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中国科学院 长春光学精密机械与物理研究所,吉林 长春,中国,130033
[ "陈云善(1984-),男,四川成都人,博士,助理研究员,2007年于东北师范大学获得学士学位,2012年于长春光机所获得博士学位,主要从事微弱信号处理、光斑位置检测等方面的研究。E-mail:yiyunsn@163.com" ]
收稿日期:2015-06-08,
修回日期:2015-06-30,
纸质出版日期:2015-11-14
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陈云善,. 四象限探测器的均匀光斑位置分辨率[J]. 光学精密工程, 2015,23(10z): 113-119
CHEN Yun-shan,. Position resolution of quadrant detector for uniform spot[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 113-119
陈云善,. 四象限探测器的均匀光斑位置分辨率[J]. 光学精密工程, 2015,23(10z): 113-119 DOI: 10.3788/OPE.20152313.0112.
CHEN Yun-shan,. Position resolution of quadrant detector for uniform spot[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 113-119 DOI: 10.3788/OPE.20152313.0112.
为了精确分析四象限探测器(Quadrant Detector
QD)位置检测系统性能
研究了均匀光斑模型下影响QD位置分辨率检测的主要因素。分析了在均匀光斑模型下QD位置检测原理;根据误差理论并利用光斑位置近似解算公式
推导出了该探测器位置分辨率与光斑半径、光斑中心位置和总信噪比关系的近似数学模型;最后
对模型的正确性进行了实验验证。结果表明
当光斑位置与靶面中心的距离在二分之一光斑半径以内
总信噪比为63.04dB时
在不同光斑半径情况下使用该模型估算的位置分辨率误差约为12%。另外
使用该模型可直接估算出该探测器位置检测系统可以达到的分辨率
极大地方便了工程应用。
To precisely analyze the performance of a position detecting system based on a quadrant detector (QD)
the main factors affecting QD position resolution for a uniform spot model were studied. The basic principle of the QD position detection was firstly analyzed. Based on the approximation formula of spot position and according to the error theory
an approximate mathematical model was derived to characterize the relationship between the position resolution and the beam radius
the spot centroid position and the total signal to noise ratio. Finally
an experimental system was designed to verify the validity of the mathematical model. The research results show that the estimation error of position resolution using the mathematical model is about 12% for various radii when the distance between the center of QD and the position of spot is in a half radius range and the total signal to noise ratio is 63.04 dB. Furthermore
the mathematical model could exactly and directly estimate the position resolution of detection system of the QD
which brings great convenience to engineering applications.
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