非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验

黄卫清; 陶杰; 孙梦馨; 王寅; 卢倩

doi:10.3788/OPE.20162411.2712

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非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验

微纳技术与精密机械 | 更新时间：2020-07-07

- 非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验
- Modeling and experiment of precision rotary positioner with large stroke driven by non-resonant piezoelectric motor
- 光学精密工程 2016年24卷第11期页码：2712-2720
- 作者机构：
  
  1.南京航空航天大学机械结构力学及控制国家重点实验室, 江苏南京 210016
  2.华侨大学精密测量技术及仪器研究中心, 福建厦门 361021
- 作者简介：
  
  [ "黄卫清(1965-),男,江苏南通人,博士,教授,博士生导师,1987年、1990年于南京航空航天大学分别获得学士、硕士学位,1999年于香港理工大学获得博士学位,主要从事超声电机技术研究。E-mail:mehwq@nuaa.edu.cn" ]
  陶杰(1990-),男,江苏宿迁人,硕士研究生,2013年于重庆科技学院获得学士学位,主要从事压电精密驱动方面研究。E-mail:taojiemech@nuaa.edu.cnE-mail:taojiemech@nuaa.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(51375224);国家自然科学基金重大研究计划资助项目(91223201);国家自然科学基金青年基金资助项目(51405420);江苏省自然科学基金青年基金资助项目(BK20140474);江苏高校优势学科建设工程资助项目( )
- DOI：10.3788/OPE.20162411.2712
  中图分类号： TH703;TP273
- 收稿日期：2016-05-12，
  
  录用日期：2016-6-25，
  
  纸质出版日期：2016-11-25
- 稿件说明：
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黄卫清, 陶杰, 孙梦馨, 等. 非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验[J]. 光学精密工程, 2016,24(11):2712-2720.

Wei-qing HUANG, Jie TAO, Meng-xin SUN, et al. Modeling and experiment of precision rotary positioner with large stroke driven by non-resonant piezoelectric motor[J]. Editorial office of optics and precision engineeri, 2016, 24(11): 2712-2720.
黄卫清, 陶杰, 孙梦馨, 等. 非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验[J]. 光学精密工程, 2016,24(11):2712-2720. DOI： 10.3788/OPE.20162411.2712.

Wei-qing HUANG, Jie TAO, Meng-xin SUN, et al. Modeling and experiment of precision rotary positioner with large stroke driven by non-resonant piezoelectric motor[J]. Editorial office of optics and precision engineeri, 2016, 24(11): 2712-2720. DOI： 10.3788/OPE.20162411.2712.

摘要

针对目前光波导封装使用的精密定位平台行程小，结构与控制系统复杂的问题，提出了非共振型压电电机驱动的大行程精密旋转定位平台。该平台通过压电电机的连续作动和步进作动两种工作模式来满足大行程和高精度要求。首先对该精密旋转定位平台进行动力学建模，确定了系统运动方程。然后，分析其作动机理，研究影响旋转平台转速的不同因素。最后，实验研究该精密旋转定位平台的速度、步距、分辨率与负载特性，确定平台连续作动与步进作动的驱动方式。实验结果表明，在直流偏置为60 V，峰峰电压为120 V，频率为180 Hz的正弦波电压激励下，该精密旋转定位平台最大转速可达47 963.2

rad/s，分辨率和最大负载分别为3

rad和60 g。与现有的大行程精密定位旋转平台相比，设计的平台具有行程大，精度高，结构简单，稳定可控，且装配调试方便，易于批量化生产等优势。

Abstract

A precision rotary positioner with a large stroke driven by the non-resonant piezoelectric motor was proposed to solve the problem of short stoke

complicated structure and control of the precision positioner in optical waveguide packaging. The precision rotary positioner could meet the needs of large stroke and high precision by two driving modes of continuous actuating and stepping actuating. Firstly

the dynamic model of the rotary positioner was established and the kinematics formula of system was presented. Then

the principle of movement was analyzed and the impact factors of rotate speed were researched. Finally

the characters of rotate speed

step displacement

resolution and load were tested

and driving modes of continuous actuating and stepping actuating were discussed. The experimental results indicate that the top speed of precision rotary positioner reaches about 47 963.2

rad/s at the driving sinusoidal voltage in a peak-peak value of 120 V

an offset of 60 V and a frequency of 180 Hz. Moreover

the rotary resolution of precision rotary positioner is about 3

rad and the maximum load is 60 g. This precision rotary positioner has characteristics of large stroke

high precision

simple structure

stable controllability and fast response. As compared with the existing precision rotary positioner

the new one presented in the paper has more larger stroke

higher precision

simpler structure and is more convenient to be assembled

adjusted

and produced in batch.

关键词

Keywords

references

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