大口径传输反射镜的研究进展

易葵; 马平; 邱红; 王力军; 魏朝阳; 赵元安; 朱美萍

doi:10.3788/OPE.20162412.2902

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大口径传输反射镜的研究进展

高功率激光光学元器件 | 更新时间：2020-08-13

- 大口径传输反射镜的研究进展
- Progress on large aperture transport mirrors
- 光学精密工程 2016年24卷第12期页码：2902-2907
- 作者机构：
  
  1.中国科学院上海光学精密机械研究所, 上海 201800
  2.成都精密光学工程研究中心, 四川成都 610041
  3.成都光明光电有限公司, 四川成都 610100
  4.北京有色金属研究总院稀有金属冶金材料研究所, 北京 100088
- 作者简介：
  
  易葵(1970-), 男, 正高级工程师, 现任中国光学学会光学薄膜专业委员会副主任委员、上海市激光学会薄膜专业委员会主任委员, 主要从事光学薄膜的研究, 包括高功率激光薄膜、软X射线激光薄膜、薄膜测试技术和薄膜生长监控控制技术等。E-mail:kyi@siom.ac.cn YI Kui, E-mail: kyi@siom.ac.cn
- 基金信息：
  
  国家科技专项资助项目
- DOI：10.3788/OPE.20162412.2902
  中图分类号： TN305.2;TH703
- 收稿日期：2016-10-26，
  
  录用日期：2016-11-8，
  
  纸质出版日期：2016-12-25
- 稿件说明：
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易葵, 马平, 邱红, 等. 大口径传输反射镜的研究进展[J]. 光学精密工程, 2016,24(12):2902-2907.

Kui YI, Ping MA, Hong QIU, et al. Progress on large aperture transport mirrors[J]. Optics and precision engineering, 2016, 24(12): 2902-2907.
易葵, 马平, 邱红, 等. 大口径传输反射镜的研究进展[J]. 光学精密工程, 2016,24(12):2902-2907. DOI： 10.3788/OPE.20162412.2902.

Kui YI, Ping MA, Hong QIU, et al. Progress on large aperture transport mirrors[J]. Optics and precision engineering, 2016, 24(12): 2902-2907. DOI： 10.3788/OPE.20162412.2902.

摘要

针对我国惯性约束聚变装置（ICF）对高性能传输反射镜元件的性能要求，探索了大口径传输反射镜制备涉及的关键技术与工艺。深入开展了K9玻璃坯片研制、光学冷加工、传输反射镜镀膜和激光预处理等方面的研究工作。提出了400 mm口径K9反射类坯片精密退火工艺，形成了高精度平面加工技术路线；制备了低缺陷薄膜，并且建立了大口径光学元件预处理装置。最后，综述了大口径高性能传输反射镜研制方面的主要成果。研制的400 mm口径传输反射镜在1 053 nm处以45°入射时，其表面粗糙度优于99.8%，面形PV值小于λ/3（λ=1 053 nm），损伤阈值大于30 J/cm

（5 ns）。基于提出的技术研制的大口径传输反射镜已成功应用于我国神光系列高功率激光装置，有力支撑了我国大型激光装置的稳定运行。

Abstract

For the requirements of Inertial Confinement Fusion (ICF) facility for large aperture transport mirrors with higher performance

key technologies and special processing involved in mirror machining are explored. Some kinds of machining technologies

including the manufacturing of K9 glass blanks

optics cold processing

coating for transport mirrors and laser conditioning are investigated. The precision annealing process of 400 mm aperture K9 glass blank is proposed to implement the high precision optical finishing. Moreover

Low-defect coating is achieved. A preprocessing device for the larger aperture optical element is established and a laser conditioning platform for large aperture transport mirror is also realized. Finally

the paper reviews main achievements of development of large aperture transport mirrors. A 400 mm aperture transport mirror with an incidence angle of 45° shows its surface roughness to be higher than 99.8%

surface figure (PV value) lower than λ/3

and the laser-induced damage threshold higher than 30 J/cm

(5 ns) at 1 053 nm. The large aperture transport mirrors have been successfully used in the higher power laser equipment of SG ICF facility

which supports the stable operation of the facility.

关键词

Keywords

references

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