压电驱动双面快速指向镜的设计

宋盛; 刘重飞; 苑自勇; 徐卫明; 舒嵘

doi:10.3788/OPE.20162411.2777

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压电驱动双面快速指向镜的设计

微纳技术与精密机械 | 更新时间：2020-07-07

- 压电驱动双面快速指向镜的设计
- Design of double-sided fast steering mirror based on piezoelectric actuating
- 光学精密工程 2016年24卷第11期页码：2777-2782
- 作者机构：
  
  1.中国科学院上海技术物理研究所空间主动光电技术中科院重点实验室, 上海 200083
  2.中国科学大学量子信息与量子科技前沿协同创新中心, 安徽合肥 230026
- 作者简介：
  
  舒嵘(1971-),男,浙江温岭人,博士,研究员,1992年于合肥工业大学获得学士学位,主要从事空间激光遥感与探测技术方面的研究。E-mail:shurong@mail.sitp.ac.cnE-mail:shurong@mail.sitp.ac.cn
- 基金信息：
  
  国家自然科学基金资助项目(2014AA7100012)
- DOI：10.3788/OPE.20162411.2777
  中图分类号： TN958.98;TP722
- 收稿日期：2016-05-10，
  
  录用日期：2016-6-17，
  
  纸质出版日期：2016-11-25
- 稿件说明：
移动端阅览
宋盛, 刘重飞, 苑自勇, 等. 压电驱动双面快速指向镜的设计[J]. 光学精密工程, 2016,24(11):2777-2782.

Sheng SONG, Chong-fei LIU, Zi-yong YUAN, et al. Design of double-sided fast steering mirror based on piezoelectric actuating[J]. Editorial office of optics and precision engineeri, 2016, 24(11): 2777-2782.
宋盛, 刘重飞, 苑自勇, 等. 压电驱动双面快速指向镜的设计[J]. 光学精密工程, 2016,24(11):2777-2782. DOI： 10.3788/OPE.20162411.2777.

Sheng SONG, Chong-fei LIU, Zi-yong YUAN, et al. Design of double-sided fast steering mirror based on piezoelectric actuating[J]. Editorial office of optics and precision engineeri, 2016, 24(11): 2777-2782. DOI： 10.3788/OPE.20162411.2777.

摘要

考虑相干激光雷达对光束波前的要求，设计了压电驱动双面快速指向镜系统以实现相干激光遥感探测的高精度大范围指向定位。研究了系统的机械结构和电子学控制方法。结合指向角度、通光口径及信号带宽的实际工程应用需求，选择了合理的致动器和位移放大机构。针对压电陶瓷固有的迟滞和蠕变等非线性效应，设计了以应变片作为位移传感器的模拟比例-积分-微分（Proportion Intergration Differentiation，PID）闭环反馈控制方法。在仿真分析指向镜固有模态频率的基础上，确定了周边支撑的反射镜支撑方式。实验结果表明，该指向系统能够达到指向范围为27 mrad×27 mrad、绝对定位精度优于27

rad、偏转速率为2.7 rad/s的指标，基本满足激光遥感探测对探测范围、探测精度、探测速率等指向定位的要求。

Abstract

According to the requirements of laser radars for beam wavefront

a piezo-activated double-sided and fast-steering mirror was designed to realize the high-accuracy beam pointing and wide scanning range of a coherent laser remote system. The mechanical structure of the system and its electronics control method were researched. In consideration of the system requirements for the point angle

clear aperture and the signal bandwidth

an actuator and a displacement amplification mechanism were chosen. To overcome the nonlinear effect of piezoelectric ceramics

such as hysteresis and creep

an analog Proportion Intergration Differentiation(PID) closed-loop feedback control method by taking a strain gauge as the displacement sensor was designed. By analysis of the natural modal frequencies of the pointing mirror

the circum support was determined as the mirror support manner. Experimental results indicate that the pointing accuracy and scanning speed of the system are respectively 27

rad and 2.7 rad/s at the range of 27 mrad×27 mrad

which satisfies the requirements of laser remote sensing for detection ranges

detection accuracy and detection speeds.

关键词

Keywords

references

鲁亚飞. 快速反射镜机械结构特性设计问题研究[D]. 长沙:国防科技大学,2009.

LU Y F. Research on Fast/Fine Steering Mirror system [D]. Changsha:National University of Defense Technology, 2009.(in Chinese)

张丽敏,郭劲,陈娟. 快速反射镜机械结构研究综述[J]. 光机电信息,2005,3:21-25.

ZHANG L M, GUO J, CHEN J. Summary of the mechanic structure for fast-steering mirrors[J]. OmeInformation, 2005, 3:21-25.(in Chinese)

吴博达,鄂世举,杨志刚,等. 压电驱动与控制技术的发展与应用[J]. 机械工程学报,2003,39(10):79-86.

WU B D, E SH J, YANG ZH G, et al.. Development and application of piezoelectric actuation and control[J]. Chinese Journal of Mechanical Engineering, 2003, 39(10):79-86.(in Chinese)

SWEENEY M, RYNKNOWSKI G, KETABCHI M. Design considerations for fast steering mirror[J]. SPIE, 2002, 4773:63-73.

FRANCISC M T, DEREK J E, TIMOTHY R H, et al.. High band width fast steering mirror[J]. SPIE, 2005, 5877:1-14.

徐飞飞,纪明,赵创社. 快速偏转反射镜研究现状及关键技术[J]. 应用光学,2010,31(5):847-851.

XU F F, JI M, ZHAO CH SH. Status of fast steering mirror[J]. Journal of Applied Optics, 2010, 31(5):847-851.(in Chinese)

徐新行,韩旭东,王兵,等. 机载刚性支撑式快速控制反射镜设计[J]. 光学精密工程,2016,24(1):126-133.

XU X X, HAN X D, WANG B, et al.. Design of fast steering mirror with rigid support structure for airborne platform[J]. Opt. Precision Eng., 2016, 24(1):126-133.(in Chinese)

杨立斌. 纳米级微定位平台的设计及实验研究[D]. 天津:天津大学,2005.

YANG L B. The Design and Experimental Research of Nano-Positioning Table [D]. Tianjin:Tianjin University, 2005.(in Chinese)

鲁亚飞,范大鹏,范世珣,等. 快速反射镜两轴柔性支承设计[J]. 光学精密工程,2010,18(12):2574-2583.

LU Y F, FAN D P, FAN SH X, et al.. Design of two-axis elastic support for fast steering mirror[J]. Opt. Precision Eng., 2010, 18(12):2574-2583.(in Chinese)

卢倩,黄卫清,孙梦馨. 基于柔度比优化设计杠杆式柔性铰链放大机构[J]. 光学精密工程,2016,24(1):102-111.

LU Q, HUANG W Q, SUN M X. Optimization design of amplification mechanism for level flexure hinge based on compliance ratio[J]. Opt. Precision Eng., 2016, 24(1):102-111.(in Chinese)

陈美文. 微小型扫描反射镜的柔顺机构设计及仿真建模[D]. 西安:西安电子科技大学,2012.

CHEN M W. The Design and Simulation Modeling of Compliant Mechanism of Micro Scanning Mirror [D]. Xi'an:Xidian University, 2012.(in Chinese)

林洁琼,王磊,李迎春,等. 基于有限元的柔性铰链微位移放大机构设计[J]. 机床与液压,2009,37(10):21-23.

LIN J Q, WANG L, LI Y CH, et al.. Design for micro-displacement magnification mechanism of flexible hinge based on finite element method[J]. Machine Tool & Hydraulics, 2009, 37(10):21-23.(in Chinese)

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