高速精密定位平台振动误差补偿

刘吉柱; 张雯雯; 李健; 陈立国

doi:10.3788/OPE.20152313.0328

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高速精密定位平台振动误差补偿

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- 高速精密定位平台振动误差补偿
- Vibration error compensation of high speed and high precision positioning platform
- 光学精密工程 2015年23卷第10z期页码：328-334
- 作者机构：
  
  苏州大学机电工程学院苏州纳米科技协同创新中心,江苏苏州,215021
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61273340)();国家863高技术研究发展计划资助项目(No.2013AA041109)()
- DOI：10.3788/OPE.20152313.0328
  中图分类号： TH703;TP273
- 收稿日期：2015-05-05，
  
  修回日期：2015-06-10，
  
  纸质出版日期：2015-11-14
- 稿件说明：
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刘吉柱, 张雯雯, 李健等. 高速精密定位平台振动误差补偿[J]. 光学精密工程, 2015,23(10z): 328-334

LIU Ji-zhu, ZHANG Wen-wen, LI Jian etc. Vibration error compensation of high speed and high precision positioning platform[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 328-334
刘吉柱, 张雯雯, 李健等. 高速精密定位平台振动误差补偿[J]. 光学精密工程, 2015,23(10z): 328-334 DOI： 10.3788/OPE.20152313.0328.

LIU Ji-zhu, ZHANG Wen-wen, LI Jian etc. Vibration error compensation of high speed and high precision positioning platform[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 328-334 DOI： 10.3788/OPE.20152313.0328.

摘要

搭建了宏微结合精密定位系统以便减小定位平台在

方向的振动误差

实现高精度定位。该系统由高性能直线电机驱动

气体静压导轨支撑和导向的宏动平台实现系统的大行程微米级定位

由安装在宏动平台上的压电陶瓷驱动微动平台对系统进行

方向定位精度补偿。建立了定位系统

向振动模型

采用模糊PID控制策略

用电容式微位移传感器实时检测定位系统终端的位置输出信号并将其作为微动台的输入信号

实现了定位系统的闭环反馈控制

最终完成了宏动平台的振动误差实时补偿。实验结果显示:所设计的微动补偿平台具有好的动态特性

定位系统的误差实时补偿效果优良

针对

向的振动范围由补偿前的6

m减小到补偿后的2

m。结果表明本文研究的振动误差补偿方法可以有效减小定位系统的振动误差

提高系统的定位精度。

Abstract

A macro-micro-combined positioning system was built to reduce the vibration error of the positioning platform in the

direction and to realize its high precision positioning. It was driven by a high performance linear motor. The micron-level large-stroke position was done in the macro-moving platform supported and guided by a static pressure gas guide rail. The position accuracy in

direction was compensated by the micro platform driven by piezoelectric ceramics installed in the macro-moving platform. Then the

direction vibration model of this positioning system was established

where the fuzzy PID control strategy was used. Furthermore

the output position signal of the positioning terminal detected by a capacitive small-displacement sensor in real-time was treated as the input signal of micro-moving platform to achieve closed loop feedback control of positioning system

and the real-time compensation of vibration error of the macro moving system was ultimately impletemented. Experimental results indicate that the micro compensating platform designed has good dynamic characteristics and real time error compensation effect. For

direction positioning

the vibration range is reduced from 6

m to 2

m after compensation. The results show that the vibration error compensation method studied in this paper can efficiently reduce the vibration error of the positioning system and improve the positioning accuracy.

关键词

Keywords

references

林海波,杨国哲,黄小良. 大行程超精密工作台的研究[J]. 机械设计与制造,2010, 6(6):130-131. LIN H B, YANG G ZH, HUANG X L. Design of a large travel ultra precision stage[J]. Machinery Design & Manufacture, 2010, 6(6):130-131.

武志鹏,陈兴林,刘川. 光刻机工件台宏微系统的滑模变结构控制[J]. 光电工程,2011,38(9):50-54. WU ZH P, CHEN X L, LIU CH. Sliding mode control of macro-micro system for wafer stage of lithography[J]. Opto-Electronic Engineering,2011, 38(9):50-54.

TANG X,CHEN I M. A large-displacement 3-DOF flexure parallel mechanism with decoupled kinematics structure[C]//IEEE/RSJ International Conference on Intelligent Robots and Systems, Beijing,2006:1668-1673.

MAO J H, HIROYUKI T, AKIRA S. Precision positioning of a DC-motor-driven aerostatic slide system[J]. Precision Engineering, 2003, 27(1):32-41.

节德刚. 宏/微驱动高速高精度定位系统的研究[D].哈尔滨工业大学. 2006. JIE D G. Research of the High-speed/High-Precision Positioning System of Macro-Micro Driving[D]. Harbin Institute of Technology, 2006.

节德刚,刘延杰,孙立宁,等. 一种宏微双驱动精密定位机构的建模与控制[J]. 光学精密工程, 2005, 13(2):171-178. JIE D G, LIU Y J, SUN L N, et al.. Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism[J]. Opt. Precision Eng., 2005, 13(2):171-178.

FERRERIRA P M, LIU C R. A Method for estimating and compensating quasistaric error of machinetools[J]. Journal of Engineering for Industry, 1993, 115(1):149-159.

VELDHUIS S C, ELBESTAWI M A. A Strategy for compensation of errors in five-axis machining[J]. Annals for CIRP, 1995, 44(1):373-377.

孙麟治,李鸣鸣,程维明. 精密定位技术研究[J]. 光学精密工程, 2005, 13(增):69-75. SUN L ZH, LI M M, CHEN W M. Study on precision positioning technique[J]. Opt. Precision Eng., 2005, 13(Appl):69-75.

刘强,张从鹏. 直线电机驱动的H型气浮导轨运动平台[J]. 光学精密工程, 2007, 15(10):1540-1546. LIU Q, ZHANG C P. H-type air-bearing motion stage driven by liner motors[J].Opt. Precision Eng., 2007, 15(10):1540-1546.

杨洪涛,刘勇,费业泰,等. 三坐标测量机气浮导轨引起的动态误差[J]. 沈阳工业大学学报, 2011,33(1):74-78. YANG H T, LIU Y, FEI Y T, et al.. Dynamic errors generated by air-bearing guide of coordinate measuring machine[J]. Journal of Shenyang University of Technology, 2011, 33(1):74-78.

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