全频段亚纳米精度氟化钙材料加工

张春雷; 徐乐; 刘健; 马占龙; 王飞; 谷永强; 代雷; 彭石军

doi:10.3788/OPE.20162411.2636

您当前的位置：

首页 >

文章列表页 >

全频段亚纳米精度氟化钙材料加工

现代应用光学 | 更新时间：2020-07-07

- 全频段亚纳米精度氟化钙材料加工
- Sub-nanometer precision optical fabrication of CaF₂ materials
- 光学精密工程;Editorial Office of Optics and Precision Engineeri 2016年24卷第11期页码：2636-2643
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所超精密光学工程研究中心, 吉林长春 130033
- 作者简介：
  
  张春雷(1981-),男,吉林长春人,助理研究员,2005年于北京交通大学获得学士学位,2011年于长春光机所获得博士学位,主要从事成像光谱仪光谱辐射定标和光学加工检测方面的研究。E-mail:zcll_1981@126.com
  [ "徐乐(1987-),男,吉林长春人,硕士,研究实习员,2007年、2014年于北京理工大学分别获得学士、硕士学位,主要从事光学精密加工方面的研究。E-mail:xule198711@163.com" ]
- 基金信息：
  
  国家科技重大专项(No.2009ZX02205)
- DOI：10.3788/OPE.20162411.2636
  中图分类号： TN305.2;TH703
- 收稿日期：2016-04-26，
  
  录用日期：2016-6-14，
  
  纸质出版日期：2016-11-25
- 稿件说明：
移动端阅览
张春雷, 徐乐, 刘健, 等. 全频段亚纳米精度氟化钙材料加工[J]. 光学精密工程;Editorial Office of Optics and Precision Engineeri, 2016,24(11):2636-2643.

Chun-lei ZHANG, Le XU, Jian LIU, et al. Sub-nanometer precision optical fabrication of CaF₂ materials[J]. Optics and precision engineering, 2016, 24(11): 2636-2643.
张春雷, 徐乐, 刘健, 等. 全频段亚纳米精度氟化钙材料加工[J]. 光学精密工程;Editorial Office of Optics and Precision Engineeri, 2016,24(11):2636-2643. DOI： 10.3788/OPE.20162411.2636.

Chun-lei ZHANG, Le XU, Jian LIU, et al. Sub-nanometer precision optical fabrication of CaF₂ materials[J]. Optics and precision engineering, 2016, 24(11): 2636-2643. DOI： 10.3788/OPE.20162411.2636.

摘要

考虑用CaF

材料制作投影光刻物镜可以明显提高其性能指标，本文研究了CaF

材料加工工艺的全流程，以实现CaF

材料的全频段高精度加工。首先，利用沥青抛光膜和金刚石微粉使CaF

元件有较好的面形和表面质量。然后，优化转速、抛光盘移动范围、压力等加工工艺参数，并使用硅溶胶溶液抛光进一步降低CaF

元件的高频误差，逐渐去除加工中产生的划痕并且获得极小中频误差（Zernike残差）和高频粗糙度。最后，在不改变CaF

元件高频误差的同时利用离子束加工精修元件面形。对100 mm口径氟化钙材料平面进行了加工和测试。结果表明：其Zernike 37项拟合面形误差RMS值可达0.39 nm，Zernike残差RMS值为0.43 nm，高频粗糙度均值为0.31 nm，实现了对CaF

元件的亚纳米精度加工，为研发高性能深紫外投影光刻物镜奠定了良好基础。

Abstract

When CaF

materials are used in projection lenses

the performance of the projection lenses can be improved greatly. This paper researches the process of CaF

crystal fabrication to realize its high precision optical fabrication in all wave bands. Firstly

the pitch lap and the diamond powder were used to get a relative better figure and surface quality of a CaF

element. Then

the technological parameters of the polishing lap

such as rotation speed

movement range and pressure were optimized

and the colloidal silica was used in polishing to reduce the high frequency errors in the CaF

element

remove the scratch in machining and to obtain a smaller mid-spatial error and smaller higher frequency roughness. Finally

the ion beam figuring technique was used to repair finely the surface figure of the element meanwhile maintaining the high frequency error in the CaF

element. The Experiments were conduct on a CaF

crystal plane with a diameter of 100 mm

and the results indicate that its 37 Zernike fit error and the Zernike residual error reach to 0.39 nm RMS and 0.43 nm RMS

respectively

and the roughness reaches to 0.31 nm on average. These results satisfy the nanometer machining requirements of the projection lens

and lay a basis for development of the high performance projection lenses.

关键词

Keywords

references

MCINTYRE G, SANDERS D, RATNAM S, et al..The limitations of high index resists for 193 nm hyper-NA lithography[J]. SPIE, 2008, 6923:692304-1-12.

谢超. 氟化钙单晶材料的磁流变抛光工艺研究[D]. 长沙:国防科技大学, 2009.

XIE CH. Research on Magnetorheological Finishing Techniques of Optical Mirror Materials of CaF 2 [D]. Changsha:Graduate School of National University of Defense Technology, 2009.(in Chinese)

马占龙,王君林. 超高精度光学元件加工技术[J]. 红外与激光工程,2013,42(6):1485-1490.

MA ZH L, WANG J L. Ultra-precision optical fabrication technology[J]. Infrared and Laser Engineering,2013,42(6):1485-1490. (in Chinese)

马占龙,隋永新. 应用离子束修正大面形误差光学元件[J]. 光学学报,2014, 34(1):012201-1-5.

MA ZH L, SUI Y X. Large optical surface error figuring by ion beam[J]. Acta Optica Sinica, 2014, 34(1):012201-1-5.(in Chinese)

唐瓦,邓伟杰,李锐钢,等. 离子束抛光高陡度离轴非球面的去除函数修正[J]. 光学精密工程,2015,23(6):1572-1579.

TANG W, DENG W J, LI R G,et al..Correction of removal function of ion beam figuring highly steep off-axis asphere[J]. Opt. Precision Eng., 2015,23(6):1572-1579. (in Chinese)

周林,戴一帆,解旭辉,等. 光学镜面离子束加工的可达性[J]. 光学精密工程,2007,15(2):160-166.

ZHOU L, DAI Y F, XIE X H,et al..Machining reachability in ion beam figuring[J]. Opt. Precision Eng., 2007,15(2):160-166. (in Chinese)

马占龙, 彭利荣, 王高文,等. 应用离子束修正高精度CGH基底[J]. 中国光学, 2016,9(2):270-276.

MA ZH L, PENG L R, WANG G W, et al..High-precision CGH substrate figuring by ion beam[J]. Chinese Optics, 2016,9(2):270-276.(in Chinese)

王东海. 氟化钙晶体化学机械抛光工艺研究[D]. 长春:长春理工大学, 2009.

WANG D H. Study on Chemical Mechanical Polishing of Calcium Fluoride Single Crystal[D]. Changchun:Changchun University of Science and Technology, 2009. (in Chinese)

冯建斌. 大尺寸氟化钙晶体光学加工工艺研究[D]. 长春:长春理工大学, 2012.

FENG J B. Study on the Optical Processing Technique of Large Size CaF 2 Crystal[D]. Changchun:Changchun University of Science and Technology, 2012. (in Chinese)

李圣怡,戴一帆. 大中型光学非球面镜制造与测量新技术[M]. 北京:国防工业出版社,2011.

LI SH Y, DAI Y F. New Technology for Manufacturing and Measurement of Large and Middle-Scale Aspheric Surfaces[M]. Beijing:National Defense Industry Press, 2011. (in Chinese)

徐乐, 张春雷, 代雷,等. 高精度非回转对称非球面加工方法研究[J]. 中国光学, 2016,9(3):364-370.

XU L, ZHANG CH L, DAI L, et al..Research on manufacturing method of non-rotationally symmetrical aspheric surface with high accarucy[J]. Chinese Optics, 2016, 9(3):364-370.

MEHTA P K, REID P B. A mathematical model for optical smoothing prediction of high-spatial frequency surface errors[J]. SPIE,1999, 3786:447-459.

TUELL M T, BURGE J H, ANDERSON B. Aspheric optics:smoothing the ripples with semi-flexible tools[J]. Optical Engineering,2002, 41(7):2002.

NIE X Q, LI SH Y, SHI F, et al..Generalized numerical pressure distribution model for smoothing polishing of irregular midspatial frequency errors[J]. Applied Optics, 2014, 53(6):1020-1027.

NIE X Q, LI SH Y, SHI F, et al.. Control of mid-spatial frequency errors considering the pad groove feature in smoothing polishing process[J]. Applied Optics, 2014,53(28):6332-6339.

彭利荣, 马占龙, 王高文,等. 超薄光学元件精密加工关键技术[J]. 中国光学, 2015,8(6):964-970.

PENG L R, MA ZH L, WANG G W, et al..Key technology of ultra-thin optical element precision manufacture[J]. Chinese Optics,2015,8(6):964-970.(in Chinese)

SU D Q,MIAO E L,SUI Y X, et al.. Absolute surface figure testing by shift-rotation method using Zernike polynomials[J]. Optics Letters,2012, 37(15):3198-3200.

杨智. 确定性光学加工频带误差的评价与分析方法研究[D]. 长沙:国防科技大学, 2008.

YANG ZH. Study on Specification and Analysis of Frequency Band Errors on Deterministic Optical Machining[D]. Changsha:National University of Defense Technology, 2008. (in Chinese)

许伟才. 浸没式投影物镜的光学设计与像质补偿[D]. 北京:中国科学院研究生院,2011.

XU W C. Optical Design and Imaging Performance Compensation for the Lithographic Lens[D].Beijing:Chinese Academy of Sciences, 2011. (in Chinese)

浏览量

614

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据