飞秒激光跟踪仪光轴与竖轴同轴度的标定

崔成君; 劳达宝; 高书苑; 郝春艳; 周维虎

doi:10.3788/OPE.20162411.2651

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飞秒激光跟踪仪光轴与竖轴同轴度的标定

现代应用光学 | 更新时间：2020-07-07

- 飞秒激光跟踪仪光轴与竖轴同轴度的标定
- Calibration for coaxiality of optical axis and vertical rotary shaft in femtosecond laser tracker
- 光学精密工程 2016年24卷第11期页码：2651-2657
- 作者机构：
  
  1.长春理工大学光电工程学院, 吉林长春 130009
  2.中国科学院光电研究院, 北京 100094
  3.合肥工业大学仪器科学和光电工程学院, 安徽合肥 230009
  4.中国科学院大学, 北京 100049
- 作者简介：
  
  [ "崔成君(1988-),男,吉林人,博士研究生,2010年、2013于长春理工大学分别获得学士、硕士学位,主要研究方向为光电精密测量技术、光电系统总体设计与集成测试技术。E-mail:ccj408@126.com" ]
  周维虎(1962-),男,安徽合肥人,研究员, 2000年于合肥工业大学获得博士学位,主要研究方向为光电系统总体设计与集成测试、飞秒激光测量技术、光电精密测量技术以及大尺寸几何量计量测试技术。E-mail:zhouweihu@aoe.ac.cn. E-mail:zhouweihu@aoe.ac.cn.
- 基金信息：
  
  国家重大科学仪器设备开发专项资助项目(No.2011YQ120022)
- DOI：10.3788/OPE.20162411.2651
  中图分类号： TH249
- 收稿日期：2016-06-17，
  
  录用日期：2016-8-2，
  
  纸质出版日期：2016-11-25
- 稿件说明：
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崔成君, 劳达宝, 高书苑, 等. 飞秒激光跟踪仪光轴与竖轴同轴度的标定[J]. 光学精密工程, 2016,24(11):2651-2657.

Cheng-jun CUI, Da-bao LAO, Shu-yuan GAO, et al. Calibration for coaxiality of optical axis and vertical rotary shaft in femtosecond laser tracker[J]. Editorial office of optics and precision engineeri, 2016, 24(11): 2651-2657.
崔成君, 劳达宝, 高书苑, 等. 飞秒激光跟踪仪光轴与竖轴同轴度的标定[J]. 光学精密工程, 2016,24(11):2651-2657. DOI： 10.3788/OPE.20162411.2651.

Cheng-jun CUI, Da-bao LAO, Shu-yuan GAO, et al. Calibration for coaxiality of optical axis and vertical rotary shaft in femtosecond laser tracker[J]. Editorial office of optics and precision engineeri, 2016, 24(11): 2651-2657. DOI： 10.3788/OPE.20162411.2651.

摘要

考虑飞秒激光跟踪仪仪器轴系的几何误差会影响仪器的指向精度并最终影响坐标测量精度，本文研究了激光光轴与竖轴的几何误差对仪器测量精度的影响。提出了激光光轴与竖轴的同轴度标定方法，以降低其不重合带来的跟踪测量误差。首先，基于几何光学原理建立了光轴与竖轴的几何误差模型，分别分析了光轴与竖轴的倾斜与平移误差对仪器测角精度的影响。然后，针对设计的仪器提出了基于旋转成像原理的光轴与竖轴同轴度的检测方法，并设计了一套同轴度检测装置。最后，基于该检测装置，通过调节两组双光楔完成了激光光轴与竖轴的倾斜与平移误差的标定。结果显示，经标定校准后激光光轴与竖轴的角度误差为3.4"；平移误差为26.1

m，得到的结果为仪器后续建立误差补偿模型奠定了基础。

Abstract

As the geometric errors of shafts in a femtosecond laser tracker directly lead to pointing error and limits the coordinate measuring accuracy of the instrument

this paper researches the effects of geometric errors between optical axis and vertical rotary shaft in the laser tracker on measuring accuracy of the instrument. It proposes a calibration method for the coaxiality of optical axis and vertical rotary shaft to reduce the tracking measuring errors from the misalignment between optical axis and vertical rotary shaft. Firstly

a mathematical model of geometric errors between optical axis and vertical rotary shaft was built based on geometrical optical principles

and influences of the tilt and translation between optical axis and vertical rotary shaft on measuring angle errors were analyzed. Then

a coaxiality detecting method based on the rotation imaging principle and image processing algorithm was proposed

and a set of coaxiality detecting device was designed. On the basis of the detecting device

the tilt and translation between optical axis and vertical rotary shaft were calibrated by adjustment of dual wedges. Results show that the angle error of optical axis and vertical rotary shaft is 3.4" and the translation error is 26.1

m after calibration

which meets the design indicator of femtosecond laser tracker. This work establishes a theoretical foundation for the subsequent system errors.

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references

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