小型化硅微谐振式加速度计的实现与性能测试

赵健; 施芹; 夏国明; 裘安萍; 吴志强; 苏岩

doi:10.3788/OPE.20162408.1927

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小型化硅微谐振式加速度计的实现与性能测试

微纳技术与精密机械 | 更新时间：2020-07-07

- 小型化硅微谐振式加速度计的实现与性能测试
- Implementation and measurement of a miniaturized silicon resonant accelerometer
- Editorial Office of Optics and Precision Engineeri 2016年24卷第8期页码：1927-1933
- 作者机构：
  
  南京理工大学 MEMS惯性技术研究中心, 南京 210094
- 作者简介：
  
  [ "赵健(1989-)，男，陕西汉中人，博士研究生，2011年于南京理工大学获得学士学位，主要从事MEMS传感器读出电路的研究。E-mail：elfevil007@126.com" ]
  苏岩(1967-)，男，江苏苏州人，教授，博士生导师，1996年、2001年于东南大学分别获得硕士、博士学位，主要从事MEMS传感技术研究。E-mail:suyan@mail.njust.edu.cn E-mail:suyan@mail.njust.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(No.61301214)
- DOI：10.3788/OPE.20162408.1927
  中图分类号： TH824.4
- 收稿日期：2016-02-10，
  
  录用日期：2016-3-15，
  
  纸质出版日期：2016-08-25
- 稿件说明：
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赵健, 施芹, 夏国明, 等. 小型化硅微谐振式加速度计的实现与性能测试[J]. Editorial Office of Optics and Precision Engineeri, 2016,24(8):1927-1933.

Jian ZHAO, Qin SHI, Guo-ming XIA, et al. Implementation and measurement of a miniaturized silicon resonant accelerometer[J]. Optics and precision engineering, 2016, 24(8): 1927-1933.
赵健, 施芹, 夏国明, 等. 小型化硅微谐振式加速度计的实现与性能测试[J]. Editorial Office of Optics and Precision Engineeri, 2016,24(8):1927-1933. DOI： 10.3788/OPE.20162408.1927.

Jian ZHAO, Qin SHI, Guo-ming XIA, et al. Implementation and measurement of a miniaturized silicon resonant accelerometer[J]. Optics and precision engineering, 2016, 24(8): 1927-1933. DOI： 10.3788/OPE.20162408.1927.

摘要

设计了一款由微机电系统和专用集成电路构成的小型化硅微谐振式加速度计。该加速度计采用80

m厚SOI工艺加工微机电系统(MEMS)结构，采取真空封装技术降低结构噪声。首先，采用振荡信号作为自动增益控制电路中斩波器的控制信号，降低了闪变噪声且不会引入额外的功耗。其次，使用线性区工作的乘法器取代传统的吉尔伯特单元，通过大幅降低系统总体供电电压来降低功耗。最后，采用复位计数器进行频率数字转换，在所关心的带宽内抑制量化噪声。实验显示：该加速度计在达到±30

线性量程的前提下，实现了2.5 μg/√Hz的分辨率和1 μg的零偏不稳定度。此外，为了减小电路自身发热引起的温度漂移，该样机的功耗被控制在3.5 mW以内，系统集成后的尺寸约为45 mm×30 mm×20 mm。基于所述技术，系统在体积、功耗和性能方面均有较大的提升。

Abstract

A miniaturized Silicon Resonant Accelerometer(SRA) consisting of a MEMS (Micro-electro-mechanical System) and an ASIC(Application Specific Integrated Circuit) readout circuit is designed. The MEMS sensor is fabricated by an 80

m thick SOI process and the noise in the ASIC is reduced by a series of vacuum packaging technologies. Firstly

a vibration signal is used as the control signal of a chopper in automatic gain control circuit to reduce the flicker noise and extra power consumption. Then

a multiplier in the linear area multiplier is used to replace the traditional Gilbert unit to reduce power consumption by sharply reducing system power supply voltage. Finally

a reset counter is taken in digital frequency conversion to inhibit quantization noise in the concerned bandwidth. The experiments show that the proposed SRA achieves sub-μg bias instability and 2.5 μg/√Hz velocity random walk within ±30

full scale. Moreover

to reduce the temperature drifting due to self heating

the power consumption of the SRA has been carefully limited under 3.5 mW. After integration

the entire prototype occupies a space of 45 mm×30 mm×20 mm. It is characterized by high performance

low power and good miniaturization.

关键词

Keywords

references

ZWAHLEN P, et al.. Breakthrough in high performance inertial navigation grade sigma-delta MEMS accelerometer [C]. IEEE PLANS Conference, 2012: 15-19.

BEITIA J, CLIFFORD A, FELL C. Quartz pendulous accelerometers for navigation and tactical grade systems [C]. IEEE Inertial Sensors and Systems, Karlsruhe, Germany, 2015: 1-20.

SERGEI A. ZOTOV. High quality factor resonant MEMS accelerometer with continuous thermal compensation [J]. IEEE Sensors Journal, 2015, 15(9): 5045-5052.

LIN He, et al.. A CMOS readout circuit for SOI resonant accelerometer with 4 μg bias stability and 20μg/√Hz resolution [J]. IEEE Journal of Solid-State Circuits, 2008, 43(6): 1480-1490.

石然, 裘安萍, 苏岩. 硅微谐振式加速度计的实现及性能测试[J]. 光学精密工程, 2010, 18(12): 2583-2589.

SHI R, QIU A P, SU Y. Implementation and experiments of micromechanical differential silicon resonant accelerometer[J]. Opt. Precision Eng., 2010, 18(12): 2583-2589.(in Chinese)

王岩, 张玲, 邢朝洋. 硅微谐振加速度计高精度相位闭环控制系统设计与实现[J]. 光学精密工程, 2014, 22(5): 688-692.

WANG Y, ZHANG L, XING CH Y. Design and implement of high precision phase closed-loop control system for silicon resonant accelerometer[J]. Opt. Precision Eng., 2014, 22(5): 688-692.(in Chinese)

王帆, 董景新, 赵淑明. 硅微振梁式加速度计的温度检测及闭环控制[J]. 光学精密工程, 2014, 22(6): 1590-1597.

WANG F, DONG J X, ZHAO SH M. Temperature measurement and close loop control of silicon resonant accelerometer[J]. Opt. Precision Eng., 2010, 18(12): 2583-2589 .(in Chinese)

HOPKINS, RALPH. The silicon oscillating accelerometer: A high-performance MEMS accelerometer for precision navigation and strategic guidance applications [J].Technology Digest, 2006.

XIA G M, QIU A P, SHI Q, et al.. A wafer level vacuum packaged silicon vibration beam accelerometer [J]. IEEE International Symposium on Inertial Sensors and Systems (ISISS), 2015: 1-4.

姜绍栋. 硅微机械陀螺敏感结构的理论研究[D]. 南京: 南京理工大学, 2015.

JIANG SH D.Theoretical Reserch on Sensitive Structure of Silicon Micromachined Gyroscope[D].Nanjing: najing University of Science and Technolgy, 2015.

裘安萍, 董金虎. 硅微谐振式加速度计的温度效应及补偿[J]. 纳米技术与精密工程, 2012, 10(3): 215-219.

QIU A P, DONG J H. Temperature effect and compensation of silicon resonant accelerometer[J]. Opt. Precision Eng., 2012, 10(3): 215-219. (in Chinese)

SEUNGBAE L, CLARK T C N. Influence of automatic level control on micromechanical resonator oscillator phase noise [C]. IEEE International Frequency Control Symposium and PDA Exhibiton, 2013: 341-349.

ZHAO Y, ZHAO J. A Sub-μg bias-instability MEMS oscillating accelerometer with an ultra-low-noise read-out circuit in CMOS [J]. Journal of Solid-State Circuits, 2015, 50(9): 2113-2126.

GUNHEE H, EDGAR S S. CMOS Transconductance multipliers: A tutorial [J]. IEEE Transactions on Circuits and Systems-II: Analog and Digital Signal Processing, 1998, 45(12): 1550-1563.

JAEWOOK K. Analysis and design of voltage-controlled oscillator based analog-to-digital converter [J]. IEEE Transactions on Circuits and Systems-I: Regular Papers, 2010, 57(1): 18-30.

JELLE V R, GEORGES G. An energy-efficient capacitance-controlled oscillator-based sensor interface for MEMS sensors [C].IEEE Asian Solid-State Circuits Conference, Singapore, 2013: 405-408.

LORET T. Navigation grade accelerometer with quartz vibrating beam [C]. Inertial Sensors and Systems, Karlsruhe, Germany, 2014: 1-14.

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