and compensation method have high precision and good robustness.

关键词

Keywords

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