具有耦合补偿功能的大行程二维柔性平台

闫鹏; 张立龙; 刘鹏博

doi:10.3788/OPE.20162404.0804

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具有耦合补偿功能的大行程二维柔性平台

微纳技术与精密机械 | 更新时间：2020-08-13

- 具有耦合补偿功能的大行程二维柔性平台
- Flexure-based XY micro-positioning stage with large stroke and coupling compensation
- 光学精密工程 2016年24卷第4期页码：804-811
- 作者机构：
  
  1. 北京航空航天大学自动化科学与电气工程学院北京,100191
  2. 山东大学机械工程学院高效洁净机械制造教育部重点实验室,山东济南,250061
- 作者简介：
  
  [ "闫鹏(1975-),男,山东济南人,教授,博士生导师,中组部\"青年QR计划\"入选者,1997年于东南大学获学士学位,1999年于东南大学获硕士学位,2003年于美国俄亥俄州立大学获博士学位(PhD),目前主要从事超精密机电一体化系统的设计分析和伺服控制技术,E-mail:pengyan2007@gmail.com" ]
  [ "张立龙(1990-),男,山东济宁人,硕士,2014年于山东大学获学士学位,主要从事面向纳米压印设备的微纳操控系统方面的研究。E-mail:1186157645@qq.com" ]
  [ "刘鹏博(1990-),男,山东肥城人,博士研究生,2012年于中国海洋大学获学士学位,主要从事微纳操控柔性机构方面的研究。E-mail:pengbosdu@163.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(No.61327003)();山东大学基本科研业务费专项资金资助项目(No.2015JC034).()
- DOI：10.3788/OPE.20162404.0804
  中图分类号： TH703;TP273
- 收稿日期：2015-11-20，
  
  修回日期：2015-12-17，
  
  纸质出版日期：2016-04-25
- 稿件说明：
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闫鹏, 张立龙, 刘鹏博. 具有耦合补偿功能的大行程二维柔性平台[J]. 光学精密工程, 2016,24(4): 804-811

YAN Peng, ZHANG Li-long, LIU Peng-bo. Flexure-based <i>XY</i> micro-positioning stage with large stroke and coupling compensation[J]. Editorial Office of Optics and Precision Engineering, 2016,24(4): 804-811
闫鹏, 张立龙, 刘鹏博. 具有耦合补偿功能的大行程二维柔性平台[J]. 光学精密工程, 2016,24(4): 804-811 DOI： 10.3788/OPE.20162404.0804.

YAN Peng, ZHANG Li-long, LIU Peng-bo. Flexure-based <i>XY</i> micro-positioning stage with large stroke and coupling compensation[J]. Editorial Office of Optics and Precision Engineering, 2016,24(4): 804-811 DOI： 10.3788/OPE.20162404.0804.

摘要

设计了一种基于双级复合平行板簧结构的大行程二维并联微位移平台

以解决二维柔性平台尺寸大、行程小

运动耦合误差大

运动性能受加工误差影响等问题。设计的微位移平台在每个运动方向均采用两个音圈电机同时驱动

通过调节两音圈电机信号比例来补偿加工误差造成的运动耦合误差

完成

X和Y方

向的运动解耦

从而降低系统对加工精度的依赖程度。根据卡氏第二定理建立了平台力学模型

优化了平台尺寸参数

并利用有限元仿真对设计的平台性能进行验证。最后

搭建了微位移定位系统实验平台。实验结果表明:设计的柔性平台行程与平台尺寸占比大

定位精度高

运动解耦性能得到大幅改善

实现了±2.25 mm×±2.27 mm工作行程

工作行程与平台尺寸占比约为1.73%

运动耦合误差小于0.27%。

Abstract

A two-dimensional parallel micro-displacement stage was designed based on double compound parallelogram flexures to solve the shortcomings of the stage in smaller motion strokes

larger coupling errors

and the motion performance sensitive to manufacturing errors. The designed micro-displacement stage was driven by two voice coil motors in each direction

the coupling motion errors caused by manufacturing errors were compensated by tuning the ratio of the signals imposed on the two drivers and the motion decouplings for

direction and

direction was implemented. By which

the dependence of the system on manufacturing errors was reduced. On the basis of the Castigliano's second theorem

a model of stage mechanism was established to optimize the size parameters of the stage

and the performance of the designed stage was verified by finite element analysis. Finally

an experimental platform for the micro-displacement position was established. The experimental results demonstrate that the designed stage has a bigger stage stroke

a bigger area ratio (workspace size to planar dimension of the stage)

higher position accuracy

and excellent decoupling performance. It shows a large motion range of ±2.25 mm×±2.27 mm

an area ratio of 1.73%

and the coupling error of less than 0.27%.

关键词

Keywords

references

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