集成MEMS移相器缝隙耦合相控阵天线

韩琦; 徐立新; 王婷; 丛琳

doi:10.3788/OPE.20152313.0272

您当前的位置：

首页 >

文章列表页 >

集成MEMS移相器缝隙耦合相控阵天线

更新时间：2020-08-13

- 集成MEMS移相器缝隙耦合相控阵天线
- Coupled feed phased array antenna integrated with MEMS phase shifter
- 光学精密工程 2015年23卷第10z期页码：272-278
- 作者机构：
  
  北京理工大学机电学院北京,100081
- 作者简介：
- 基金信息：
  
  总装备部预研基金资助项目()
- DOI：10.3788/OPE.20152313.0272
  中图分类号： TN821.8
- 收稿日期：2015-04-07，
  
  修回日期：2015-05-15，
  
  纸质出版日期：2015-11-14
- 稿件说明：
移动端阅览
韩琦, 徐立新, 王婷等. 集成MEMS移相器缝隙耦合相控阵天线[J]. 光学精密工程, 2015,23(10z): 272-278

HAN Qi, XU Li-xin, WANG Ting etc. Coupled feed phased array antenna integrated with MEMS phase shifter[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 272-278
韩琦, 徐立新, 王婷等. 集成MEMS移相器缝隙耦合相控阵天线[J]. 光学精密工程, 2015,23(10z): 272-278 DOI： 10.3788/OPE.20152313.0272.

HAN Qi, XU Li-xin, WANG Ting etc. Coupled feed phased array antenna integrated with MEMS phase shifter[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 272-278 DOI： 10.3788/OPE.20152313.0272.

摘要

研究了相控阵天线系统使用的MEMS移相器的结构设计以及与耦合馈电相控天线阵的集成方法。根据相移原理和波束扫描原理

提出了移相器传输线的长度计算方法;对悬臂梁结构的MEMS开关进行设计

总结了优化开关结构的途径;最后给出了MEMS移相器与耦合馈电天线阵的集成方法。提出的制作工艺简单易于实现。结果显示:优化的MEMS开关在25 GHz频率内插入损耗小于0.2 dB

隔离度大于-15 dB;移相器在15~20 GHz的频段内阻抗匹配良好

相移特性呈良好的线性变化

相移度数为45

最大相移误差为5。基于此移相器集成的22MEMS耦合天线阵在17.3GHz的工作频率下波束可以进行30的扫描

最大增益为9.3 dB

满足低成本单片集成相控阵天线的需求。

Abstract

The structure design of a MEMS(Micro-electromechanical System) phase shifter used in phase array antennas was studied and its integration method with a coupled feed phased array antenna was given. The length of the transmission line according to the phase shift principle and the beam scanning principle was calculated. Then

the cantilever MEMS switch was designed and the optimization method of the switch was summarized. Finally

the integration method of the MEMS phase shifter with the coupled feed antenna array was presented. The results show that the insertion loss and the isolation of the optimized switch are less than 0.2 dB and more than-15 dB within 25 GHz

respectively. The phase shifter has a good impedance matching in 15 GHz-20 GHz

and its phase shift characteristics vary linearly. The shift phase is 45 with a maximum phase error of 5. The 22 MEMS coupled antenna array integration with this phase shifter can complete a beam steering angle of 30 at 17.3 GHz. The highest gain of the array is 9.3 dB. This phase shifter meets low-cost monolithic integrated demand of the phased array antennas.

关键词

Keywords

references

REBEIZE G M, MULDAVIN J B. RF MEMS Switches and Switch Circuits[J]. IEEE Micro Wave Magazine, 2001, 10(12):59-71.

郁元卫,姜理利,朱健. 4位毫米波MEMS移相器[J]. 固体电子学研究和进展,2013,33(6):528-532. YU Y W, JIANG L L, ZHU J. A 4 bit Millimeter-wave MEMS Phase Shifter[J]. Research and Progress of SSE, 2013, 33(6):528-532.(in Chinese)

KELLER S D, HARRIS R W, KINGKEO K. Coplanar Waveguide Slot-Coupled Patch Antenna Electronic Scanning Array for On-The-Move SATCOM[C]. Antennas and Propagation Society International Symposium, IEEE, 2009:1-4.

CHIN-HSIANG K, KEVIN M J, GABRIEL M R. An electronically-scanned 1.8-2.1 GHz base-station antenna using packaged high-reliability RF MEMS phase shifters[J]. IEEE Transactions On Microwave Theory and Techniques, 2013,61(2):979-985.

WILLIAM G, ARMIN S, CHRISTIAN S, et al.. Hybrid Integrated RF-MEMS phased array antenna at 10 GHz[C]. Proceedings of the 38th European Microwave Conference, IEEE, 2008:139-142.

CHRISTIAN J A A, STUART P, ANDY M. Reconfigurable phased array antennas with RF-MEMS on a PCB substrate[C]. Antennas and Propagation Conference, IEEE, 2012:1-5.

CHRISTIAN J A A, STUART P, IAIN W, et al.. DC-Contact RF-MEMS cantilever switch on a PCB substrate for monolithic integration with microstrip phased array antenna[C]. Antennas and Propagation Conference, IEEE, 2013:467-472.

KOEN V C, TAUNO V H, REBEIZE G M, et al.. Ka-Band MEMS TTD passive Electronically Scanned Array(ESA)[C]. Antennas and Propagation Society International Symposium, IEEE, 2006:513-516.

PURI M, DAS A, SENGAR J S. A novel design of monolithically integrated phased array antenna employing 4-bit DMTL phase shifter[C]. Wireless and Optical Communication Networks, IEEE, 2013:1-6.

张光义. 相控阵雷达原理[M]. 北京:国防工业出版社,2009. ZHANG G Y. Principles of Phased Array Radar[M]. Beijing:National Defense Industry Press, 2009.(in Chinese)

侯智昊,刘泽文,李志坚. DC~30GHz 并联接触式RF MEMS开关的设计与制造[J]. 光学精密工程,2009,17(8):1922-1927. HOU ZH H, LIU ZH W, LI Z J. Design and fabrication of DC to 30 GHz DC-contact shunt RF MEMS switch[J]. Opt. Precision Eng., 2009, 17(8):1922-1927.(in Chinese)

雷雪,陈国虎,安娜,等. 一种宽带多波束微带阵列天线的设计[J]. 微波学报,2014,30(4):29-33. LEI X, CHEN G H, AN N et al.. Design and Realization of a broadband multi-beam microstrip antenna array[J]. Journal of Microwaves, 2014, 30(8):29-33.(in Chinese)

王朝阳,朱瑞平. 一种双极化宽带相控阵贴片天线的设计[J]. 现代雷达,2015,37(1):56-58. WANG CH Y, ZHU R P. Design of dual-polarized wideband phased array patch antennas[J].Modern Radar, 2015, 37(1):56-58.(in Chinese)

侯芳,朱健,吴璟,等. MEMS层叠式毫米波天线设计[J]. 传感技术学报,2008,21(2):329-332. HOU F, ZHU J, WU J et al.. Millimeter-wave design of stacked micromachined patch antennas[J]. Chinese Journal of Sensors and Actuators, 2008, 21(2):329-332.(in Chinese)

浏览量

430

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

单片集成光耦隔离式驱动芯片

基于BCD工艺的塑料光纤通信光接收机

一种用于高机械可靠性RF MEMS开关制备的新型工艺