齿形结构的长脉冲敏感型微加速度开关

步超; 聂伟荣; 罗乔; 周织建

doi:10.3788/OPE.20162411.2730

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齿形结构的长脉冲敏感型微加速度开关

微纳技术与精密机械 | 更新时间：2020-07-07

- 齿形结构的长脉冲敏感型微加速度开关
- Micro acceleration switch with tooth-shaped structure for long pulse sensitivity
- 光学精密工程 2016年24卷第11期页码：2730-2737
- 作者机构：
  
  南京理工大学机械工程学院, 江苏南京 210094
- 作者简介：
  
  [ "步超(1991-),男,江苏扬州人,博士研究生,2014于南京理工大学获得学士学位,主要从事MEMS惯性器件的设计与可靠性研究。E-mail:buxychao@163.com" ]
  聂伟荣(1969-),女,山西原平人,博士,副教授,2002于南京理工大学获得博士学位,主要从事引信MEMS安全系统技术研究以及智能探测与控制技术研究。E-mail:njnwr@hotmail.comE-mail:njnwr@hotmail.com
- 基金信息：
  
  国家自然科学基金资助项目(51475245)
- DOI：10.3788/OPE.20162411.2730
  中图分类号： TM564
- 收稿日期：2016-05-07，
  
  录用日期：2016-6-20，
  
  纸质出版日期：2016-11-25
- 稿件说明：
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步超, 聂伟荣, 罗乔, 等. 齿形结构的长脉冲敏感型微加速度开关[J]. 光学精密工程, 2016,24(11):2730-2737.

Chao BU, Wei-rong NIE, Qiao LUO, et al. Micro acceleration switch with tooth-shaped structure for long pulse sensitivity[J]. Editorial office of optics and precision engineeri, 2016, 24(11): 2730-2737.
步超, 聂伟荣, 罗乔, 等. 齿形结构的长脉冲敏感型微加速度开关[J]. 光学精密工程, 2016,24(11):2730-2737. DOI： 10.3788/OPE.20162411.2730.

Chao BU, Wei-rong NIE, Qiao LUO, et al. Micro acceleration switch with tooth-shaped structure for long pulse sensitivity[J]. Editorial office of optics and precision engineeri, 2016, 24(11): 2730-2737. DOI： 10.3788/OPE.20162411.2730.

摘要

针对智能武器电源管理系统对开关闭锁和断开的要求，提出了一种长脉冲敏感型微加速度开关。该开关带有齿形结构的悬空质量块和齿形导杆，通过质量块和导杆在运动过程中相互碰撞实现能量耗散，从而具有在高幅值窄脉冲加速度作用下保持断开，在低幅值长脉冲加速度作用下可靠闭锁的功能。介绍了开关结构和工作原理，对开关进行了理论分析和有限元分析，并对开关模型进行了简化。采用UV-LIGA技术制作了开关样机，利用样机试验和有限元分析相结合的方法验证了开关的功能。有限元仿真结果表明，该开关在3 000

/3 ms半正弦加速度作用下可靠闭锁。旋转台离心试验显示，开关的静态闭锁阈值为2 385.3

~2 475.6

。落锤冲击试验和有限元仿真结果均表明，开关在15 000

/0.3 ms半正弦加速度作用下没有闭锁。得到的结果表明该开关满足设计要求，能够应用于对加速度脉宽有区分要求的场合。

Abstract

A micro acceleration switch for long pulse sensitivity was proposed to meet the requirement of a power management system of intelligent weapons for switch latching/unlatching. The switch was designed by using a suspended mass with tooth-shaped structure and a tooth shape guide and the energy dissipation was realized by the mutual collision of the mass and tooth shape guide during the moving process. The switch could implement the unlatch under the high amplitude and narrow pulse width acceleration and the latch under the low amplitude and long pulse width acceleration reliably. The structure and working principle of the switch were introduced. Then

the theoretical analysis and finite element analysis(FEA) of the switch were carried out and its model was simplified. A prototype switch was prepared by UV-LIGA technology

and the functional properties of the switch were verified by the combination of FEA and prototype test. The FEA shows that the switch latches reliably under 3 000

/3 ms half sine acceleration pulse. The centrifugal test result shows that the static latching threshold of switch is from 2 385.3

to 2 475.6

. The dropping shock test and FEA results show that the switch do not latch under 15 000

/0.3 ms half-sine acceleration. These results demonstrate that the switch meets the design requirements and can be applied to the occasions where the pulse width is required to be distinguished.

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Keywords

references

XI Z, ZHANG P, NIE W, et al.. A novel MEMS omnidirectional inertial switch with flexible electrodes[J]. Sensors & Actuators A Physical, 2014, 212(6):93-101.

CAO Y, XI ZH W, YU P X, et al.. A MEMS inertial switch with a single circular mass for universal sensitivity[J]. Journal of Micromechanics & Microengineering, 2015, 25(10).

CURRANO L J, BECKER C R, LUNKING D, et al .. Triaxial inertial switch with multiple thresholds and resistive ladder readout[J]. Sensors & Actuators A Physical, 2013, 195(2):191-197.

KIM H, JANG Y H, KIM Y K, et al.. MEMS acceleration switch with bi-directionally tunable threshold[J]. Sensors & Actuators A Physical, 2014, 208(2):120-129.

MA C W, HUANG P C, KUO J C, et al .. A novel inertial switch with an adjustable acceleration threshold using an MEMS digital-to-analog converter[J]. Microelectronic Engineering, 2013, 110(20):374-380.

黄新龙, 熊瑛, 陈光焱,等. UV-LIGA技术制作微型螺旋形加速度开关[J]. 光学精密工程, 2010, 18(5):1152-1158.

HUANG X L, XIONG Y, CHEN G Y, et al.. Fabrication of micro spiral acceleration switch using UV-LIGA technology[J]. Opt. Precision Eng., 2010, 18(5):1152-1158. (in Chinese)

CHEN W, YANG Z, WANG Y, et al. . Influence of applied acceleration loads on contact time and threshold in an inertial microswitch with flexible contact-enhanced structure[J]. Sensors & Actuators A Physical, 2014, 216(3):7-18.

WANG Y, YANG Z, XU Q, et al .. Design, simulation and characterization of a MEMS inertial switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time[J]. Journal of Micromechanics & Microengineering, 2015, 25(8).

CURRANO L J, YU M, BALACHANDRAN B. Latching in a MEMS shock sensor:Modeling and experiments[J]. Sensors & Actuators A Physical, 2010, 159(1):41-50.

GUO Z Y, ZHAO Q C, LIN L T, et al .. An acceleration switch with a robust latching mechanism and cylindrical contacts[J]. Journal of Micromechanics & Microengineering, 2010, 20(5).

TSAI T Y, YEH C L, LAI Y S, et al.. Response spectra analysis for undamped structural systems subjected to half-sine impact acceleration pulses[J]. Microelectronics Reliability, 2007, 47(8):1239-1245.

GILARDI G, SHARF I. Literature survey of contact dynamics modelling[J]. Mechanism & Machine Theory, 2002, 37(10):1213-1239.

HEMKER K J, LAST H. Microsample tensile testing of LIGA nickel for MEMS applications[J]. Materials Science and Engineering:A, 2001, 319:882-886.

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