计量线5~140 nm波段高次谐波分布及其抑制

周洪军; 夏玄志; 霍同林; 郑津津

doi:10.3788/OPE.20162407.1550

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计量线5~140 nm波段高次谐波分布及其抑制

现代应用光学 | 更新时间：2020-08-13

- 计量线5~140 nm波段高次谐波分布及其抑制
- Distribution and suppression of higher-order harmonics of metrology beamline in 5~140 nm
- 光学精密工程 2016年24卷第7期页码：1550-1556
- 作者机构：
  
  1.中国科学技术大学国家同步辐射实验室, 安徽合肥 230029
  2.中国科学技术大学精密机械与精密仪器系, 安徽合肥 230027
- 作者简介：
  
  周洪军(1963-), 女, 辽宁黑山人, 博士, 高级工程师, 1985年于东北大学获得学士学位, 1999年于中英格兰大学获得硕士学位, 2006年于中国科学技术大学获得博士学位, 主要从事同步辐射光谱计量和超高真空系统设计等方面的研究。E-mail:hjzhou@ustc.edu.cn E-mail:hjzhou@ustc.edu.cn
  [ "夏玄志(1990-), 男, 安徽泗县人, 硕士研究生, 2012年于合肥工业大学获得学士学位, 主要从事计量线高次谐波及其抑制的研究。E-mail:xxzhi055@mail.ustc.edu.cn" ]
- 基金信息：
  
  国家自然科学基金面上项目大科学装置联合基金资助项目(U1332130);国家973重点基础研究发展计划资助项目(2014CB931804);111引智工程资助项目(B07033)
- DOI：10.3788/OPE.20162407.1550
  中图分类号： O434.12;O433.1
- 收稿日期：2016-02-26，
  
  录用日期：2016-4-29，
  
  纸质出版日期：2016-07
- 稿件说明：
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周洪军, 夏玄志, 霍同林, 等. 计量线5~140 nm波段高次谐波分布及其抑制[J]. 光学精密工程, 2016,24(7):1550-1556.

Hong-jun ZHOU, Xuan-zhi XIA, Tong-lin HUO, et al. Distribution and suppression of higher-order harmonics of metrology beamline in 5~140 nm[J]. Optics and precision engineering, 2016, 24(7): 1550-1556.
周洪军, 夏玄志, 霍同林, 等. 计量线5~140 nm波段高次谐波分布及其抑制[J]. 光学精密工程, 2016,24(7):1550-1556. DOI： 10.3788/OPE.20162407.1550.

Hong-jun ZHOU, Xuan-zhi XIA, Tong-lin HUO, et al. Distribution and suppression of higher-order harmonics of metrology beamline in 5~140 nm[J]. Optics and precision engineering, 2016, 24(7): 1550-1556. DOI： 10.3788/OPE.20162407.1550.

摘要

为了修正和提高计量线覆盖的5～140 nm波段光学元件性能的定标和测量精度，根据国家同步辐射实验室光谱辐射标准和计量光束线的高次谐波分布设计了高次谐波的抑制方案。利用3500，840 l/mm金膜自支撑透射光栅和光电二极管探测器研究了计量线在5～140 nm波段高次谐波的分布情况，并据此提出了利用Si、Al、Al/Mg/Al滤片以及LiF窗、MgF

窗在不同波段对高次谐波进行抑制的方法。实验结果显示：在5～15 nm波段，无滤片情况下高次谐波含量极低；在15～40 nm波段，通过在相应波段添加适当滤片的方式，经探测器量子效率修正后的高次谐波比例可抑制在1.8%以下；在105～140 nm、115～140 nm波段，运用LiF窗、MgF

窗滤波可使高次谐波比例基本为零。由此表明，使用滤波片对全波段抑制谐波的方案是有效的。

Abstract

To correct and improve calibration and measurement precision of optical element performance at 5-140 nm waveband covered by metrology beamline

a scheme for higher-order harmonic suppression was designed based on spectral radiation standard of State Synchrotron Radiation Laboratory and distribution of higher-order harmonic of the metrology beamline. The distribution of the higher-order harmonic of metrology beamline at 5-140 waveband was studied by use of 3500

8401/mm gold-film self-support transmission gratings and a photodiode detector. Thus a method to suppress higher-order harmonics at different wavebands with Si

Al/Mg/Al filter and LiF window and MgF

window was put forward. Experimental result shows that the content of higher harmonic without filter is extremely low in 5-15 nm waveband

the proportion of higher-order harmonic with quantum efficiency corrected by detector can be suppressed below 1.8% in 5-40 nm waveband when proper filter is added at the corresponding waveband; LiF window and MgF

window can basically make higher-order harmonic proportion zero in 105-140 nm and 115-140 nm wavebands. The scheme for suppression of harmonic waves with filters at whole waveband is effective.

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references

HUNTER W R, LONG J P. Thin-film interference mirror to suppress grating harmonics in vacuum-ultraviolet radiation[J]. Appl. Opt., 1994, 33(7):1264-1269.

ERKO A, LANGHOFF N, BJEOUMIKHOV A A, et al.. High-order harmonic suppression by a glass capillary array[J]. Nuclear Instruments and Methods in Physics Research A, 2001, 467-468:832-835.

SUITS A G, HELMANN P, YANG X, et al.. A differential pumped harmonic filter on the chemical dynamics beamline at the advanced light source[J]. Rev. Sci. Instrum., 1995, 66(10):4841-4844.

GULLIKSON E M, MROWKA S, KAUFMANN B B. Recent developments in EUV reflectometry at the advanced light source[J]. SPIE, 2001, 4343:91-102.

KJORNRATTANAWANICH B, KORDE R, BOYER C N, et al.. Temperature dependence of the EUV responsivity of silicon photodiode detectors[J]. IEEE Transactions on Electron Devices, 2006, 53:218-223.

KORDE R, PRINCE C, CUNNINGHAM D, et al.. Present status of radiometric quality silicon photodiades[J]. Metrologia, 2003, 40:145-149.

GULLIKSON E M, KORDE R, CANFIELDL R, et al.. Stable silicon photodiodes for absolute intensity measurements in the VUV and soft X-ray regions[J]. Journal of Electron Spectroscopy and Related Phenomena, 1996, 80:313-316.

CANFIELD L R, VEST R E, KORDE R, et al.. Absolute silicon photodiodes for 169 nm to 254 nm photons[J]. Metrologia, 1998, 35:329-334.

孙可煦, 易荣清, 黄天晅, 等.软X光平面镜反射率标定实验[J].光学学报, 2002, 22(3):379-382.

SUN K X, YI R Q, HUANG T X, et al.. Reflectivity calibration of soft X-ray planar mirror in the BSRF[J]. Acta Optica Sinca, 2002, 22(3):379-382.(in Chinese)

熊利民, 刘金元, 李平, 等.用同步辐射光源建立紫外及真空紫外光谱区光谱辐射度基准的研究[J].光学学报, 2006, 26(4):547-550.

XIONG L M, LIU J Y, LI P, et al.. Ultraviolet and vacuum ultraviolet spectral radiance standard with synchrotron radiation source[J]. Acta Optica Sinica, 2006, 26(4):547-550.(in Chinese)

陈锐, 王风丽, 王占山.极紫外啁啾多层反射镜产生亚飞秒脉冲[J].中国激光, 2008, 35(9):1380-1383.

CHEN R, WANG F L, WANG ZH SH. Producing subfemtosecond pulses by using chirped multilayer mirror in the extreme ultraviolet region[J]. Chinese J. Lasers, 2008, 35(9):1380-1383.(in Chinese)

薛松, 邵景鸿, 卢启鹏, 等.合肥同步辐射反射率测试装置[J].光学精密工程, 2004, 12(5):480-484.

XUE S, SHAO J H, LU Q P, et al.. Reflectivity measuring device in the national synchrotron radiation laboratory[J]. Opt. Precision Eng., 2004, 12(5):480-484.(in Chinese)

曹继红, 尼启良, 陈波.用Si光电二极管标定软X射线探测器[J].光学精密工程, 2004, 12(1):118-121.

CAO J H, NI Q L, CHEN B. Calibration of soft X-ray detector[J]. Opt. Precision Eng., 2004, 12(1):118-121.(in Chinese)

周洪军, 郑津津, 霍同林, 等.计量线高次谐波的定量研究[J].光学精密工程, 2007, 15(5):640-645.

ZHOU H J, ZHENG J J, HUO T L, et al.. Quantitative research on higher order harmonics in metrology beamline[J]. Opt. Precision Eng., 2007, 15(5):640-645.(in Chinese)

周洪军, 王冠军, 郑津津, 等. 5~40 nm波段高次谐波的定量研究[J].光学学报, 2010, 30(9):2753-2756.

ZHOU H J, WANG G J, ZHENG J J, et al.. Suppression of higher-order harmonics by different filter in 5-40 nm[J]. Acta Optica Sinica. 2010, 30(9):2753-2756.(in Chinese)

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