玻璃浆料键合中的孔洞抑制和微复合调控

刘益芳; 王凌云; 孙道恒; 郑建毅

doi:10.3788/OPE.20162404.0780

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玻璃浆料键合中的孔洞抑制和微复合调控

微纳技术与精密机械 | 更新时间：2020-08-13

- 玻璃浆料键合中的孔洞抑制和微复合调控
- Void suppression and micro composite regulation in glass frit bonding
- 光学精密工程 2016年24卷第4期页码：780-787
- 作者机构：
  
  厦门大学航空航天学院,福建厦门,361005
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61404111)();航空科学基金资助项目(No.20130868002)();中央高校基本科研业务费专项资金资助项目(No.2072
- DOI：10.3788/OPE.20162404.0780
  中图分类号： TB756
- 收稿日期：2015-11-12，
  
  修回日期：2015-12-20，
  
  纸质出版日期：2016-04-25
- 稿件说明：
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刘益芳, 王凌云, 孙道恒等. 玻璃浆料键合中的孔洞抑制和微复合调控[J]. 光学精密工程, 2016,24(4): 780-787

LIU Yi-fang, WANG Ling-yun, SUN Dao-heng etc. Void suppression and micro composite regulation in glass frit bonding[J]. Editorial Office of Optics and Precision Engineering, 2016,24(4): 780-787
刘益芳, 王凌云, 孙道恒等. 玻璃浆料键合中的孔洞抑制和微复合调控[J]. 光学精密工程, 2016,24(4): 780-787 DOI： 10.3788/OPE.20162404.0780.

LIU Yi-fang, WANG Ling-yun, SUN Dao-heng etc. Void suppression and micro composite regulation in glass frit bonding[J]. Editorial Office of Optics and Precision Engineering, 2016,24(4): 780-787 DOI： 10.3788/OPE.20162404.0780.

摘要

提出了包含三步式排泡过程的预烧结工艺以及双凹凼-凸台的微复合键合结构方案

以便有效控制玻璃浆料层中的孔洞生成并精确控制键合间隙。预烧结工艺涉及的三步式排泡包含玻璃液形成、真空排泡与孔洞流平3个过程

该过程有效地排除了气泡

从而抑制了键合中间层中的孔洞形成

其工艺的重复性和鲁棒性很强。微复合键合结构中的内外凹凼用于有效控制多余的熔融的玻璃浆料的流动路径

避免其对封装结构的污染;微阻挡凸台则可以精确地将玻璃浆料层的厚度即键合间隙控制到凸台高度。对键合性能的测试表明

该方案简单有效

键合强度和气密性良好

键合间隙为10.1μm

键合强度为19.07 MPa

键合漏率小于5×10

-9

Pa·m

/s。

Abstract

An innovated pre-sintering process including three-step bubble removing procedure and a micro composite bonding structure containing two micro grooves and one micro block bulge were investigated to effectively suppress the formation of voids in a glass frit layer and to precisely control the bonding gap. The three-step bubble removing procedure includes glass liquid forming

bubble removal in vacuum and void filling-up in air

which effectively removes the bubbles and suppress the generation of micro voids in the intermediate bonding layer. The innovated pre-sintering process shows good repeatability and robustness. The inside and outside micro grooves of the micro composite bonding structure were designed to effectively control the flowing path of the redundant molten glass frit to prevent the sealed micro structure from being polluted. And the micro block bulge was invented to make the thickness of the glass frit be precisely equal to the height of the bulge. The bonding performance testing result shows that the scheme is simple and feasible. Both bonding strength and hermeticity are good. The bonding gap is controlled to be 10.1 μm

the bonding strength is 19.07 MPa

and the leak rate is less than 5×10

-9

Pa·m

/s.

关键词

Keywords

references

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