镀膜优化与单模光纤劈尖表面等离子体共振传感探针

刘佩坤; 李彦; 魏勇; 张羽; 朱宗达

doi:10.3788/OPE.20152313.0057

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镀膜优化与单模光纤劈尖表面等离子体共振传感探针

更新时间：2020-08-13

- 镀膜优化与单模光纤劈尖表面等离子体共振传感探针
- Coating optimization and SPR wedge probe with single mode fiber
- 光学精密工程 2015年23卷第10z期页码：57-63
- 作者机构：
  
  哈尔滨工程大学理学院
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.11204047,No.61227013,No.61275087)();哈尔滨工程大学基础研究基金资助项目();111计划资助项目(No
- DOI：10.3788/OPE.20152313.0057
  中图分类号： O484.1;TN253
- 收稿日期：2015-06-19，
  
  修回日期：2015-07-10，
  
  纸质出版日期：2015-11-14
- 稿件说明：
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刘佩坤, 李彦, 魏勇等. 镀膜优化与单模光纤劈尖表面等离子体共振传感探针[J]. 光学精密工程, 2015,23(10z): 57-63

LIU Pei-kun, LI Yan, WEI Yong etc. Coating optimization and SPR wedge probe with single mode fiber[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 57-63
刘佩坤, 李彦, 魏勇等. 镀膜优化与单模光纤劈尖表面等离子体共振传感探针[J]. 光学精密工程, 2015,23(10z): 57-63 DOI： 10.3788/OPE.20152313.0057.

LIU Pei-kun, LI Yan, WEI Yong etc. Coating optimization and SPR wedge probe with single mode fiber[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 57-63 DOI： 10.3788/OPE.20152313.0057.

摘要

提出了用等离子溅射仪镀制50 nm金膜的方法。针对于多模光纤表面等离子体共振(SPR)模式混合灵敏度低

难以仿真的问题

提出一种单模光纤劈尖结构SPR传感探针。研究了等离子溅射仪真空度、电流、距离、时间等参数对成膜质量及膜厚的影响

用轮廓仪标定膜厚并通过改装空间棱镜式SPR测量系统研究膜厚对SPR激励现象的影响。利用光纤研磨技术将630 nm单模光纤磨制成劈尖结构并在劈尖斜面上镀制50 nm金膜

在单模光纤上实现了Kretchmann棱镜结构。在显微镜下将纤芯直径为105 m的多模光纤端面对准单模劈尖的全反射光束并固定

收集SPR反射光

用于研究单模劈尖结构SPR折射率传感特性。实验结果表明:当等离子溅射仪真空度稳定在210

-1

Pa、电流为5 mA、溅射距离为1 cm、溅射时间为3.5 min时

金膜镀制质量良好

膜厚为(505)nm。当研磨角为15时

单模光纤劈尖SPR传感器对折射率为1.333～1.385的液体响应灵敏

共振谷可在693～924 nm工作

平均灵敏度达4 442 nm/RIU。本文提出的离子溅射仪镀制50 nm金膜方法成膜质量好

膜厚满足SPR实验要求

设计制作的单模光纤劈尖结构SPR探针制作简单

灵敏度高。

Abstract

A method to coat a 50 nm golden film with a plasma sputtering apparatus was proposed. By considering low sensitivity on Surface Plasmon Resonance(SPR) mode mixing of multimode fibers and simulation difficulty

a SPR sensing probe of single mode fiber with the wedge structure was introduced experimentally. Firstly

the effects of parameters such as vacuum degree

electric current

distance and time on film properties and film depths were studied. The film thickness was calibrated by a profilometer and the effect of film thickness on SPR exciting phenomenon was measured by a modified SPR measurement system with a space prism. The 630 nm single mode fiber was polished into a wedge structure by fiber grinding technology

and the 50 nm golden film was coated on the inclined plane of the wedge to realize the Kretchmann prism structure on the single mode fiber. Under a microscope

the end face of multi-mode fiber with 105 m diameter of fiber core was directed at a total reflection beam and fixed to collect the reflection light of SPR

where the sensing property and reflective index of SPR single mode fiber with the wedge structure were studied. The results show that the golden film is well coated with (505) nm film thickness under the conditions of 210

-1

Pa vacuum degree

5 mA electric current

1 cm sputtering distance and 3.5 min sputtering time. When grinding angel is 15

the SPR sensor of single mode fiber with wedge structure is sensitive to liquid with refractive index between 1.333 and 1.385 and the working range of resonance valley is between 693 nm and 924 nm with the mean sensitivity of 4 442 nm/RIU. The proposed ion sputtering equipment meets the demand of SPR experiment and the SPR probe of single mode fiber with wedge construct is characterized by high sensitivity

simple procedures and great application potential.

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references

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