压电陶瓷驱动器的迟滞特性

范伟; 林瑜阳; 李钟慎

doi:10.3788/OPE.20162405.1112

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压电陶瓷驱动器的迟滞特性

微纳技术与精密机械 | 更新时间：2020-08-13

- 压电陶瓷驱动器的迟滞特性
- Hysteresis characteristics of piezoelectric ceramic actuators
- 光学精密工程 2016年24卷第5期页码：1112-1117
- 作者机构：
  
  华侨大学机电及自动化学院,福建厦门,361021
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51475176)();2013年福建省自然科学基金资助项目(No.2013J05077)();中央高校基本科研业务费专项资金资助项目(
- DOI：10.3788/OPE.20162405.1112
  中图分类号： TN384
- 收稿日期：2016-01-20，
  
  修回日期：2016-02-20，
  
  纸质出版日期：2016-05-25
- 稿件说明：
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范伟, 林瑜阳, 李钟慎. 压电陶瓷驱动器的迟滞特性[J]. 光学精密工程, 2016,24(5): 1112-1117

FAN Wei, LIN Yu-yang, LI Zhong-shen. Hysteresis characteristics of piezoelectric ceramic actuators[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1112-1117
范伟, 林瑜阳, 李钟慎. 压电陶瓷驱动器的迟滞特性[J]. 光学精密工程, 2016,24(5): 1112-1117 DOI： 10.3788/OPE.20162405.1112.

FAN Wei, LIN Yu-yang, LI Zhong-shen. Hysteresis characteristics of piezoelectric ceramic actuators[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1112-1117 DOI： 10.3788/OPE.20162405.1112.

摘要

针对压电陶瓷固有的迟滞现象对其定位控制精度的影响

对迟滞进行了特征分析和实验验证。基于微观极化机理和机电耦合效应分析了迟滞的成因

分别对不同驱动行程

全行程不同位置和不同起始电压下的迟滞特性进行了对比实验。结果表明:对10 V行程的驱动

随着电压区间的递增

平均位移输出先增大后减小

平均迟滞误差从0.4193

m减小到0.1589

m;对100 V行程的驱动

随着起始电压的增大

平均位移输出从42.8825

m减小到25.92

平均迟滞误差从3.9993

m减小到1.6923

m;起始电压每增加15 V

位移输出减小5.6542

迟滞误差减小0.769

m。实验结果反映了电畴翻转状况对驱动过程机电耦合效率的影响

有效验证了电畴翻转理论。实验也表明:针对电畴翻转不同阶段所表现的的迟滞特征对压电陶瓷驱动器的迟滞误差进行补偿

可修正或减小迟滞误差带来的影响

为提高系统定位控制精度提供科学的参考依据。

Abstract

As the inherent hysteresis phenomena of a piezoelectric ceramic actuator affects its positioning accuracy badly

this paper analyzes and verifies the characteristics of the hysteresis phenomena. The causes of hysteresis were analyzed through microscopic polarization mechanism and electromechanical coupling effects.Some experiments were designed to compare the hysteresis characteristics under different travels

different positions of the whole travel and different initial voltages.The experimental results indicate that:for the driving travel of 10 V

the output of average displacement increases at first then decreases and the average hysteresis error decreases from 0.419 3

m to 0.158 9

m as the increases of voltage intervals; for the driving travel of 100 V

the output of average displacement decreases from 42.882 5

m to 25.92

m and the average hysteresis error decreases from 3.999 3

m to 1.692 3

m as the increases of initial voltages. Moreover

when the initial voltage increases by 15 V

the output of displacement decreases by 5.654 2

m on average

and the hysteresis error decreases by 0.769

m on average.These results reflect the influence of domain switching status in the initial phase on electromechanical coupling efficiency in the driving process and also verify the domain switching theory effectively. The experiments suggest that the compensation for hysteresis errors of the piezoelectric ceramic actuator according to the hysteresis characteristics of domain switching in different steps can correct or reduce the effects by hysteresis errors

and can provide scientific reference for improving the control accuracy of positing systems.

关键词

Keywords

references

RANGASAMY M.Nano technology:review[J].Journal of Applied Pharmaceutical Science,2011,1(2):8-16.

李伟,高思田,卢明臻,等. 计量型原子力显微镜的位移测量系统[J]. 光学精密工程,2012,20(4):796-802. LI W,GAO S T,LU M ZH,et al..Position measuring system in metrological atomic force microscope[J].Opt. Precision Eng.,2012,20(4):796-802.(in Chinese)

KOMMEPALLI H K R.Design,Modeling and Optimization of Piezoelectric Actuators[D].Commonwealth of Pennsylvania:The Pennsylvania State University,2010.

BAHRAMI A,TAFAOLI-MASOULE M,BAHRAMI M N.Active vibration control of piezoelectric stewart platform based on Fuzzy Control[J].International Journal of Material and Mechanical Engineering,2013,2(1):17-22.

QIN Y,TIAN Y,ZHANG D,et al..A novel direct inverse modeling approach for hysteresis compensation of piezoelectric actuator in feedforward applications[J].IEEE/ASME Transactions on Mechatronics,2013,18(3):981-989.

RAKOTONDRABE M.Bouc-Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators[J].IEEE Transactions on automation Science and Engineering,2011,8(2):428-431.

JUHASZ L,MAAS J,BOROVAC B.Parameter identification and hysteresis compensation of Embedded Piezoelectric stack actuators[J].Mechatronics,2011,21(1):329-338.

WANG X,REYSETT A,POMMIER-BUDINGER V,et al..A modified Preisach model and its inversion for hysteresis compensation in piezoelectric actuators[J].Multidiscipline Modeling in Materials & Structures(Emerald Group Publishing Limited),2014:122-142.

ZHOU M L,HE SH B,HU B,et al..Modified KP model for hysteresis of magnetic shape memory alloy actuator[J].IETE Technical Review,2015,32(1):29-36.

WANG D,YU P,WANG F F,et al..Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model[J].Sensors,2015,15(2):3409-3425.

曹荣,秦岚,夏含信,等. PID控制技术在压电陶瓷精密定位过程的应用[J]. 仪器仪表学报,2010,33(2):18-21. CAO R,QIN L,XIA H X,et al..The application of PID controlling technique in PZT precision positioning[J].Chinese Journal of Scientific Instrument,2010,33(2):18-21.(in Chinese)

陈辉,谭永红,周杏鹏,等. 压电陶瓷执行器的动态模型辨识与控制[J]. 光学精密工程,2012,20(1):88-95. CHEN H,TAN Y H,ZHOU X P,et al..Identification and control of dynamic modeling for piezoceramic actuator[J].Opt.Precision Eng.,2012,20(1):88-95.(in Chinese)

CHENG L,LIU W CH,HOU Z G,et al..Neural network-based nonlinear model predictive control for piezoelectric actuators[J].IEEE Transactions on Industrial Electronics,2015,62(12):7717-7727.

WONG P,XU Q S,VONG C,et al..Rate-dependent hysteresis modeling and control of a piezostage using online support vector machine and relevance vector machine[J].IEEE Transactions on Industrial Electronics,2012,59(4):1988-2001.

刘红军,刘洁,叶芳. 用于超磁致伸缩作动器的一种改进的控制方法[J]. 哈尔滨工业大学学报,2012,44(9):91-95. LIU H J,LIU J,YE F.An improved control method for the giant magnetostrictive actuator[J].Journal of Harbin Institute of Technology,2012,44(9):91-95.(in Chinese)

YANG L,LI J.Robust output feedback control with disturbance estimation for piezoelectric actuators[J].Neurocomputing,2016,173:2129-2135.

赖志林,刘向东,耿洁,等. 压电陶瓷执行器迟滞的滑模逆补偿控制[J]. 光学精密工程,2011,219(6):1281-1290. LAI ZH L,LIU X D,GENG J,et al..Sliding mode control of hysteresis of piezoceramic actuator based on inverse Preisach compensation[J].Opt.Precision Eng.,2011,219(6):1281-1290.(in Chinese)

ESCARENO J A,RAKOTONDRABE M,HABINEZA D.Backstepping-based robust-adaptive control of a nonlinear 2-DOF piezoactuator[J].Control Engineering Practice,2015,41:57-71.

殷之文. 电介质物理学[M]. 北京:科学出版社,2003:378-394. YIN ZH W.Dielectric Physics[M].Beijing:Science Press,2003:378-394.(in Chinese)

MILLER S L,NASBY R D,et al..Device modeling of ferroelectric capacitors[J].Journal of Applied Physics,1990,68:6463.

张福学,王丽坤. 现代压电学[M]. 北京:科学出版社,2002:93-97. ZHANG F X,WANG L K.Modern Piezoelectric[M].Beijing:Science Press,2002:93-97.(in Chinese)

范伟. 六自由度纳米工作台驱动控制方法及系统研究[D]. 安徽:合肥工业大学,2009. FAN W.Research on the Drive System and Control Method for Nano-table With Six Degrees of Freedom[D].Anhui:Hefei University of Technology,2009.(in Chinese)

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