压电驱动微点胶器的控制与实验

范增华; 荣伟彬; 王乐锋; 孙立宁

doi:10.3788/OPE.20162405.1042

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压电驱动微点胶器的控制与实验

微纳技术与精密机械 | 更新时间：2020-08-13

- 压电驱动微点胶器的控制与实验
- Control and experiment of micro-dispenser by piezoelectric drive
- 光学精密工程 2016年24卷第5期页码：1042-1049
- 作者机构：
  
  哈尔滨工业大学机器人技术与系统国家重点实验室,黑龙江哈尔滨,150080
- 作者简介：
- 基金信息：
  
  国家自然科学基金委员会创新研究群体科学基金项目支持(No.51521003)();机器人技术与系统国家重点实验室(哈尔滨工业大学)自主研究课题(No.SKLRSZ016
- DOI：10.3788/OPE.20162405.1042
  中图分类号： TN384
- 收稿日期：2016-01-08，
  
  修回日期：2016-03-10，
  
  网络出版日期：2016-03-30，
  
  纸质出版日期：2016-05-25
- 稿件说明：
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范增华, 荣伟彬, 王乐锋等. 压电驱动微点胶器的控制与实验[J]. 光学精密工程, 2016,24(5): 1042-1049

FAN Zeng-hua, RONG Wei-bin, WANG Le-feng etc. Control and experiment of micro-dispenser by piezoelectric drive[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1042-1049
范增华, 荣伟彬, 王乐锋等. 压电驱动微点胶器的控制与实验[J]. 光学精密工程, 2016,24(5): 1042-1049 DOI： 10.3788/OPE.20162405.1042.

FAN Zeng-hua, RONG Wei-bin, WANG Le-feng etc. Control and experiment of micro-dispenser by piezoelectric drive[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1042-1049 DOI： 10.3788/OPE.20162405.1042.

摘要

针对微型器件封装对非接触式微胶量的需求

研制了压电驱动微点胶器

利用压电陶瓷管挤压毛细管产生的瞬时变形实现了微胶滴的分配。分析了毛细管内的流体行为及液滴形成条件;基于多物理场耦合的方法

建立了压电微喷的三设备(压电陶瓷、毛细管、胶体)耦合模型。然后

讨论了驱动电压、喷嘴直径、胶体黏度对控制胶滴形成的影响。在构建的实验平台上

开展了控制胶滴形成的实验研究。分析了多控制参数(喷嘴直径、胶体黏度、电压幅值、脉冲宽度)的复合作用

通过匹配相应的参数实现了pL级微胶滴的非接触式分配。实验结果显示:使用黏度为30 mPas胶体

直径为10

m的喷嘴

在驱动电压幅值为50 V

脉冲宽度为37

s等参数配置下

可获得最小胶滴的体积为8.31 pL。实验结果验证了所提出方法和研制工具的有效性。

Abstract

For the requirement of micro components in bonding for non-contact micro-dispensing volumes

a piezoelectric micro-dispenser was designed and fabricated. The dispensing of micro-droplets was implemented by the instantaneous deformation from the extrusion between the capillary tube and the piezoelectric ceramic tube. The fluid behavior and droplet forming conditions in the capillary were analyzed

and a coupling model including a piezoelectric ceramic

a capillary and a fluid was established by using multidiscipline coupled-field analysis method. The influences of the driving voltage

nozzle diameter and the fluid viscosity on droplet formation were analyzed. An experiment to control the droplet formation was performed in an experimental platform. The compound actions of multiple parameters (nozzle diameter

fluid viscosity

voltage magnitude and pulse width) were discussed based on experiments. The non-contact micro-dispensing of the micro droplets with a size of pL level was achieved by matching the corresponding parameters. Experimental results indicate that the minimum droplet volume of 8.31 pL is obtained when the parameters are set by the fluid viscosity of 30 mPas

the nozzle diameter of 10

the voltage magnitude of 50V and the pulse width of 37

s. These results verify the feasibility of the proposed method and the fabricated micro-dispenser.

关键词

Keywords

references

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