指数型变幅杆螺旋驱动直线压电作动器

李加林; 华顺明; 李志强; 孟玉明; 楼应侯

doi:10.3788/OPE.20152313.0335

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指数型变幅杆螺旋驱动直线压电作动器

更新时间：2020-08-13

- 指数型变幅杆螺旋驱动直线压电作动器
- Spiral-driving linear piezoelectric actuator based on exponential amplitude transformer
- 光学精密工程 2015年23卷第10z期页码：335-341
- 作者机构：
  
  1. 太原科技大学机械工程学院,山西太原,030024
  2. 浙江大学宁波理工学院,浙江宁波,315100
- 作者简介：
- 基金信息：
  
  国家自然科学基金(No.51275467)();浙江省自然科学基金(No.LY16E05009)()
- DOI：10.3788/OPE.20152313.0335
  中图分类号： TM384
- 收稿日期：2015-05-15，
  
  修回日期：2015-06-10，
  
  纸质出版日期：2015-11-14
- 稿件说明：
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李加林, 华顺明, 李志强等. 指数型变幅杆螺旋驱动直线压电作动器[J]. 光学精密工程, 2015,23(10z): 335-341

LI Jia-lin, HUA Shun-ming, LI Zhi-qiang etc. Spiral-driving linear piezoelectric actuator based on exponential amplitude transformer[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 335-341
李加林, 华顺明, 李志强等. 指数型变幅杆螺旋驱动直线压电作动器[J]. 光学精密工程, 2015,23(10z): 335-341 DOI： 10.3788/OPE.20152313.0335.

LI Jia-lin, HUA Shun-ming, LI Zhi-qiang etc. Spiral-driving linear piezoelectric actuator based on exponential amplitude transformer[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 335-341 DOI： 10.3788/OPE.20152313.0335.

摘要

为实现微小型机电系统中驱动单元的小型化

设计了一种采用指数型变幅杆放大定子振幅的螺杆式直线压电作动器。分析了作动器运行机理

设计了作动器定子基体内螺纹副和变幅杆。然后

利用有限元软件仿真分析了定子基体的振动模态。最后

确定了作动器尺寸并加工出样机;搭建实验平台

对作动器样机的机械性能进行了测试。测试结果显示

在电压有效值为300 V

激励频率为15.6 kHz

两相激励电压之间的相位差为

/2时

作动器输出直线速度最大值达到3.392 mm/s

最大输出力达到15.02 N。得到的结果表明:作动器具有良好的输出性能

具备了作为微小型机电系统直接驱动单元的能力

可满足微小型设备微量进给的要求。

Abstract

To miniaturize the driving unit in a micro-electro-mechanical system

a spiral-driving linear piezoelectric actuator based on an exponential amplitude transformer was designed. the operation mechanism of the actuator was analyzed

and the screw pairs of stator and the exponential amplitude transformer were designed. Then

the stator vibration modes were analyzed by finite element software in simulation. At last

the dimension of actuator was determined

the prototype was made

an experimental platform was established and the actuator output performance was tested. Under the conditions of an effective voltage of 300 V

resonant frequency of 15.6 kHz

the phase difference between two driving voltages of

the actuator reaches a maximum linear velocity of 3.392 mm/s

and the output force of 15.02 N. The test results indicate that the actuator has a good output performance

and it can be employed in MEMS driving unit to meet the demands of subminiature equipment for the micro feed.

关键词

Keywords

references

赵淳生,朱华. 超声电机技术的发展和应用[J]. 机械制造与自动化, 2008,37(3):1-9. ZHAO CH SH,ZHU H. Development and application of ultrasonic motors technologies[J]. Machine Building Automation, 2008, 37(3):1~9.(in Chinese)

李晓牛,周盛强. 光阑用螺纹式超声电机[J]. 光学精密工程,2014,22(8):2081-2087. LI X N,ZHOU SH Q. Ultrasonic motor connected by screw for aperture[J]. Opt. Precision Eng., 2014, 22(8):2081~2087.(in Chinese)

ZHAO C S. Ultrasonic motors Technologies and Applications[M]. Beijing:Science press, 2011.

ZAIFRANI S, PELED G, ESHED G, et al.. Controllably coupled piezoelectric motors:US, 20090225388 A1[P].2009-9-10.

XU Q, HENDERSON D, PIAZZA D, et al.. Reduced-voltage linear motor systems and methods thereof:US, 20100039715 A1[P]. 2010-2-18.

朱华,曹如意,菅磊. 应用于干涉显微镜的直线压电作动器[J]. 光学精密工程,2013,21(6):1524-1530. ZHU H, CAO R Y, JIAN L. Linear piezoelectric actuator applied to interference microscope[J]. Opt. Precision Eng., 2013, 21(6):1524-1530.(in Chinese)

张健滔,李朝东. 三棱柱形直线超声电机[J]. 中国电机工程学报, 2014,34(36):6493-6498. ZHANG J T, LI C D. A Triangular prism shaped linear ultrasonic motor[J]. Proceedings of the CSEE, 2014, 34(36):6493-6498.(in Chinese)

马立,肖金涛,周莎莎,等. 杠杆式尺蠖压电直线驱动器[J]. 光学精密工程,2015,23(1):184-190. MA L, XIAO J T, ZHOU SH SH, et al.. Linear lever-type piezoelectric inchworm actuator[J]. Proceedings of the CSEE, 2015, 23(1):184-190.(in Chinese)

潘松,张建辉,黄卫清,等. 蝶形直线电机的模糊Takagi-Sugeno鲁棒控制[J]. 光学精密工程,2014,22(10):2667-2673. PAN S, ZHANG J H, HUANG W Q, et al.. Robust control of butterfly-shaped linear ultrasonic motor based on Takagi-Sugeno fuzzy systems[J]. Proceedings of the CSEE, 2014, 22(10):2667-2673.(in Chinese)

曾劲松,郭长亮. 四足直线超声电机模态频率一致性调节[J]. 振动、测试与诊断,2013,33(5):770-774. ZENG J S, GUO CH L. Coincidence adjustment of modal frequencies for four-legged linear ultrasonic motor[J]. Journal of Vibration, Measurement &Diagnosis, 2013, 33(5):770-774.(in Chinese)

羊全钢,张凯,周铁英. 弯曲旋转超声电机接触界面锥形角的分析与实验[J]. 声学学报, 2002,27(5):413-419. YANG Q G, ZHANG K, ZHOU T Y. Analysis and experiment on the taper angle of contact surface of bend rotation ultrasonic micrometers[J]. Acta Acustica, 2002, 27(5):413-419.(in Chinese)

董迎晖,顾雅春,汤开元,等. 采用弯曲振动模态的弹簧定子超声电机[J]. 振动、测试与诊断, 2013,33(2):13-16. DONG Y H, GU Y C, TANG K Y, et al.. Research on a new type ultrasonic motor with a helical stator using bending vibration modes[J]. Journal of Vibration Measurement & Diagnosis,2013, 33(2):13-16.(in Chinese)

张云电. 超声加工及其应用[M]. 北京:国防工业出版社,1995. ZHANG Y D.Ultrasonic machining and its application[M]. Beijing:National Defense Industry Press, 1995.(in Chinese)

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