用于多传感器坐标测量机探测误差评价的薄环规标准器

位恒政; 王为农; 裴丽梅; 郑庆国

doi:10.3788/OPE.20162403.0521

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用于多传感器坐标测量机探测误差评价的薄环规标准器

现代应用光学 | 更新时间：2020-08-13

- 用于多传感器坐标测量机探测误差评价的薄环规标准器
- Thin ring gauge artifact for probing error evaluation of multi-sensor coordinate measuring machine
- 光学精密工程 2016年24卷第3期页码：521-525
- 作者机构：
  
  中国计量科学研究院北京,100013
- 作者简介：
- 基金信息：
  
  中国计量科学研究院基本科研业务费专项资金资助项目(No.24-YZC1401)()
- DOI：10.3788/OPE.20162403.0521
  中图分类号： TH72;TH701
- 收稿日期：2015-09-02，
  
  修回日期：2015-11-02，
  
  纸质出版日期：2016-03-25
- 稿件说明：
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位恒政, 王为农, 裴丽梅等. 用于多传感器坐标测量机探测误差评价的薄环规标准器[J]. 光学精密工程, 2016,24(3): 521-525

WEI Heng-zheng*, WANG Wei-nong, PEI Li-mei etc. Thin ring gauge artifact for probing error evaluation of multi-sensor coordinate measuring machine[J]. Editorial Office of Optics and Precision Engineering, 2016,24(3): 521-525
位恒政, 王为农, 裴丽梅等. 用于多传感器坐标测量机探测误差评价的薄环规标准器[J]. 光学精密工程, 2016,24(3): 521-525 DOI： 10.3788/OPE.20162403.0521.

WEI Heng-zheng*, WANG Wei-nong, PEI Li-mei etc. Thin ring gauge artifact for probing error evaluation of multi-sensor coordinate measuring machine[J]. Editorial Office of Optics and Precision Engineering, 2016,24(3): 521-525 DOI： 10.3788/OPE.20162403.0521.

摘要

设计了一种薄环规标准器

用于配有光学影像测头和接触式测头的多传感器坐标测量机的探测误差评价。该标准器兼有环规和二维平面标准圆的特征

孔的有效部分厚度为0.1 mm

圆度为0.5μm

可以满足大多数坐标测量机的校准需求

避免了普通标准器如标准球、环规对影像测头测量成像的影响。该标准器同时适用于接触式测头测量

锥孔结构保证了标准器的稳定性

用于接触式测量时

不会引起变形。利用设计的薄环规标准器实现了配有光学影像测头和接触式测头组合测量系统的探测误差评价

结果表明该标准器有效解决了上述组合系统探测误差的校准问题。参照ISO10360-9标准

给出了多传感器组合测量系统的探测误差、尺寸测量误差以及位置误差

并利用坐标变换方法修正了位置误差

优化了系统参数。

Abstract

A thin ring gauge artifact is designed to evaluate the probing errors of a multi-sensor Coordinate Measuring Machine(CMM) equipped with an imaging probe and a touch probe. This artifact is defined with a sharp edged hole in a metal plate. It has the features of both 2D circle and 3D ring gauge

the effective height of the hole is only 0.1 mm and the roundness is 0.5μm. It is suitable to measure the touch probe as well as imaging probe. As the height effect of the hole for the imaging probe is eliminated

the artifact also could be used in the touching measurement. Moreover

the designed cone structure ensures the stability of the artifact

so the deformation could not be happened when it is used in the touching measurement. The artifact is used in the evaluation of the probing errors of a combinend probing system equipped with the imaging probe and the touch probe

and the results show that the artifact has implemented the calibration of the probing errors. Finally

according to ISO 10360-9

parameters including combined size error

form error and location error are calculated and the method based on coordinate transform is applied to correction of location errors and optimization of systematic parameters.

关键词

Keywords

references

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