常温下硅微谐振加速度计零偏稳定性的提高

严斌; 尹永刚; 董景新

doi:10.3788/OPE.20162405.1050

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常温下硅微谐振加速度计零偏稳定性的提高

微纳技术与精密机械 | 更新时间：2020-08-13

- 常温下硅微谐振加速度计零偏稳定性的提高
- Improvement of bias stability of micromechanical silicon resonant accelerometer at room temperature
- 光学精密工程 2016年24卷第5期页码：1050-1056
- 作者机构：
  
  清华大学精密仪器系精密测试技术及仪器国家重点实验室北京,100084
- 作者简介：
- 基金信息：
  
  总装备部十二五预研基金资助项目(No.20114113015)()
- DOI：10.3788/OPE.20162405.1050
  中图分类号： TH824.4
- 收稿日期：2015-12-11，
  
  修回日期：2016-01-15，
  
  纸质出版日期：2016-05-25
- 稿件说明：
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严斌, 尹永刚, 董景新. 常温下硅微谐振加速度计零偏稳定性的提高[J]. 光学精密工程, 2016,24(5): 1050-1056

YAN Bin, YIN Yong-gang, DONG Jing-xin. Improvement of bias stability of micromechanical silicon resonant accelerometer at room temperature[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1050-1056
严斌, 尹永刚, 董景新. 常温下硅微谐振加速度计零偏稳定性的提高[J]. 光学精密工程, 2016,24(5): 1050-1056 DOI： 10.3788/OPE.20162405.1050.

YAN Bin, YIN Yong-gang, DONG Jing-xin. Improvement of bias stability of micromechanical silicon resonant accelerometer at room temperature[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1050-1056 DOI： 10.3788/OPE.20162405.1050.

摘要

考虑环境温度会影响硅微谐振加速度计(MSRA)的测量精度

本文研究了谐振梁的频率漂移及抑制方法以便提高其在常温下的零偏稳定性。针对结构热膨胀导致的应力进行了建模仿真

并根据仿真结果优化设计了一种低热应力的双端固支梁的结构来降低热膨胀系数不匹配带来的频率漂移。实验测得新结构的单梁谐振频率的温度系数从典型结构的约30 Hz/℃降为-1.5 Hz/℃

与仿真结果-1.14 Hz/℃基本一致。为了进一步提高该加速度计的零偏稳定性

设计了一种高精度测温电路用来补偿温漂

该电路测温灵敏度为96.25 mV/℃

测量噪声约为0.0002℃。实验结果表明

采用优化后的结构结合线性温度补偿的方法

可使该硅微谐振加速度计的1 h零偏稳定性在常温下达到10

g以下

比改进前实验室获得的52

g水平提升了80%

满足了高精度加速度测量的要求。

Abstract

In consideration of the effect of ambient temperature on the precise measurement of a micromechanical silicon resonant accelerometer (MSRA)

the frequency drift of the resonant beam and suppression methods were analyzed to improve its zero-bias stability in the ambient temperature. The stress caused by structural thermal expansion was modeled and simulated and an improved structure with a lower thermal stress was designed and fabricated to reduce the frequency shift caused by non-matching of thermal expansion coefficients. The test experiments show that the temperature coefficient of resonant frequency of the single beam decreases from about 30 Hz/℃ to-1.5 Hz/℃

which is close to the simulated value of-1.14 Hz/℃. To further improve the bias stability of the MSRA

a precise temperature measurement circuit was designed to compensate the temperature shift

and the circuit shows its temperature sensitivity to be 96.25 mV/℃ and the noise to be 0.000 2℃. By proposed optimizing structure and linear temperature compensation method

the bias stability of the optimized MSRA is superior to 10

g within 1 h at the room temperature

which is 80% higher than previous level of our laboratory (52

g) and satisfies the requirements of high-precision acceleration measurement.

关键词

Keywords

references

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