利用体块PZT制备膜片式压电微泵

李以贵; 黄远; 颜平; 王欢; 杉山进

doi:10.3788/OPE.20162405.1072

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利用体块PZT制备膜片式压电微泵

微纳技术与精密机械 | 更新时间：2020-08-13

- 利用体块PZT制备膜片式压电微泵
- Fabrication of micro diaphragm piezoelectric pump by using bulk PZT
- 光学精密工程 2016年24卷第5期页码：1072-1079
- 作者机构：
  
  1. 上海应用技术大学理学院上海,201418
  2. 立命馆大学微系统系京都,日本,525-8577
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助课题(No.60777016)();上海联盟计划资助项目(No.LM201441)();上海应用技术学院重点学科项目(No.10210Q150005
- DOI：10.3788/OPE.20162405.1072
  中图分类号： TN384;TP271
- 收稿日期：2016-01-10，
  
  修回日期：2016-02-15，
  
  纸质出版日期：2016-05-25
- 稿件说明：
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李以贵, 黄远, 颜平等. 利用体块PZT制备膜片式压电微泵[J]. 光学精密工程, 2016,24(5): 1072-1079

LI Yi-gui, HUANG Yuan, YAN Ping etc. Fabrication of micro diaphragm piezoelectric pump by using bulk PZT[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1072-1079
李以贵, 黄远, 颜平等. 利用体块PZT制备膜片式压电微泵[J]. 光学精密工程, 2016,24(5): 1072-1079 DOI： 10.3788/OPE.20162405.1072.

LI Yi-gui, HUANG Yuan, YAN Ping etc. Fabrication of micro diaphragm piezoelectric pump by using bulk PZT[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1072-1079 DOI： 10.3788/OPE.20162405.1072.

摘要

利用锆钛酸铅(PZT)的逆压电效应

设计并制备了膜片式压电微泵。通过将电能转换为机械能

实现了液体的微流体控制。微泵由微驱动器与单向微阀两部分组成;微驱动器主要为液体流动提供驱动力

单向微阀则用于精确控制液体的流动方向。通过对PZT-Si膜片的位移量、位移形状的仿真分析

确定了微驱动器的设计尺寸

并估算其液体驱动性能。利用共晶键合工艺、研磨减薄工艺、硅深反应离子刻蚀工艺和准分子激光加工工艺等制备出了微驱动器和单向微阀。最后

设计了驱动测试实验

检测了微泵的液体驱动性能。测试结果表明:所制备的膜片式压电微泵驱动的谐振频率约为70 kHz

能驱动微米量级的液体位移或运动。当微泵驱动电压为30 V

p-p

、频率为600 Hz时

液体的驱动流速约为65

L/min。该微泵具有体积小

线性度好等特点。

Abstract

On the basis of the inverse piezoelectric effect of the PZT(Pb based Lanthanum doped Zirconate Titanate)

a micro diaphragm piezoelectric pump was designed and fabricated. By converting the electrical energy into mechanical energy

the microfluidic control of liquid was realized. The micro pump was consisted of two parts

a micro actuator and a micro check valve. The micro actuator was mainly used to provide a driving force for the liquid

and the micro check valve was taken to control the flow direction of the liquid precisely. With the simulation analysis of the displacement and shape of the PZT-Si diaphragm

the design size of micro actuator was determined and the driving liquid performance of the actuator was estimated. By using eutectic bonding

grinding thinning

ICP-RIE(Inductively Coupled Plasma-Reactive Ion Etching)

excimer laser processing and other micro fabrication processes

the micro actuator and the micro check valve were fabricated

respectively. A driven testing of the micro pump was carried out. The experimental results show that the resonance frequency is about 70 kHz

which can drive the displacement and movement of liquid with a micrometer volume. When the driving signal is 30 V

p-p

at the frequency of 600 Hz

the drive flow rate of liquid is about 65

L/min. The fabricated micro pump is characterized by a small volume and good linearity.

关键词

Keywords

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