TiO<sub>2</sub>纳米颗粒在单晶硅表面的吸附

宋孝宗; 高贵; 周有欣; 王宏刚; 龚俊

doi:10.3788/OPE.20162407.1694

您当前的位置：

首页 >

文章列表页 >

TiO₂纳米颗粒在单晶硅表面的吸附

微纳技术与精密机械 | 更新时间：2020-08-13

- TiO₂纳米颗粒在单晶硅表面的吸附
- Adsorption of TiO₂ nanoparticles on monocrystalline silicon surface
- 光学精密工程 2016年24卷第7期页码：1694-1702
- 作者机构：
  
  1.兰州理工大学机电工程学院, 甘肃兰州 730050
  2.中国科学院兰州化学物理研究所固体润滑国家重点实验室, 甘肃兰州 730000
- 作者简介：
  
  宋孝宗(1981-), 男, 甘肃白银人, 博士, 副教授, 2003年、2005年、2010年于哈尔滨工业大学分别获得学士、硕士、博士学位, 主要从事超精密加工、超光滑表面抛光方面的研究。E-mail:songxiaozong@126.com E-mail:songxiaozong@126.com
  [ "高贵(1985-), 男, 甘肃兰州人, 硕士, 助理研究员, 2009年、2012年于兰州理工大学分别获得学士、硕士学位, 主要从事聚合物改性及其摩擦磨损性能研究。E-mail:gaogui@licp.cas.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(51205180);国家自然科学基金资助项目(51565031);高等学校博士学科点专项科研基金项目(20126201120001)
- DOI：10.3788/OPE.20162407.1694
  中图分类号： TB302;TB383
- 收稿日期：2016-03-10，
  
  录用日期：2016-4-11，
  
  纸质出版日期：2016-07
- 稿件说明：
移动端阅览
宋孝宗, 高贵, 周有欣, 等. TiO₂纳米颗粒在单晶硅表面的吸附[J]. 光学精密工程, 2016,24(7):1694-1702.

Xiao-zong SONG, Gui GAO, You-xin ZHOU, et al. Adsorption of TiO₂ nanoparticles on monocrystalline silicon surface[J]. Optics and precision engineering, 2016, 24(7): 1694-1702.
宋孝宗, 高贵, 周有欣, 等. TiO₂纳米颗粒在单晶硅表面的吸附[J]. 光学精密工程, 2016,24(7):1694-1702. DOI： 10.3788/OPE.20162407.1694.

Xiao-zong SONG, Gui GAO, You-xin ZHOU, et al. Adsorption of TiO₂ nanoparticles on monocrystalline silicon surface[J]. Optics and precision engineering, 2016, 24(7): 1694-1702. DOI： 10.3788/OPE.20162407.1694.

摘要

为了实现亚纳米级超光滑表面的加工，建立了紫外光诱导纳米颗粒胶体射流加工系统，同时研究了加工过程中纳米颗粒与工件表面间的相互作用机理。首先，对实验所用锐钛矿TiO

纳米颗粒及单晶硅工件表面进行表征测量。然后，用第一性原理的平面波赝势计算方法研究了纳米颗粒胶体射流加工中TiO

分子团簇在单晶硅表面化学吸附的表面构型结构及其体系能量。最后，开展了TiO

纳米颗粒及单晶硅工件表面间的吸附实验。实验结果表明：胶体中的OH基团在TiO

团簇表面及单晶硅表面分别发生化学吸附，在TiO

纳米颗粒及单晶硅表面吸附过程中形成了新的Ti-O-Si键及化学吸附的H

O分子。红外光谱实验结果显示:TiO

纳米颗粒与单晶硅界面间存在新生成的Ti-O-Si键。这种界面间的相互作用证实了紫外光诱导纳米颗粒胶体射流抛光过程可实现材料去除的化学作用机理。

Abstract

To efficiently create the ultra-smooth surface of brittle crystals

an ultraviolet induced nanoparticle colloid jet machining system was established and the interaction mechanism between the nanoparticles and the surface of a workpiece in the process was investigated. Firstly

the characteristics of TiO

nanoparticles and monocrystalline silicon surface used in the experiment were measured and investigated. Then

the plane-wave pseudopotential calculation method based on first-principles was used to study the geometrical structures and formation energies of TiO

molecular cluster in chemically adsorbing on hydroxyl monocrystalline silicon surface. Finally

adsorption experiments of TiO

nanoparticles and monocrystalline silicon surface were carried out. Calculation results show that the OH is chemically adsorbed on TiO

cluster and silicon surface

respectively. In the adsorption process between TiO

nanoparticles and silicon surface

new Ti-O-Si bonds and H

O molecule are formed to reduce the system energy. Infrared spectral experiment results also show that there exits a new generation of Ti-O-Si bond between the interfaces of TiO

nanoparticles and silicon surface. The new chemical bond between the interfaces satisfies the chemical reaction mechanism in the process of ultraviolet induced nanoparticle colloid jet machining.

关键词

Keywords

references

袁巨龙, 张飞虎, 戴一帆, 等.超精密加工领域科学技术发展研究[J].机械工程学报, 2010, 46(15):161-177.

YUAN J L, ZHANG F H, DAI Y F, et al . Development research of science and technologies in ultra-precision machining field[J]. Journal of Mechanical Engineering , 2010, 46(15):161-177.(in Chinese)

白林山, 熊伟, 储向峰, 等. SiO 2 /CeO 2 复合磨粒的制备及在蓝宝石晶片抛光中的应用[J].光学精密工程, 2014, 22(5):1289-1295.

BAI L SH, XIONG W, CHU X F, et al . Preparation of nano SiO 2 /CeO 2 composite particles and their applications to CMP on sapphire substrates[J]. Opt. Precision Eng ., 2014, 22(5):1289-1295.(in Chinese)

唐瓦, 邓伟杰, 郑立功, 等.离子束抛光去除函数计算与抛光实验[J].光学精密工程, 2015, 23(1):31-39.

TANG W, DENG W J, ZHENG L G, et al . Calculation of removal function of ion beam figuring and polishing experiment[J]. Opt. Precision Eng ., 2015, 23(1):31-39.(in Chinese)

郭晓光, 翟昌恒, 张亮, 等.光学石英玻璃纳米级加工性能[J].光学精密工程, 2014, 22(11):2959-2966.

GUO X G, ZHAI CH H, ZHANG L, et al . Nano-processing performance of optical glass[J]. Opt. Precision Eng ., 2014, 22(11):2959-2966.(in Chinese)

XU J, LUO J B, LU X C, et al . Atomic scale deformation in the solid surface induced by nanoparticle impacts[J]. Nanotechnology , 2005, 16:859-864.

李敏, 袁巨龙, 吕冰海.剪切增稠抛光磨料液的制备及其抛光特性[J].光学精密工程, 2015, 23(9):2513-2521.

LI M, YUAN J L, LV B H.Preparation of shear thickening polishing abrasive slurries and their polishing properities[J]. Opt. Precision Eng ., 2015, 23(9):2513-2521.(in Chinese)

HAO P, LEI H, CHEN R L. Cerium-incorporated SBA-15-type materials for CMP:synthesis, characterisation, and CMP application on hard disk substrate[J]. International journal of abrasive technology , 2011, 4:255-265.

VINCENZO A, SEDAT Y, VITTORIO L, et al. Determination of Photoadsorption Capacity of Polychrystalline TiO 2 Catalyst in Irradiated Slurry[J]. Advances in Chemical Engineering , 2009, 36:1-35.

CLARK S J, SEGALL M D, PICKARD C J, et al . First principles methods using CASTEP[J]. Zeitschrift fuer Kristallographie , 2005, 220(5-6):567-570.

DABROWSKI A. Adsorption-from theory to practice[J]. Advances in colloid and interface science , 2001, 93(1-3):135-224.

董泰阁, 黄伟其, 黄忠梅, 等.硅表面硅镱键合与量子级联结构的发光[J].强激光与粒子束, 2015, 27(7):074103-1.

DONG T G, HUANG W Q, HUANG ZH M, et al . Si-Yb quantum cascade and Si-Yb-Si PIN hybrid light-emitting diode[J]. High Power Laser and Particle Beams , 2015, 27(7):074103-1.(in Chinese)

ZHANG F H, SONG X Z, ZHANG Y, et al . Figuring of an ultra-smooth surface in nanoparticle colloid jet machining[J]. Journal of micromechanics and microengineering , 2009, 19:054009.

宋孝宗, 龚俊.紫外-可见光光束在TiO 2 纳米颗粒胶体中的传输[J].强激光与粒子束, 2015, 27(2):58-61.

SONG X Z, GONG J. Properties of ultraviolet-visible beam propagation in TiO 2 nanoparticle colloid[J]. High Power Laser and Particle Beams , 2015, 27(2):58-61.(in Chinese)

XU X F, LUO J B, GUO D. Nanoparticle-wall collision in a laminar cylindrical liquid jet[J]. Journal of Colloid & Interface Science , 2011, 359(2):334-338.

浏览量

544

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据

TiO2纳米颗粒在单晶硅表面的吸附

Adsorption of TiO2 nanoparticles on monocrystalline silicon surface

DOI：10.3788/OPE.20162407.1694

摘要

Abstract

关键词

Keywords

references

TiO₂纳米颗粒在单晶硅表面的吸附

Adsorption of TiO₂ nanoparticles on monocrystalline silicon surface