机器视觉精密测量中的显微光学聚焦

徐征; 陈聿夫; 孙谦; 王晓东; 周宗磊

doi:10.3788/OPE.20162409.2095

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机器视觉精密测量中的显微光学聚焦

现代应用光学 | 更新时间：2020-07-07

- 机器视觉精密测量中的显微光学聚焦
- Auto-focusing in optical microscopy for machine-vision-based precise measurement
- 光学精密工程 2016年24卷第9期页码：2095-2100
- 作者机构：
  
  大连理工大学微纳米技术及系统辽宁省重点实验室, 辽宁大连 116085
- 作者简介：
  
  [ "徐征(1973-), 男, 河南郑州人, 博士, 副研究员, 1997年、2000年于吉林工业大学分别获得学士和硕士学位, 2004年于大连理工大学获得博士学位, 主要从事微纳集成制造的研究。E-mail:xuzheng@dlut.edu.cn" ]
  王晓东(1967-), 男, 黑龙江哈尔滨人, 教授, 1989年于南京航空学院获得学士学位, 1992年于哈尔滨船舶工程学院获得硕士学位, 1995年于哈尔滨工业大学获得博士学位, 主要从事微装配技术与系统、精密仪器等方面的研究。E-mail:xdwang@dlut.edu.cn E-mail:xdwang@dlut.edu.cn
- 基金信息：
  
  国家科技重大专项基金资助项目(2013ZX04001091)
- DOI：10.3788/OPE.20162409.2095
  中图分类号： TP242.6;TH742.9
- 收稿日期：2016-03-01，
  
  录用日期：2016-4-19，
  
  纸质出版日期：2016-09
- 稿件说明：
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徐征, 陈聿夫, 孙谦, 等. 机器视觉精密测量中的显微光学聚焦[J]. 光学精密工程, 2016,24(9):2095-2100.

Zheng XU, Yu-fu CHEN, Qian SUN, et al. Auto-focusing in optical microscopy for machine-vision-based precise measurement[J]. Optics and precision engineering, 2016, 24(9): 2095-2100.
徐征, 陈聿夫, 孙谦, 等. 机器视觉精密测量中的显微光学聚焦[J]. 光学精密工程, 2016,24(9):2095-2100. DOI： 10.3788/OPE.20162409.2095.

Zheng XU, Yu-fu CHEN, Qian SUN, et al. Auto-focusing in optical microscopy for machine-vision-based precise measurement[J]. Optics and precision engineering, 2016, 24(9): 2095-2100. DOI： 10.3788/OPE.20162409.2095.

摘要

考虑显微光学涉及的聚焦精度对机器视觉精密测量效果的影响，开展了显微视觉环境下对图像聚焦技术综合定量评价的研究。建立了偏移率等系列性能指标，对13组清晰度函数在显微视觉条件下的无偏性、单峰性、分辨力等进行了综合评价，优选出方差函数和Brenner函数分别用于粗聚焦和精聚焦阶段的清晰度计算。建立了分步爬山搜索法，实现了显微自动聚焦。与传统爬山法相比，提出的方法聚焦时间显著缩短，重复精度提高约24%。将建立的自动聚焦与图像测量方法应用于某电液伺服阀衔铁气隙测量中，得到的测量均值与工具显微镜结果相近，而测量标准差可达1.9

m，测量效率也显著提高。最后对伺服阀加电条件下的气隙动力学特性进行了测试，获得了驱动电流-衔铁气隙之间的关系，为在线装配/装调提供了重要依据。

Abstract

The auto-focusing precision of microscopy has great influence on the performance of machine-vision-based precise measurement. A comprehensively quantitative evaluation method on image auto-focusing technique in a microscopic vision environment was researched. Several kinds of evaluation indexes were proposed

and the unbiasedness

unimodality

spatial resolution

etc

. of 13 groups sharpness functions were comprehensively evaluated in a microscopic vision condition. Then variance function and Brenner function were chosen to calculate the sharpness functions in coarse and fine focusing processes respectively. A modified Mountain Climbing Searching (MCS) algorithm was proposed to implement the micro-automatic focusing. As comparing to common MCS method

the modified method significantly improves the time consuming and increases the repeatability by about 24%. Finally

the developed auto-focusing algorithm was integrated into the system and was applied to the measurement of armature gap in a servo solenoid valve. The results show that the standard deviation of measurement is 1.9

the precision is similar to that of the universal tool microscope

and the efficiency is significantly improved. Moreover

the system was also utilized for dynamic characteristic detection of gaps in the solenoid valve under the condition of power up

the relation between driving current and armature gap is obtained

which provides a reliable evidence for in-situ micro-assembly.

关键词

Keywords

references

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