液滴微喷射与液体模塑法制备柔性微凹透镜阵列

朱晓阳; 朱丽; 杨利军; 陈荷娟; 章维一; 王洪成

doi:10.3788/OPE.20152313.0367

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液滴微喷射与液体模塑法制备柔性微凹透镜阵列

更新时间：2020-08-13

- 液滴微喷射与液体模塑法制备柔性微凹透镜阵列
- Preparation of flexible concave microlens array based on micro-jetting and liquid molding method
- 光学精密工程 2015年23卷第10z期页码：367-373
- 作者机构：
  
  1. 南京理工大学机械工程学院,江苏南京,中国,210094
  2. 南京航空航天大学仿生结构与材料防护研究所,江苏南京,210016
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51175268)();江苏省博士后科研基金资助项目(No.1402006B)();中国博士后科学基金资助项目(No.2014M5515
- DOI：10.3788/OPE.20152313.0367
  中图分类号： TP69;TH703
- 收稿日期：2015-04-15，
  
  修回日期：2015-05-10，
  
  纸质出版日期：2015-11-14
- 稿件说明：
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朱晓阳, 朱丽, 杨利军等. 液滴微喷射与液体模塑法制备柔性微凹透镜阵列[J]. 光学精密工程, 2015,23(10z): 367-373

ZHU Xiao-yang, ZHU Li, Yang Li-jun etc. Preparation of flexible concave microlens array based on micro-jetting and liquid molding method[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 367-373
朱晓阳, 朱丽, 杨利军等. 液滴微喷射与液体模塑法制备柔性微凹透镜阵列[J]. 光学精密工程, 2015,23(10z): 367-373 DOI： 10.3788/OPE.20152313.0367.

ZHU Xiao-yang, ZHU Li, Yang Li-jun etc. Preparation of flexible concave microlens array based on micro-jetting and liquid molding method[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 367-373 DOI： 10.3788/OPE.20152313.0367.

摘要

采用液滴微喷射技术与液体模塑法实验研究了微凹透镜阵列的制备。采用微液滴阵列制备实验系统

以甘油水溶液为喷射材料

将其按需喷射到镀有TiO

纳米粒子的亲水化薄膜玻璃基片上

在界面张力和亲水化效应的作用下

形成Wenzel润湿状态下的平凸状微液滴;然后用液体模塑法将微液滴阵列复制到柔性聚二甲基硅氧烷(PDMS)材料上。实验显示:制得的微液滴阵列具有较好的一致性及整齐度

复制得到的微凹透镜阵列在光学显微镜及扫描电子显微镜下均具有较好的几何特性。研究并分析了浇铸PDMS液体对在Young亲水状态及Wenzel亲水状态下的微液滴阵列的形状及位置的影响

结果显示在Wenzel亲水状态下的微液滴保持了良好的形状及位置。对制得的微凹透镜阵列进行了简单的成像实验

获得了良好的成像效果。从实验过程和结果可以看出

采用液滴微喷射技术及液体模塑法制备微凹透镜阵列具有过程简单、成本低廉、对制备环境要求低等优点;制备的微凹透镜阵列几何与光学性能优良。

Abstract

The the flexible concave microlen array was fabricated based on the micro-droplet jetting and liquid molding methods. By using jetting fabrication system of micro-droplet array

the glycerin solution was jetted on the glass substrate coated with the hydrophilic film treated by TiO

nanoparticles

and a micro-liquid array under the Wenzel state was formed on the glass substrate due to surface tension and hydrophilic effect. Then

the flexible concave was obtained by a liquid molding process using the polydimethylsiloxane(PDMS). The result shows that the micro-droplets are highly homogeneous and are well aligned. The final fabricated concave microlen arrays still have good geometric characteristic. The influences of the PDMS mixed liquid casting process on the Wenzel state micro-droplet and Young state micro-drolet were studied and the result shows that the micro-droplet under the Wenzel state keeps an original shape after the mixed PDMS liquid was casted on them. Through the projection image experiment of the concave microlens array

the clear

erected

shrunken and virtual image of the concave micro-lens array was obtained. The experimental process and result indicate that the jetting fabrication of the concave micro-lens array using the micro-droplet jetting technology and liquid molding method has many advantages

such as the simple fabrication process

low cost

low environmental requirements and the final fabricated PDMS concave micro-lens has good geometry and optical performance.

关键词

Keywords

references

CHEN F, LIU H, YANG Q, et al.. Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method[J]. Optics Express, 2010, 18(19):20334-20343.

LI X, DING Y, SHAO J, et al.. Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes[J]. Advanced Materials, 2012, 24(23):165-169.

张新宇,汤庆乐,张智,等. 凹折射微透镜阵列的离子束刻蚀制作[J]. 光学学报, 2001,21(4):485-490. ZHANG X Y, TANG Q L, ZHANG Z, et al.. Concave refractive microlens arrays fabricated by ion beam etching[J]. Acta Optica Sinica, 2001, 21(4):485-490.(in Chinese)

LI F, CHEN S H, LUO H, et al.. Fabrication and characterization of polydimethylsiloxane concave microlens array[J]. Optics & Laser Technology, 2012, 44(4):1054-1059.

ODER T N, SHAKYA J, LIN J Y, et al.. Nitride microlens arrays for blue and ultraviolet wavelength applications[J]. Applied Physics Letters, 2003, 82(21):3692-3694.

YUAN X C, YU W, NGO N, et al.. Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam sensitive gray-scale mask[J]. Optics Express, 2002, 10(7):303-308.

HE M, YUAN X C, NGO N Q, et al.. Single-step fabrication of a microlens array in sol-gel material by direct laser writing and its application in optical coupling[J]. Journal of Optics A:Pure and Applied Optics, 2004, 6(1):94.

何苗, 刘鲁勤. 大 F 数硅微透镜阵列的制作及光学性能测试研究[J]. 中国激光, 2000, 27(12):1097-1102. HE M, LIU L Q. Research on fabrication and optical performance testing of silicon microlenses array with large F/number[J]. Cninese Journal of Lasers, 2000, 27(12):1097-1102.(in Chinese)

ONG N S, KOH Y H, FU Y Q. Microlens array produced using hot embossing process[J]. Microelectronic Engineering, 2002, 60(3):365-379.

CROUTXE-BARGHORN C, SOPPERA O, LOUGNOT D J. Fabrication of microlenses by direct photo-induced crosslinking polymerization[J]. Applied Surface Science, 2000, 168(1):89-91.

KIM J Y, PFEIFFER K, VOIGT A, et al.. Directly fabricated multi-scale microlens arrays on a hydrophobic flat surface by a simple ink-jet printing technique[J]. Journal of Materials Chemistry, 2012, 22(7):3053-3058.

O'NEILL F T, SHERIDAN J T. Photoresist reflow method of microlens production Part I:Background and experiments[J]. Optik-International Journal for Light and Electron Optics, 2002, 113(9):391-404.

VOIGT A, OSTRZINSKI U, PFEIFFER K, et al.. New inks for the direct drop-on-demand fabrication of polymer lenses[J]. Microelectronic Engineering, 2011, 88(8):2174-2179.

ZHU X Y, ZHU L, CHEN H J, et al.. Fabrication of multi-scale micro-lens arrays on hydrophobic surfaces using a drop-on-demand droplet generator[J]. Optics & Laser Technology, 2015; 66:156-165.

LIU X, WANG Q, QIN J, et al.. A facile "liquid-molding" method to fabricate PDMS microdevices with 3-dimensional channel topography. Lab Chip, 2009; 9(9):1200-1205.

王洪成,侯丽雅,章维一,等. 驱动电压波形修圆对微流体脉冲惯性力和驱动效果的影响[J]. 光学精密工程,2012,20(10):2251-2259. WANG H CH, HOU L Y, ZHANG W Y, et al..Influence of rounded driving voltage waves on micro-fluidic pulse inertial force and driving effects[J]. Opt. Precision Eng., 2012, 20(10):2251-2259.(in Chinese)

朱晓阳, 侯丽雅, 郑悦, 等. 微流体数字化技术制备聚合物微透镜阵列[J]. 光学精密工程, 2014, 22(2). ZHU X Y, HOU L, ZHENG Y, et al.. Fabrication of polymer micro-lens array by micro-fluid digitalization[J]. Opt. Precision Eng., 2014, 22(2):360-368.(in Chinese)

杨眉,朱丽,侯丽雅,等. 数字化微喷射用玻璃基组合微喷嘴设计及应用[J]. 光学精密工程,2012,20(7):1580-1586. YANG M, ZHU L, HOU L Y, et al..Design and experi-ment of vitreous combined micronozzles used in digital micro injection[J]. Opt. Precision Eng., 2012, 20(7):1580-1586.(in Chinese)

ZHU X Y, ZHU L, CHEN H J, et al.. Fabrication of high numerical aperture micro-lens array based on drop-on-demand generating of water-based molds[J]. Optics & Laser Technology, 2015, 68:23-27.

李小兵, 刘莹. 固体表面润湿性机理及模型[J]. 功能材料, 2008, 38(A10):3919-3924. LI X B, LIU Y. Wetting mechanisms and models on solid surfaces[J]. Journal of functional material., 2008, 38(A10):3919-3924.(in Chinese)

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