微流体脉冲惯性喷射技术制备微电极

杨利军; 朱丽; 朱晓阳; 陆宝春; 王洪成; 章维一

doi:10.3788/OPE.20152313.0291

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微流体脉冲惯性喷射技术制备微电极

更新时间：2020-08-13

- 微流体脉冲惯性喷射技术制备微电极
- Fabrication of microelectrodes based on microfluidic pulse inertial jetting technology
- 光学精密工程 2015年23卷第10z期页码：291-296
- 作者机构：
  
  1. 南京理工大学机械工程学院,江苏南京,中国,210094
  2. 南京航空航天大学仿生结构与材料防护研究所,江苏南京,210016
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51175268)();江苏省博士后科研基金资助项目(No.1402006B)();中国博士后科学基金资助项目(No.2014M5515
- DOI：10.3788/OPE.20152313.0291
  中图分类号： TP69;TP273
- 收稿日期：2015-04-20，
  
  修回日期：2015-05-27，
  
  纸质出版日期：2015-11-14
- 稿件说明：
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杨利军, 朱丽, 朱晓阳等. 微流体脉冲惯性喷射技术制备微电极[J]. 光学精密工程, 2015,23(10z): 291-296

YANG Li-jun, ZHU Li, ZHU Xiao-yang etc. Fabrication of microelectrodes based on microfluidic pulse inertial jetting technology[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 291-296
杨利军, 朱丽, 朱晓阳等. 微流体脉冲惯性喷射技术制备微电极[J]. 光学精密工程, 2015,23(10z): 291-296 DOI： 10.3788/OPE.20152313.0291.

YANG Li-jun, ZHU Li, ZHU Xiao-yang etc. Fabrication of microelectrodes based on microfluidic pulse inertial jetting technology[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 291-296 DOI： 10.3788/OPE.20152313.0291.

摘要

基于微流体脉冲惯性喷射技术搭建了微电极的按需喷射制备系统。以纳米银导电墨水为喷射材料

将其以一定的重叠率按需微喷射到经过洁净处理的盖玻片基底表面上

形成微电极图形;然后将制备有微电极图形的玻片置于恒温干燥箱

以140℃烧结25 min后进行固化

制得微电极。实验研究了微喷嘴内径和驱动电压对液滴直径的影响以及液滴直径和重叠率对微电极图形宽度的影响。最后

制备了任意图形的微电极

并对微电极导电性能的均匀性和微电极的稳定性进行了检测。实验结果表明

采用微流体脉冲惯性喷射技术制备微电极的方法制备过程简单、成本较低、基底不需进行表面处理

制备的微电极几何尺寸可控

导电性能均匀

具有较好的形貌和电阻稳定性。

Abstract

A fabrication system for microelectrodes was set up based on the microfuidic pulse inertial jetting on-demand technology. The conductive ink was used as a jetting meterial and it was jetted on a cleaned cover glass substrate to form the designed microelectrode pattern in a certain overlap rate. Then the pattern on the cover glass substrate was sintered to form a microelectrode in an oven at 140℃ for 25 min. The influences of the micro-nozzle diameter and driving voltage on the droplet diameter were researched

as well as the influences of droplet diameter and the overlap rate on the width of the microelectrode pattern. Finally

several different microelectrodes with various shapes were fabricated. The conductive uniformity and the stability of the microelectrodes were measured. The experimental results indicate that the fabrication of microelectrodes based on the microfuidic pulse inertial jetting on-demand technology has many advantages on the simple fabrication process

lower cost and non-surface treatment. Furthermore

the microelectrodes have several merits such as size controllability

good conductivity uniformity and the stability of morphology and resistance.

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Keywords

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