超精密切削机床机电系统设计及其Fresnel透镜模具切削实验

李朝将; 高兴; 李勇; Duong Cam Vinh

doi:10.3788/OPE.20152313.0410

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超精密切削机床机电系统设计及其Fresnel透镜模具切削实验

更新时间：2020-08-13

- 超精密切削机床机电系统设计及其Fresnel透镜模具切削实验
- Electromechanical system in ultra-precision cutting machine tool and its application in processing of Fresnel lens mold
- 光学精密工程 2015年23卷第10z期页码：410-416
- 作者机构：
  
  清华大学机械工程系精密超精密制造装备及控制北京市重点实验室/摩擦学国家重点实验室北京,100084
- 作者简介：
- 基金信息：
  
  北京市自然科学基金重点资助项目(No.3131003)();摩擦学国家重点实验室自主研究课题资助项目(No.SKLT2013C01()
- DOI：10.3788/OPE.20152313.0410
  中图分类号： TG502;TG506.1
- 收稿日期：2015-04-03，
  
  修回日期：2015-05-12，
  
  纸质出版日期：2015-11-14
- 稿件说明：
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李朝将, 高兴, 李勇等. 超精密切削机床机电系统设计及其Fresnel透镜模具切削实验[J]. 光学精密工程, 2015,23(10z): 410-416

LI Chao-jiang, GAO Xing, LI Yong etc. Electromechanical system in ultra-precision cutting machine tool and its application in processing of Fresnel lens mold[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 410-416
李朝将, 高兴, 李勇等. 超精密切削机床机电系统设计及其Fresnel透镜模具切削实验[J]. 光学精密工程, 2015,23(10z): 410-416 DOI： 10.3788/OPE.20152313.0410.

LI Chao-jiang, GAO Xing, LI Yong etc. Electromechanical system in ultra-precision cutting machine tool and its application in processing of Fresnel lens mold[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 410-416 DOI： 10.3788/OPE.20152313.0410.

摘要

为了加工微小沟槽的菲涅尔透镜模具

设计了配置B转台的超精密切削机床机电系统并研究了相关工艺。介绍了机床机构模块

设计了驱动及反馈环节。采用直线电机直接驱动的方式

将Heidenhain纳米级分辨率光栅信号通过驱动器细分后

反馈给数控系统

构成全闭环控制。设计了超精密切削机床数控系统

该系统采用开放式全软件型PA数控系统。机床两直线轴组装后导轨直线度达到0.15

m/200 mm

B转台角位移分辨率达到0.036"

定位精度为3"。在机床上进行了直径280 mm平面、100 mm半球面、高次曲面切削实验。利用机床的B轴旋转功能

开发了菲涅尔透镜模具B轴旋转加工方法。加工后平面试件的表面粗糙度

可达5 nm

菲涅尔透镜模具的表面粗糙度

为7.3 nm。实验验证了基于高精度B轴旋转加工菲涅尔透镜模具的工艺可行性。

Abstract

For processing micro groove Fresnel lens mold

the cutting technology and electromechanical system of an ultra precision cutting machine tool with a B rotary axis were designed. Mechanical modules of the machine tool were presented

and a motor drive and an encoder feedback system were designed. By applying linear motor direct drive

the Heidaenhain nano-scale linear encoder signal subdivided by the motor driver was used for closed-loop feedback. Electric control system of the ultra precision cutting machine tool was designed

of which the NC system was open whole soft type PA NC. The straightness error of a guide is 0.15

m/200 m. For the B rotary axis

its positioning accuracy is 3"

and the rotary displacement resolution is 0.036". In the cutting experiments

flat surface(

280 mm)

semi-sphere(

100 mm)

complex curved surface was machined. And the Fresnel lens mold was processed by the method of rotary B-axis. The experiments show that the surface roughness

of flat surface is 5 nm

and the surface roughness

of Fresnel lens mold is 7.3 nm. The results show that it is feasible that the process technology of Fresnel lens mold is based on the high precision rotary B-axis.

关键词

Keywords

references

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