石英玻璃的热辅助高效塑性域干磨削

王伟; 姚鹏; 王军; 黄传真; 朱洪涛

doi:10.3788/OPE.20162401.0083

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石英玻璃的热辅助高效塑性域干磨削

微纳技术与精密机械 | 更新时间：2020-08-13

- 石英玻璃的热辅助高效塑性域干磨削
- Heat-assisted high efficiency ductile dry grinding of fused silica
- 光学精密工程 2016年24卷第1期页码：83-93
- 作者机构：
  
  1. 山东大学机械工程学院先进射流工程技术研究中心, 山东济南 250061
  2. 高效洁净机械制造教育部重点实验室, 山东济南 250061
- 作者简介：
- 基金信息：
  
  国家自然科学基金青年基金资助项目(No.51305237)()
- DOI：10.3788/OPE.20162401.0083
  中图分类号： TQ171.731;TN305.2
- 收稿日期：2015-05-15，
  
  修回日期：2015-06-20，
  
  纸质出版日期：2016-01-25
- 稿件说明：
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王伟, 姚鹏, 王军等. 石英玻璃的热辅助高效塑性域干磨削[J]. 光学精密工程, 2016,24(1): 83-93

WANG Wei, YAO Peng, WANG Jun etc. Heat-assisted high efficiency ductile dry grinding of fused silica[J]. Editorial Office of Optics and Precision Engineering, 2016,24(1): 83-93
王伟, 姚鹏, 王军等. 石英玻璃的热辅助高效塑性域干磨削[J]. 光学精密工程, 2016,24(1): 83-93 DOI： 10.3788/OPE.20162401.0083.

WANG Wei, YAO Peng, WANG Jun etc. Heat-assisted high efficiency ductile dry grinding of fused silica[J]. Editorial Office of Optics and Precision Engineering, 2016,24(1): 83-93 DOI： 10.3788/OPE.20162401.0083.

摘要

为了提高大口径石英玻璃光学元件的加工效率

提出了热辅助塑性域超精密磨削石英玻璃的新方法。分析了石英玻璃的热辅助塑性域磨削机理

通过理论推导得出磨削深度对磨削区表面最高温升的影响规律。采用陶瓷结合剂立方氮化硼(CBN)砂轮对石英玻璃进行干磨削

利用磨削热改善磨削区石英玻璃的力学性能

实现了石英玻璃的高效塑性域磨削。通过磨削实验研究了不同磨削深度对石英玻璃表面粗糙度(

)和亚表面损伤深度的影响。实验结果表明

随着磨削深度的增加

和亚表面损伤深度反而降低。当磨削深度为5 m

大于粗磨表面的裂纹深度时

获得了

值为0.07 m的光滑无裂纹的塑性域磨削表面。通过扫描电镜观察研究了砂轮的磨损机理

结果显示陶瓷结合剂CBN砂轮塑性域干磨削石英玻璃时

砂轮以磨耗磨损为主

该结果为研究新型的陶瓷结合剂CBN砂轮提供了依据。

Abstract

To improve the machining efficiency of fused silica optical elements with large diameters

this paper presents a method for heat-assisted ductile ultra-precision grinding of the fused silica. The mechanism of heat-assisted ductile grinding for the fused silica was analyzed

and the effect of different grinding depths on the highest temperature rise on the surface of the grinding zone was investigated by theoretical inference. The fused silica was ground in dry method by a high temperature resistant ceramic bond Cubic Boron Nitride(CBN) wheel and the high efficiency ductile grinding of fused silica was realized by using grinding heat to improve the mechanical properties of fused silica in the grinding zone. Through the grinding experiment

the effect of different grinding depths on the surface roughness(

) and sub-surface damage depth of fused silica was investigated. The experiment results show that the

and sub-surface damage depth are reduced with the increase of grinding depth. When the grinding depth is greater than the crack depth(5 m) by coarse grinding

smooth and no crack surface of ductile grinding with the

0.07 m can be achieved. The mechanism of wheel wear was studied by a scanning electron microscope. The results show that the wear mechanism of ceramic bond CBN wheel ductile grinding of the fused silica is grain flatted

which provides the basis for researching a new type of ceramic bond CBN grinding wheel for dry grinding of the fused silica.

关键词

Keywords

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