光谱仪分光扫描机构光零位置误差检测

陈琛; 许伦豹; 千承辉; 王智宏

doi:10.3788/OPE.20152313.0144

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光谱仪分光扫描机构光零位置误差检测

更新时间：2020-08-13

- 光谱仪分光扫描机构光零位置误差检测
- Detection of optical zero position error for scanning mechanism in spectrometer
- 光学精密工程 2015年23卷第10z期页码：145-150
- 作者机构：
  
  吉林大学仪器科学与电气工程学院,吉林长春,130026
- 作者简介：
- 基金信息：
  
  吉林省科技发展计划重大科技专项(No.20116014)()
- DOI：10.3788/OPE.20152313.0144
  中图分类号： TH744.1
- 收稿日期：2015-06-16，
  
  修回日期：2015-07-10，
  
  纸质出版日期：2015-11-14
- 稿件说明：
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陈琛, 许伦豹, 千承辉等. 光谱仪分光扫描机构光零位置误差检测[J]. 光学精密工程, 2015,23(10z): 145-150

CHEN Chen, XU Lun-bao, QIAN Cheng-hui etc. Detection of optical zero position error for scanning mechanism in spectrometer[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 145-150
陈琛, 许伦豹, 千承辉等. 光谱仪分光扫描机构光零位置误差检测[J]. 光学精密工程, 2015,23(10z): 145-150 DOI： 10.3788/OPE.20152313.0144.

CHEN Chen, XU Lun-bao, QIAN Cheng-hui etc. Detection of optical zero position error for scanning mechanism in spectrometer[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 145-150 DOI： 10.3788/OPE.20152313.0144.

摘要

为了检测光栅扫描型近红外光谱仪分光系统扫描机构的光零位置误差

提高光谱仪的波长准确度

提出了基于图像处理测量该系统在光零位置时扫描机构中摆杆与丝杠垂直度误差的方法。该方法通过图像采集获取光零图像

利用像素标定获得相关要素的空间坐标

采用边缘提取、最小二乘曲线拟合等算法提取丝杠与摆杆中心线

利用拟合中心线的方程参数计算丝杠与摆杆的夹角

从而完成光栅扫描型光谱仪光零位置误差的检测。实验结果表明

光谱仪扫描机构的光零位置误差值为1.544

测量精度为0.083

满足光零误差角的检测要求。该检测方法具有操作简单、非接触、测量精度高等优点

为光栅扫描型近红外光谱仪波长误差的补偿奠定了理论基础。

Abstract

To detect the error of optical zero position in scanning mechanism of a grating scanning near-infrared spectrometer and to increase the wavelength accuracy of the spectrometer

an image processing method was proposed for measurement of the vertical errors of pendulum and screw in the scanning mechanism when the grating scanning system was in the optical zero position. Firstly

the image of optical zero position was acquired by the image acquisition system. Then

spatial coordinates of relevant elements were calibrated by pixels

and centerlines of screw and pendulum were extracted by using the edge extracting method and least-square curve fitting algorithm. Finally

the angle between screw and pendulum was calculated by equation parameters of fitting centerline

and thus the error detection on optical zero position was realized. The experimental results indicate that the error of the zero position is 1.544 and the measuring precision is 0.083. The proposed method satisfies the testing requirements for simpleness

non-contact and higher precision. Moreover

it provides theoretical data for compensation of wavelength errors for grating near-infrared spectrometers.

关键词

Keywords

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