电火花机械复合磨削反应烧结SiC陶瓷的表面特征

饶小双; 张飞虎; 刘立飞; 李琛

doi:10.3788/OPE.20162409.2192

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电火花机械复合磨削反应烧结SiC陶瓷的表面特征

微纳技术与精密机械 | 更新时间：2020-07-07

- 电火花机械复合磨削反应烧结SiC陶瓷的表面特征
- Surface characteristics for RB-SiC ceramics by electrical discharge diamond grinding
- 光学精密工程 2016年24卷第9期页码：2192-2199
- 作者机构：
  
  1.哈尔滨工业大学机电工程学院, 黑龙江哈尔滨 150001
  2.哈尔滨理工大学机电学院, 黑龙江哈尔滨 150001
- 作者简介：
  
  [ "饶小双(1986-), 男, 湖北黄冈人, 博士研究生, 2011年于中国地质大学(武汉)获得学士学位, 2014年于哈尔滨工程大学获得硕士学位, 主要从事硬脆材料精密及超精密加工方面的研究。E-mail:rxs_cug@126.com" ]
  张飞虎(1964-)，男，河南郑州人，博士，教授，博士生导师，1984年、1987年于西北工业大学分别获得学士、硕士学位，1993年于哈尔滨工业大学获博士学位，主要从事精密超精密加工与纳米技术的研究，包括超精密加工新工艺及设备(ELID磨削等)、纳米级超光滑表面加工技术及表面质量、新型功能材料的精密和超精密加工、光学非球面加工、硬脆材料精密和高效磨削技术的研究。E-mail:zhangfh@hit.edu.cnE-mail: zhangfh@hit.edu.cn
- 基金信息：
  
  国家973重点基础研究发展计划资助项目(2011CB013202)
- DOI：10.3788/OPE.20162409.2192
  中图分类号： TG74;TQ174.758
- 收稿日期：2016-03-10，
  
  录用日期：2016-4-17，
  
  纸质出版日期：2016-06
- 稿件说明：
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饶小双, 张飞虎, 刘立飞, 等. 电火花机械复合磨削反应烧结SiC陶瓷的表面特征[J]. 光学精密工程, 2016,24(9):2192-2199.

Xiao-shuang RAO, Fei-hu ZHANG, Li-fei LIU, et al. Surface characteristics for RB-SiC ceramics by electrical discharge diamond grinding[J]. Optics and precision engineering, 2016, 24(9): 2192-2199.
饶小双, 张飞虎, 刘立飞, 等. 电火花机械复合磨削反应烧结SiC陶瓷的表面特征[J]. 光学精密工程, 2016,24(9):2192-2199. DOI： 10.3788/OPE.20162409.2192.

Xiao-shuang RAO, Fei-hu ZHANG, Li-fei LIU, et al. Surface characteristics for RB-SiC ceramics by electrical discharge diamond grinding[J]. Optics and precision engineering, 2016, 24(9): 2192-2199. DOI： 10.3788/OPE.20162409.2192.

摘要

研究了基于电火花机械复合磨削技术加工的反应烧结碳化硅（RB-SiC）陶瓷的表面特征。用电火花机械复合磨削（EDDG）、电火花磨削（EDG）以及普通磨削（CG）三种方法加工RB-SiC陶瓷，并采用激光共聚焦显微镜和扫描电子显微镜对加工后的SiC陶瓷的表面粗糙度、表面形貌及微观裂纹进行测量和对比试验，获得了RB-SiC陶瓷的EDDG加工特性。实验显示：EDDG加工的RB-SiC陶瓷的表面粗糙度优于EDG加工的表面粗糙度，为0.214 9

m，但比CG加工的表面粗糙度0.195 6

m略差。对加工后的SiC陶瓷表面形貌观察显示，传统磨削加工后的表面存在明显划痕，EDG加工表面主要由放电凹坑组成，而EDDG加工表面同时存在放电凹坑和磨削划痕；另外，传统磨削表面也存在磨削裂纹和晶界裂纹，但EDG加工后的表面只存在热裂纹，而EDDG加工后的表面存在磨削裂纹和热裂纹，不过热裂纹可以用金刚石磨粒磨削去除。对比实验显示RB-SiC陶瓷的EDDG加工与EDG和CG加工获得了不同的表面特征。

Abstract

The surface characteristics of reaction-bonded SiC (RB-SiC) ceramic with Electrical Discharge Diamond Grinding (EDDG) were explored. Three kinds of processes of EDDG

Electrical Discharge Grinding (EDG) and Conventional Grinding (CG) were taken into the experiments of RB-SiC grinding. Then the surface roughnesses of the RB-SiC were measured with a laser scanning confocal microscope

and their surface morphologies and micro-cracks were observed with a scan electron microscopy. The grinding characteristics of the RB-SiC with EDDG were analyzed and compared to that with other two methods. The results show that the surface roughness value of RB-SiC is 0.214 9

m with the EDDG

which is better than that with EDG but slightly poorer than 0.1956

m with the CG. For the surface morphologies of the RB-SiC

it shows obvious discontinuous scratches with the CG

and is mainly composed of discharge craters with the EDG machining. However

both scratches and discharge craters are existed on the machined surface with the EDDG. Moreover

the grinding cracks and grain boundary cracks are found on CG surface and only hot cracks exist on the EDG surface. But the micro-cracks on EDDG surface are divided into grinding cracks and hot cracks

and the latter can be ground with diamond grits. With the investigation of comparative experiments

the results show that different machined surface characteristics of RB-SiC ceramic with EDDG process from that with EDG and CG processes.

关键词

Keywords

references

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